JPH01176933U - - Google Patents

Info

Publication number

JPH01176933U

JPH01176933U JP7464588U JP7464588U JPH01176933U JP H01176933 U JPH01176933 U JP H01176933U JP 7464588 U JP7464588 U JP 7464588U JP 7464588 U JP7464588 U JP 7464588U JP H01176933 U JPH01176933 U JP H01176933U

Authority

JP

Japan

Prior art keywords

coating film

elastic material

cooling stand

wafer cooling

film made

Prior art date

1988-06-03

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000011248 coating agent Substances 0.000 claims description 6
• 238000000576 coating method Methods 0.000 claims description 6
• 239000002184 metal Substances 0.000 claims description 2
• 235000012431 wafers Nutrition 0.000 claims 3
• 238000001816 cooling Methods 0.000 claims 2
• 239000013013 elastic material Substances 0.000 claims 2
• 238000005530 etching Methods 0.000 claims 1
• 239000004065 semiconductor Substances 0.000 claims 1

Cited By (1)