JP2011075017A - Vacuum valve - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a vacuum valve capable of increasing conductance without enlarging the total height of the valve. <P>SOLUTION: In the vacuum valve 1 arranged in piping connected to a vacuum vessel and controlling the degree of vacuum in the vacuum vessel by opening and closing of the valve, a body 2 including a valve element 5 therein is a cylindrical shape, a first cylindrical hole part 109 and a second cylindrical hole part 3 are provided on a side surface of the body 2 by the same processing method. A port forming member 104 is connected to the first cylindrical hole part 109, and a closing member 4 closing an opening end surface of the second cylindrical hole part 3 is connected to the second cylindrical hole part 3. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to a vacuum valve that is disposed on a pipe connected to a vacuum vessel and controls the degree of vacuum in the vacuum vessel by opening and closing the valve.

  Conventionally, for example, in a semiconductor manufacturing process, a vacuum pressure control system for alternately supplying and exhausting process gas and barge gas in a vacuum vessel in which a wafer is arranged has been proposed. In such a vacuum pressure control system, a vacuum valve is connected between the vacuum vessel and the vacuum pump. This vacuum valve controls the vacuum pressure of the process gas supplied into the vacuum vessel by opening and closing the valve or changing the opening of the valve (see, for example, Patent Document 1).

FIG. 12 is a partial sectional side view of a conventional vacuum valve 101.
In the vacuum valve 101, an input port forming member 103 is welded to a lower end opening of a tubular body 102. The input port forming member 103 is arranged so that the valve seat 105 protrudes into the body 102. A hole is formed on the side surface of the body 102, and the hole 109 is plastically processed to provide a cylindrical hole 109. An output port forming member 104 is welded to the cylindrical hole 109. The drive unit 106 projects the lower end portion of the drive shaft 107 into the body 102, and causes the valve body 108 connected to the lower end portion of the drive shaft 107 to contact or separate from the valve seat 105, whereby the input port forming member 103. Supply or blocking of the fluid flowing from the output port forming member 104 to the output port forming member 104 is controlled. The bellows 110 is disposed in the body 102 so as to extend and retract so as to cover the drive shaft 107, and prevents particles generated from the atmosphere and the sliding portion of the drive shaft 107 from flowing into the body 102 (for example, Patent Document 2). reference).

JP-A-9-72458 JP 2009-74681 A

  In recent years, vacuum containers have become larger, and it is desired to increase the conductance of the vacuum valve 101 in order to reduce the pressure in the container at once. If the conductance of the vacuum valve 101 is simply increased, it is considered that the overall valve height of the vacuum valve 101 should be increased to increase the valve stroke. However, in a semiconductor manufacturing apparatus or the like to which the vacuum valve 101 is attached, downsizing and integration have progressed, and it is difficult to increase the overall height of the vacuum valve 101 because of installation space. Therefore, there is a demand from the industry for a vacuum valve that can increase conductance without increasing the overall height of the valve.

  The present invention has been made to solve the above problems, and an object of the present invention is to provide a vacuum valve capable of increasing conductance without increasing the overall valve height.

  In the configuration of the present invention, in a vacuum valve that is disposed on a pipe connected to a vacuum vessel and controls the degree of vacuum in the vacuum vessel by opening and closing the valve, the body containing the valve body is cylindrical, A first cylindrical hole and a second cylindrical hole are provided on the side surface of the body by the same processing method, a port forming member is connected to the first cylindrical hole, and the second cylindrical hole is A closing member for closing the opening end surface of the second cylindrical hole is connected.

  In the configuration of the present invention, in a vacuum valve that is disposed on a pipe connected to a vacuum vessel and controls the degree of vacuum in the vacuum vessel by opening and closing the valve, the body containing the valve body is cylindrical, A first cylindrical hole and a second cylindrical hole are provided on the side surface of the body by the same processing method, and a port forming member is connected to the first and second cylindrical holes.

