JPS58123980U - stop valve - Google Patents

stop valve

Info

Publication number
JPS58123980U
JPS58123980U JP1995782U JP1995782U JPS58123980U JP S58123980 U JPS58123980 U JP S58123980U JP 1995782 U JP1995782 U JP 1995782U JP 1995782 U JP1995782 U JP 1995782U JP S58123980 U JPS58123980 U JP S58123980U
Authority
JP
Japan
Prior art keywords
valve
vacuum chamber
stop valve
airtightly
exhaust device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1995782U
Other languages
Japanese (ja)
Inventor
金井　謙雄
加藤　重和
三村　昭夫
稔 空岡
Original Assignee
株式会社日立製作所
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社日立製作所 filed Critical 株式会社日立製作所
Priority to JP1995782U priority Critical patent/JPS58123980U/en
Publication of JPS58123980U publication Critical patent/JPS58123980U/en
Pending legal-status Critical Current

Links

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

図面は、本考案の一実施例を説明するもので、本考案に
よるストップバルブの縦断面図である。 １０ａ、１０ｂ・・・穴、１１・・・弁座、１２・・・
弁箱、１３・・・シール材、１４・・・弁、１５・・・
往復動装置、１６・・・往復動軸、１７・・・弁棒、１
８・・・ベローズ。The drawing is a longitudinal sectional view of a stop valve according to an embodiment of the present invention. 10a, 10b...hole, 11...valve seat, 12...
Valve box, 13...Sealing material, 14...Valve, 15...
Reciprocating device, 16... Reciprocating shaft, 17... Valve stem, 1
8...Bellows.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 真空室と、該真空室を排気する排気装置とを遮断スるス
トップバルブにおいて、前記真空室と前記排気、装置と
にそれぞれ連通ずる穴が穿設され、該穴の一方の周囲に
弁座が設けられた弁箱と、該弁箱に内設されると共！−
こ、弁座に気密に着座可能な弁と、該弁に設けられた大
気側を往復動可能な弁棒と、該弁棒を内股し弁箱と弁と
に気密に跨設されたベローズとで構成したことを特徴と
するストップバルブ。In a stop valve that shuts off a vacuum chamber and an exhaust device for evacuating the vacuum chamber, a hole is bored that communicates with the vacuum chamber, the exhaust device, and the device, and a valve seat is provided around one of the holes. The provided valve box and the valve box internally installed! −
This includes a valve that can be seated airtightly on a valve seat, a valve stem provided on the valve that can reciprocate on the atmosphere side, and a bellows that is spread between the valve stem and airtightly straddles the valve body and the valve. A stop valve characterized by comprising:
JP1995782U 1982-02-17 1982-02-17 stop valve Pending JPS58123980U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1995782U JPS58123980U (en) 1982-02-17 1982-02-17 stop valve

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1995782U JPS58123980U (en) 1982-02-17 1982-02-17 stop valve

Publications (1)

Publication Number Publication Date
JPS58123980U true JPS58123980U (en) 1983-08-23

Family

ID=30032145

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1995782U Pending JPS58123980U (en) 1982-02-17 1982-02-17 stop valve

Country Status (1)

Country Link
JP (1) JPS58123980U (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0267182U (en) * 1988-11-10 1990-05-21
JP2005016729A (en) * 2003-06-27 2005-01-20 Vat Holding Ag Control slide valve
JP2011075017A (en) * 2009-09-30 2011-04-14 Ckd Corp Vacuum valve
JP2011133005A (en) * 2009-12-24 2011-07-07 Murata Mfg Co Ltd Opening and closing valve
JP2013228109A (en) * 2013-07-31 2013-11-07 Murata Mfg Co Ltd Opening/closing valve

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0267182U (en) * 1988-11-10 1990-05-21
JP2005016729A (en) * 2003-06-27 2005-01-20 Vat Holding Ag Control slide valve
JP2011075017A (en) * 2009-09-30 2011-04-14 Ckd Corp Vacuum valve
JP2011133005A (en) * 2009-12-24 2011-07-07 Murata Mfg Co Ltd Opening and closing valve
JP2013228109A (en) * 2013-07-31 2013-11-07 Murata Mfg Co Ltd Opening/closing valve

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