JPH01177264U - - Google Patents
Info
- Publication number
- JPH01177264U JPH01177264U JP7425588U JP7425588U JPH01177264U JP H01177264 U JPH01177264 U JP H01177264U JP 7425588 U JP7425588 U JP 7425588U JP 7425588 U JP7425588 U JP 7425588U JP H01177264 U JPH01177264 U JP H01177264U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum
- orifice
- evacuation device
- valve
- surface treatment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002184 metal Substances 0.000 claims 3
- 238000004381 surface treatment Methods 0.000 claims 2
- 238000005121 nitriding Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
Description
第１図は本考案の実施例の真空排気装置の概念
図、第２図は第１図の要部詳細図、第３図のＡ〜
Ａ断面を示し、第３図は第２図の側面図、第４図
は従来の真空排気装置の概念図である。
１…真空チヤンバー、３…排気管、４…真空ポ
ンプ、８…バタフライバルブ、１５…オリフイス
。
Fig. 1 is a conceptual diagram of a vacuum evacuation device according to an embodiment of the present invention, Fig. 2 is a detailed view of the main parts of Fig. 1, and Fig. 3 shows A to A of Fig. 3.
A cross section is shown, FIG. 3 is a side view of FIG. 2, and FIG. 4 is a conceptual diagram of a conventional vacuum evacuation device. 1... Vacuum chamber, 3... Exhaust pipe, 4... Vacuum pump, 8... Butterfly valve, 15... Orifice.
Claims (1)
行うための真空チヤンバーに一端を連通し、他端
を真空ポンプに通じた真空排気装置において、該
真空排気装置にメインバルブの他、オリフイス付
バルブを介在させ、該オリフイス付バルブのオリ
フイスにより、前記真空チヤンバーの圧力を金属
表面処理操作中、一定に保持することを特徴とす
る金属表面処理設備の真空排気装置。 In a vacuum evacuation device that connects one end to a vacuum chamber and the other end to a vacuum pump for processing metal surfaces such as ion nitriding or vacuum carburization, the evacuation device is equipped with a valve with an orifice in addition to the main valve. A vacuum evacuation device for metal surface treatment equipment, characterized in that the pressure in the vacuum chamber is maintained constant during the metal surface treatment operation by an orifice of the orifice-equipped valve.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7425588U JPH01177264U (en) | 1988-06-06 | 1988-06-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7425588U JPH01177264U (en) | 1988-06-06 | 1988-06-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01177264U true JPH01177264U (en) | 1989-12-18 |
Family
ID=31299373
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7425588U Pending JPH01177264U (en) | 1988-06-06 | 1988-06-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01177264U (en) |
-
1988
- 1988-06-06 JP JP7425588U patent/JPH01177264U/ja active Pending