  In the configuration of the present invention, in a vacuum valve that is disposed on a pipe connected to a vacuum vessel and controls the degree of vacuum in the vacuum vessel by opening and closing the valve, the body containing the valve body is cylindrical, The first cylindrical hole and the second cylindrical hole are provided in the same shape on the side surface of the body, a port forming member is connected to the first cylindrical hole, and the second cylindrical hole is connected to the second cylindrical hole. A closing member for closing the opening end face of the two cylindrical holes is connected.

  In the configuration of the present invention, in a vacuum valve that is disposed on a pipe connected to a vacuum vessel and controls the degree of vacuum in the vacuum vessel by opening and closing the valve, the body containing the valve body is cylindrical, The first cylindrical hole and the second cylindrical hole are provided in the same shape on the side surface of the body, and a port forming member is connected to the first and second cylindrical holes.

  As for the vacuum valve of the said structure, it is desirable for the said 1st and said 2nd cylindrical hole part to be provided by the ball removal method.

  In the vacuum valve having the above-described configuration, the first cylindrical hole and the second cylindrical hole are provided in the same processing method or the same shape on the side surface of the cylindrical body, and the port forming member is provided in the first cylindrical hole. While connecting to allow the fluid to be output from the port forming member, the closing member is connected to the second cylindrical hole portion to close the open end surface of the second cylindrical hole portion, and between the valve body and the body. The gap formed is increased. In such a vacuum valve, the fluid can easily flow between the valve body on the second cylindrical hole side and the body, and the second cylindrical shape even with the same valve stroke as the vacuum valve not including the second cylindrical hole part. The discharge flow rate increases compared to a vacuum valve without a hole. Therefore, according to the vacuum valve having the above configuration, the conductance can be increased without increasing the overall height of the valve.

  The vacuum valve having the above structure is provided with the first cylindrical hole portion and the second cylindrical hole portion in the same processing method or in the same shape on the side surface of the cylindrical body, and ports are provided in the first and second cylindrical hole portions. Connect the forming members to output fluid in multiple directions. In such a vacuum valve, the fluid flows to the first and second cylindrical hole portions and is discharged as it is from the port forming member. Therefore, even with the same valve stroke as the vacuum valve not including the second cylindrical hole portion, The discharge flow rate increases from a vacuum valve that does not have two cylindrical holes. Therefore, according to the vacuum valve having the above configuration, the conductance can be increased without increasing the overall height of the valve.

  In the vacuum valve having the above configuration, since the first and second cylindrical hole portions are provided by the ball-blowing method, the same manufacturing equipment can be used, the number of welding points can be reduced, and the number of processing and the manufacturing cost can be reduced. .

It is a partial cross section side view of the vacuum valve concerning the embodiment of the present invention, and shows a valve closed state. It is a partial cross section side view of the vacuum valve shown in FIG. 1, Comprising: A valve open state is shown. It is the schematic block diagram which looked at the valve part structure of the vacuum valve shown in FIG. 1 from upper direction. It is a partial cross section side view of the 1st comparative example of the vacuum valve shown in FIG. It is a schematic block diagram of the 2nd comparative example of the vacuum valve shown in FIG. It is a partial cross section side view of the 1st modification of the vacuum valve shown in FIG. It is a figure which shows the numerical analysis result of the speed of the fluid which flows into the conventional vacuum valve shown in FIG. It is a figure which shows the numerical analysis result of the flow velocity of the fluid which flows into the vacuum valve of the 1st comparative example shown in FIG. It is a figure which shows the numerical analysis result of the flow velocity of the fluid which flows into the vacuum valve of the 2nd comparative example shown in FIG. It is a figure which shows the numerical analysis result of the flow velocity of the fluid which flows into the vacuum valve of this embodiment shown in FIG. It is a figure which shows the numerical analysis result of the flow velocity of the fluid which flows into the vacuum valve of the 1st modification shown in FIG. It is a partial cross section side view of the conventional vacuum valve.

  Hereinafter, an embodiment of a vacuum valve according to the present invention will be described with reference to the drawings.

FIG.1 and FIG.2 is a partial cross section side view of the vacuum valve 1 which concerns on embodiment of this invention, FIG. 1 shows the valve closed state and FIG. 2 has shown the valve open state. FIG. 3 is a schematic configuration diagram of the valve portion structure of the vacuum valve 1 shown in FIG. 1 as viewed from above.
A vacuum valve 1 shown in FIG. 1 and FIG. 2 is disposed on a pipe connecting a vacuum vessel and a vacuum pump provided in a vacuum pressure control system of a semiconductor manufacturing apparatus, for example, and is opened and closed to open the vacuum pump from the vacuum vessel. The flow rate of fluid flowing into the vacuum vessel is controlled, and the degree of vacuum in the vacuum vessel is controlled. Except for the shapes of the body 2 and the valve body 5, the vacuum valve 1 has the same configuration as the vacuum valve 101 shown in FIG.

  As shown in FIGS. 1 and 2, the body 2 is formed of a metal such as SUS in a cylindrical shape, and has a strength that can withstand high vacuum. An input port forming member 103 is welded to the lower end opening of the body 2 in the drawing, and a flat valve seat 105 is formed by the upper end surface of the cylindrical portion protruding into the body 2. The body 2 is provided with cylindrical holes 109 and 3 near the valve seat 105. On the side surface of the body 2, cylindrical holes 109 and 3 having the same shape are provided in the same position at symmetrical positions with respect to the axis. The cylindrical hole portions 109 and 3 are formed integrally with the body 2 without a seam by making a hole in the side surface of the body 2 and plastically processing the hole into a cylindrical shape (ball-drawing method). Since the cylindrical holes 109 and 3 are provided at the same height and the same shape with respect to the body 2, the operator can change the direction of the body 2 without changing the setting of the processing apparatus. Portions 109 and 3 can be formed. An R having rounded corners is provided between the cylindrical hole portions 109 and 3 and the body 2 to make it difficult for fluid to form a staying portion or a turbulent portion around the cylindrical hole portions 109 and 3.

  The output port forming member 104 is abutted and welded to the end face of the cylindrical hole 109 (an example of the first cylindrical hole), and can be connected to the pipe. On the other hand, a closing member 4 is abutted and welded to an end surface of the cylindrical hole 3 (an example of the second cylindrical hole), and an end surface opening of the cylindrical hole 3 is closed. The closing member 4 has a cylindrical shape with one end closed, and as shown by S1 in the drawings shown in FIGS. 1 to 3, the internal volume of the body 2 together with the cylindrical hole portion 3 is set as an output port forming member 104 (cylindrical shape). The gap between the valve body 5 and the body 2 is increased by expanding outwardly from the hole 109).

  As shown in FIGS. 1 and 2, the valve body 5 is screwed into the lower end of the drive shaft 107 so that it can be attached to and detached from the drive shaft 107. The valve body 5 sandwiches an O-ring 7 made of an elastic material such as resin or rubber by a plate-like disk 6 and is fixed to the lower end of the drive shaft 107 with a screw. The valve body 5 has a flat surface facing the valve seat 105. The valve body 5 is welded with a lower end portion of a bellows 110 disposed in the body 2 so as to cover the drive shaft 107. The bellows 110 expands and contracts in accordance with the operation of the valve body 5 and prevents particles and air generated from the sliding portion of the drive shaft 107 from flowing into the flow path.

As shown in FIG. 1, such a vacuum valve 1 is configured such that the input port forming member 103 is changed to the output port forming member 104 while the driving unit 106 closely contacts the O-ring 7 of the valve body 5 with the valve seat 105. Fluid does not flow.
On the other hand, as shown in FIG. 2, in the vacuum valve 1, when the driving unit 106 moves the valve body 5 away from the valve seat 105, the fluid flows from the input port forming member 103 to the output port forming member 104.

Next, numerical analysis of the fluid flow velocity will be described. FIG. 4 is a partial cross-sectional side view showing a first comparative example of the vacuum valve 1. FIG. 5 is a schematic configuration diagram of a second comparative example of the vacuum valve 1. FIG. 6 is a partial cross-sectional side view showing a first modification of the vacuum valve 1.
Numerical analysis of the flow velocity includes the conventional vacuum valve 101 shown in FIG. 12, the vacuum valve 31 of the first comparative example shown in FIG. 4, the vacuum valve 21 of the second comparative example shown in FIG. 5, the vacuum valve 1 shown in FIG. This was performed for the vacuum valve 11 of the first modification shown in FIG.

The vacuum valve 31 of the first comparative example shown in FIG. 4 has the same configuration as the vacuum valve 1 shown in FIG. 1 except that the body 102 of the conventional vacuum valve 101 shown in FIG. 12 is used. In other words, the vacuum valve 31 has the same configuration as the conventional vacuum valve 101 shown in FIG.
The vacuum valve 21 of the second comparative example shown in FIG. 5 is the vacuum valve shown in FIG. 1 except that the side surface opposite to the output port forming member 103 is expanded to make the inner wall shape of the body 21 substantially elliptical. 1 and the configuration are common.
The vacuum valve 11 of the first modification shown in FIG. 6 is the vacuum valve 1 shown in FIG. 1 except that the output port forming member 12 having the same shape as the output port forming member 104 is welded to the cylindrical hole portion 3. And the configuration is common.

  For this analysis, commercially available analysis software “SCRYU (registered trademark)” was used. The analysis conditions are that the compressive fluid obtained by compressing air at 30 ° C. with the same valve opening degree of each vacuum valve is supplied to the input port forming member 103, and the pressure on the input port forming member 103 side is 133.32 Pa. The pressure on the output port forming member 104 side is 0 Pa, and the differential pressure of the input / output port is 133.32 Pa.

  7 to 11 are diagrams showing the numerical analysis results of the flow velocity. FIG. 7 is a diagram showing a numerical analysis result of the velocity of the fluid flowing through the conventional vacuum valve 101 shown in FIG. FIG. 8 is a diagram showing a numerical analysis result of the flow velocity of the fluid flowing through the vacuum valve 31 of the first comparative example shown in FIG. FIG. 9 is a diagram showing a numerical analysis result of the flow velocity of the fluid flowing through the vacuum valve 21 of the second comparative example shown in FIG. FIG. 10 is a diagram showing a numerical analysis result of the flow velocity of the fluid flowing through the vacuum valve 1 of the present embodiment shown in FIG. FIG. 11 is a diagram showing a numerical analysis result of the flow velocity of the fluid flowing through the vacuum valve 11 of the first modification shown in FIG.

  As shown in FIG. 7, the conventional vacuum valve 101 shown in FIG. 12 has a convex portion 108a that protrudes toward the valve seat 105 and is provided on the valve body 108, so that there is a gap between the valve body 108 and the body 102. Is small. Therefore, as shown by Y1 and Y2 in FIG. 7, the fluid hardly flows between the valve body 108 and the body 102 and flows intensively from the valve seat 105 to the output port forming member 104. In such a vacuum valve 101, the discharge amount of the fluid discharged from the output port forming member 104 was 3,125 L / min.

  The vacuum valve 31 of the first comparative example shown in FIG. 4 has a larger clearance between the valve body 5 and the body 102 than the conventional vacuum valve 101 by flattening the valve seat side end surface of the valve body 5. Therefore, as indicated by Y12 in FIG. 8, the vacuum valve 31 is indicated by Y11 in the drawing although the flow rate of the fluid flowing between the valve body 5 and the body 102 is almost the same as that of the conventional vacuum valve 101. As described above, the flow velocity of the fluid flowing from the valve seat 105 to the output port forming member 104 is higher in a wider area than the conventional vacuum valve 101. In such a vacuum valve 31, the discharge amount of the fluid discharged from the output port forming member 104 is 3,373 L / min, which is about 1.08 times the discharge amount of the conventional vacuum valve 101. Therefore, in the vacuum valve 31, it is easier for the fluid to flow from the valve seat 105 to the output port forming member 104 than in the conventional vacuum valve 101, and the conductance is increased.

  In the vacuum valve 21 of the second comparative example shown in FIG. 5, the volume around the valve body 5 is made larger than that of the conventional vacuum valve 101 by expanding the body 22 as indicated by S <b> 2 in the figure. Therefore, as shown by Y22 in FIG. 9, the vacuum valve 21 is easier to flow between the valve body 5 and the body 22 than the conventional vacuum valve 101 and the vacuum valve 31 of the first comparative example. Yes. As indicated by Y23 in the figure, the fluid flowing between the valve body 5 and the body 22 turns around the valve body 5, and flows into the output port forming member 104 as indicated by Y21 in the figure. For this reason, as indicated by Y21 in the figure, the fluid flowing from the valve seat 105 to the output port forming member 104 has a higher flow velocity than the conventional vacuum valve 101 and the vacuum valve 31 of the first comparative example, and tends to flow. In such a vacuum valve 21, the discharge amount of the fluid discharged from the output port forming member 104 is 3,746 L / min, which is about 1.2 times the discharge amount of the conventional vacuum valve 101, and The discharge amount of the vacuum valve 31 of one comparative example is increased to about 1.1 times. Therefore, the vacuum valve 21 makes it easier for fluid to flow from between the valve body 5 and the expanding portion 23 to the output port forming member 104 than the vacuum valve 31 of the first comparative example and the conventional vacuum valve 101, and the conductance is large. became.

  The vacuum valve 1 of the present embodiment shown in FIG. 1 is provided with a cylindrical hole 3 having the same shape as the cylindrical hole 109 on the opposite side of the body 2 from the output port forming member 104 (cylindrical hole 109). By closing the hole 3 with the closing member 4, the gap between the valve body 5 and the body 2 is enlarged on the side opposite to the output port forming member 104, as indicated by S 1 in the figure. Therefore, in the vacuum valve 1, as shown by Y <b> 32 in FIG. 10, compared to the conventional vacuum valve 101, the fluid easily flows between the valve body 5 and the body 2. As indicated by Y33 in the figure, the fluid flowing between the valve body 5 and the body 2 flows around the valve body 5 and flows to the output port forming member 104. Therefore, as indicated by Y31 in the figure, the vacuum valve 1 has a higher flow rate of fluid flowing from the valve seat 105 to the output port forming member 104 than the conventional vacuum valve 101, and the fluid flows to the output port forming member 104. Cheap. In such a vacuum valve 1, the discharge amount of the fluid discharged from the output port forming member 104 is 3,700 L / min, which is about 1.11 times the discharge amount of the conventional vacuum valve 101. Therefore, in the vacuum valve 1, the fluid easily flows from the space between the valve body 5 on the cylindrical hole 3 side and the body 2 to the output port forming member 104 and the conductance is larger than the conventional vacuum valve 101.

  Here, the opening area of the gap S1 is smaller than the opening area of the gap S2. However, as shown in FIG. 3, the gap S <b> 1 has the shortest distance between the closing member 4 and the valve body 5 at the center of the closing member 4, and the clearance S <b> 1 is closed as the distance from the center of the closing member 4 increases in the vertical direction in the figure. It forms so that the distance between the member 4 and the valve body 5 may become long. Therefore, in the vacuum valve 1, the fluid easily flows from between the valve body 5 and the body 2 to the entire gap S <b> 1. On the other hand, as shown in FIG. 9, the gap S <b> 2 has the largest distance between the spreading portion 23 and the valve body 5 at the center portion of the spreading portion 23. It forms so that the distance between the expansion part 23 and the valve body 5 may become short as it leaves | separates to a direction. Therefore, in the vacuum valve 21 of the second comparative example, the fluid easily flows from between the valve body 5 and the body 22 to the center of the gap S1, but the fluid does not easily flow to both ends of the gap S2. 1, even if the opening area of the gap S <b> 1 is smaller than the opening area of the gap S <b> 2 of the vacuum valve 21, the fluid efficiently flows through the entire gap S <b> 1.

  The vacuum valve 11 of the first modification shown in FIG. 6 has an output port forming member 12 welded to a cylindrical hole 3 provided on the opposite side of the cylindrical hole 109. Therefore, in the vacuum valve 11, as shown by Y41 and Y42 in FIG. 11, the fluid flows to the output port forming members 109 and 12 at substantially the same flow rate. In such a vacuum valve 11, the discharge amount of the fluid discharged from the output port forming member 104 is 5,478 L / min, which is about 1.5 times the discharge amount of the conventional vacuum valve 101. Therefore, since the vacuum valve 11 outputs the fluid from two directions, the conductance is larger than that of the conventional vacuum valve 101 and the vacuum valve 1 of the present embodiment.

  As can be seen from the above numerical analysis results, in order to increase the conductance without changing the overall height of the valve, the valve body 5 having no convex portion is used on the valve seat side end surface, and the valve body 5 and the body 2 are separated from each other. I found that it would be better to increase the gap.

  The conductances of the vacuum valves 1 and 21 are similar. However, since the vacuum valve 21 presses and widens the inner wall shape of the body 22 by a method different from that of the cylindrical hole portion 109, a different device must be used for processing the cylindrical hole portion 109 and the extended portion 23. On the other hand, in the vacuum valve 1, since the cylindrical holes 109 and 3 are provided in the same shape by the same method, the same apparatus can be used for processing the cylindrical holes 109 and 3. Therefore, the vacuum valve 1 can improve the conductance by increasing the gap between the valve body 5 and the body 2 without increasing the overall height of the valve by a simpler method than the vacuum valve 21, and the vacuum valve 21. Better. In addition, the vacuum valve 11 is superior to the vacuum valve 1 if allowed by piping.

  As described above, in the vacuum valve 1, the cylindrical holes 109 and 3 are provided in the same manner and in the side surface of the cylindrical body 2, and the output port forming member 104 is connected to the cylindrical hole 109. Thus, while allowing fluid to be output from the output port forming member 104, the closing member 4 is connected to the cylindrical hole portion 3 to close the opening end surface of the cylindrical hole portion 3. The gap S1 formed therebetween is increased. In such a vacuum valve 1, a fluid easily flows between the valve body 5 on the cylindrical hole 3 side and the body 2, and even with the same valve stroke as the vacuum valve 101 without the cylindrical hole 3, The discharge flow rate increases from 101. Therefore, according to the vacuum valve 1, the conductance can be increased without increasing the overall height of the valve.

  In the vacuum valve 11, the cylindrical holes 109 and 3 are provided on the side surface of the cylindrical body 2 with the same processing method and the same shape, and the output port forming members 104 and 12 are connected to the cylindrical holes 109 and 3. The fluid is output in two directions. In such a vacuum valve 11, the fluid flows to the cylindrical hole portions 109, 3 side and is discharged from the output port forming members 104, 12 as it is, so that the same valve stroke as the vacuum valve 101 without the cylindrical hole portion 3 is provided. However, the discharge flow rate increases from the vacuum valve 101. Therefore, according to the vacuum valve 11, the conductance can be increased without increasing the overall height of the valve.

Since the vacuum valves 1 and 11 are provided with the cylindrical holes 109 and 3 by the same processing method, the cylindrical holes 109 and 3 are processed by the same apparatus, and the manufacturing cost can be reduced.
The vacuum valves 1 and 11 are formed by processing the body 2 from a tube-shaped material. For example, a cutting tool is inserted from the cylindrical hole 109 to cut the inner wall of the body 2 or from the cylindrical hole 109. Increasing the gap between the valve body 5 and the body 2 by inserting a pressurizing tool and pressurizing the inner wall of the body 2 to deform the side surface of the body 2 is substantially difficult and costly. . On the other hand, like the vacuum valves 1 and 11, the cylindrical hole portion 3 is provided in the body 2 by the same ball removing method as the cylindrical hole portion 109, and the closing member 4 or the output port forming member is provided in the cylindrical hole portion 3. If 12 is welded, the clearance gap between the valve body 5 and the body 2 can be enlarged easily and cheaply.

In the vacuum valves 1 and 11, since the second cylindrical holes 109 and 3 are provided by the same beading method, the same manufacturing apparatus can be used, the number of welding points can be reduced, and the number of processing and the manufacturing cost can be reduced. it can.
In the vacuum valve 1 (11), the cylindrical holes 109 and 3 have the same shape, and the output port forming member 104 and the closing member 4 (output port forming member 12) are connected to both the cylindrical holes 109 and 3. Easy to assemble because it can be welded.

In addition, this invention is not limited to the said embodiment, Various application is possible.
For example, in the above-described embodiment, the cylindrical holes 109 and 3 are formed by a ball removal method. On the other hand, a hole may be formed in the side surface of the body 2 by cutting, fusing, punching, or the like, and members constituting the cylindrical hole portions 109 and 3 may be welded to the holes.
For example, in the above-described embodiment, the cylindrical hole portions 109 and 3 are provided at two locations on the body 2, but three or more cylindrical hole portions may be provided.
For example, in the above embodiment, the closing member 4 has a cylindrical shape with one end closed. However, the closing member 4 may be plate-shaped and welded to the end face of the cylindrical hole portion 3.
For example, in the above embodiment, the vacuum valve 1 controls the degree of vacuum in the vacuum container by controlling the exhaust flow rate of the fluid flowing from the vacuum container to the vacuum pump. On the other hand, the vacuum valve 1 may control the supply flow rate of the fluid supplied to the vacuum vessel and control the degree of vacuum in the vacuum vessel. Moreover, the vacuum valve 1 may control the fluid supplied and exhausted to a vacuum vessel, and may control the vacuum degree in a vacuum vessel.

1,11 Vacuum valve 2 Body 3,109 Cylindrical hole (an example of first and second cylindrical holes)
4 Closing member 5 Valve body 103 Input port forming member 12, 104 Output port forming member (an example of port forming member)
105 Valve seat

Claims (5)

In a vacuum valve disposed on a pipe connected to the vacuum vessel and controlling the degree of vacuum in the vacuum vessel by opening and closing the valve,
The body that contains the valve body is cylindrical,
The first cylindrical hole and the second cylindrical hole are provided on the side surface of the body by the same processing method,
A port forming member is connected to the first cylindrical hole,
A vacuum valve characterized in that a closing member for closing an opening end surface of the second cylindrical hole is connected to the second cylindrical hole. In a vacuum valve disposed on a pipe connected to the vacuum vessel and controlling the degree of vacuum in the vacuum vessel by opening and closing the valve,
The body that contains the valve body is cylindrical,
The first cylindrical hole and the second cylindrical hole are provided on the side surface of the body by the same processing method,
A vacuum valve, wherein a port forming member is connected to the first and second cylindrical holes. In a vacuum valve disposed on a pipe connected to the vacuum vessel and controlling the degree of vacuum in the vacuum vessel by opening and closing the valve,
The body containing the valve body is cylindrical,
The first cylindrical hole and the second cylindrical hole are provided in the same shape on the side surface of the body,
A port forming member is connected to the first cylindrical hole,
A vacuum valve, wherein a closing member for closing an opening end surface of the second cylindrical hole is connected to the second cylindrical hole. In a vacuum valve disposed on a pipe connected to the vacuum vessel and controlling the degree of vacuum in the vacuum vessel by opening and closing the valve,
The body that contains the valve body is cylindrical,
The first cylindrical hole and the second cylindrical hole are provided in the same shape on the side surface of the body,
A vacuum valve, wherein a port forming member is connected to the first and second cylindrical holes. The vacuum valve according to any one of claims 1 to 4,
A vacuum valve characterized in that the first and second cylindrical hole portions are provided by a beading method.

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