JPH01175793A - Manufacture of superconductor thick film - Google Patents
Manufacture of superconductor thick filmInfo
- Publication number
- JPH01175793A JPH01175793A JP62336033A JP33603387A JPH01175793A JP H01175793 A JPH01175793 A JP H01175793A JP 62336033 A JP62336033 A JP 62336033A JP 33603387 A JP33603387 A JP 33603387A JP H01175793 A JPH01175793 A JP H01175793A
- Authority
- JP
- Japan
- Prior art keywords
- paste
- superconductor
- substrate
- thick film
- temperature
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000002887 superconductor Substances 0.000 title claims abstract description 23
- 238000004519 manufacturing process Methods 0.000 title claims description 6
- 239000000758 substrate Substances 0.000 claims abstract description 16
- 238000007650 screen-printing Methods 0.000 claims abstract description 5
- 229910002077 partially stabilized zirconia Inorganic materials 0.000 claims abstract description 3
- 239000005751 Copper oxide Substances 0.000 claims abstract 3
- 229910000431 copper oxide Inorganic materials 0.000 claims abstract 3
- 238000010304 firing Methods 0.000 claims description 8
- 229910052775 Thulium Inorganic materials 0.000 claims description 4
- 239000000203 mixture Substances 0.000 claims description 4
- 230000001590 oxidative effect Effects 0.000 claims description 4
- 229910052692 Dysprosium Inorganic materials 0.000 claims description 3
- 229910052691 Erbium Inorganic materials 0.000 claims description 3
- 229910052693 Europium Inorganic materials 0.000 claims description 3
- 229910052688 Gadolinium Inorganic materials 0.000 claims description 3
- 229910052779 Neodymium Inorganic materials 0.000 claims description 3
- 229910052772 Samarium Inorganic materials 0.000 claims description 3
- 229910052769 Ytterbium Inorganic materials 0.000 claims description 3
- KBQHZAAAGSGFKK-UHFFFAOYSA-N dysprosium atom Chemical compound [Dy] KBQHZAAAGSGFKK-UHFFFAOYSA-N 0.000 claims description 3
- UYAHIZSMUZPPFV-UHFFFAOYSA-N erbium Chemical compound [Er] UYAHIZSMUZPPFV-UHFFFAOYSA-N 0.000 claims description 3
- OGPBJKLSAFTDLK-UHFFFAOYSA-N europium atom Chemical compound [Eu] OGPBJKLSAFTDLK-UHFFFAOYSA-N 0.000 claims description 3
- UIWYJDYFSGRHKR-UHFFFAOYSA-N gadolinium atom Chemical compound [Gd] UIWYJDYFSGRHKR-UHFFFAOYSA-N 0.000 claims description 3
- 229910052746 lanthanum Inorganic materials 0.000 claims description 3
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 claims description 3
- QEFYFXOXNSNQGX-UHFFFAOYSA-N neodymium atom Chemical compound [Nd] QEFYFXOXNSNQGX-UHFFFAOYSA-N 0.000 claims description 3
- 229910052761 rare earth metal Inorganic materials 0.000 claims description 3
- KZUNJOHGWZRPMI-UHFFFAOYSA-N samarium atom Chemical compound [Sm] KZUNJOHGWZRPMI-UHFFFAOYSA-N 0.000 claims description 3
- NAWDYIZEMPQZHO-UHFFFAOYSA-N ytterbium Chemical compound [Yb] NAWDYIZEMPQZHO-UHFFFAOYSA-N 0.000 claims description 3
- 229910052689 Holmium Inorganic materials 0.000 claims description 2
- 229910052765 Lutetium Inorganic materials 0.000 claims description 2
- KJZYNXUDTRRSPN-UHFFFAOYSA-N holmium atom Chemical compound [Ho] KJZYNXUDTRRSPN-UHFFFAOYSA-N 0.000 claims description 2
- 238000004898 kneading Methods 0.000 claims description 2
- OHSVLFRHMCKCQY-UHFFFAOYSA-N lutetium atom Chemical compound [Lu] OHSVLFRHMCKCQY-UHFFFAOYSA-N 0.000 claims description 2
- 229910052727 yttrium Inorganic materials 0.000 claims description 2
- VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 claims description 2
- AYJRCSIUFZENHW-UHFFFAOYSA-L barium carbonate Chemical compound [Ba+2].[O-]C([O-])=O AYJRCSIUFZENHW-UHFFFAOYSA-L 0.000 abstract description 6
- QPLDLSVMHZLSFG-UHFFFAOYSA-N Copper oxide Chemical compound [Cu]=O QPLDLSVMHZLSFG-UHFFFAOYSA-N 0.000 abstract description 5
- 239000011230 binding agent Substances 0.000 abstract description 4
- 238000005245 sintering Methods 0.000 abstract description 4
- 239000003960 organic solvent Substances 0.000 abstract description 3
- 230000007935 neutral effect Effects 0.000 abstract description 2
- 239000000843 powder Substances 0.000 abstract description 2
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 abstract 4
- 230000002378 acidificating effect Effects 0.000 abstract 4
- 238000002156 mixing Methods 0.000 abstract 2
- RUDFQVOCFDJEEF-UHFFFAOYSA-N yttrium(III) oxide Inorganic materials [O-2].[O-2].[O-2].[Y+3].[Y+3] RUDFQVOCFDJEEF-UHFFFAOYSA-N 0.000 abstract 2
- 238000001354 calcination Methods 0.000 abstract 1
- 230000009466 transformation Effects 0.000 abstract 1
- 239000010408 film Substances 0.000 description 13
- 239000000463 material Substances 0.000 description 7
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 239000007788 liquid Substances 0.000 description 3
- 238000007639 printing Methods 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- 230000007704 transition Effects 0.000 description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 229910021523 barium zirconate Inorganic materials 0.000 description 2
- 238000009835 boiling Methods 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- SIWVEOZUMHYXCS-UHFFFAOYSA-N oxo(oxoyttriooxy)yttrium Chemical compound O=[Y]O[Y]=O SIWVEOZUMHYXCS-UHFFFAOYSA-N 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 229910001233 yttria-stabilized zirconia Inorganic materials 0.000 description 2
- 229920000742 Cotton Polymers 0.000 description 1
- 239000001856 Ethyl cellulose Substances 0.000 description 1
- ZZSNKZQZMQGXPY-UHFFFAOYSA-N Ethyl cellulose Chemical compound CCOCC1OC(OC)C(OCC)C(OCC)C1OC1C(O)C(O)C(OC)C(CO)O1 ZZSNKZQZMQGXPY-UHFFFAOYSA-N 0.000 description 1
- 229910000750 Niobium-germanium Inorganic materials 0.000 description 1
- BTGZYWWSOPEHMM-UHFFFAOYSA-N [O].[Cu].[Y].[Ba] Chemical compound [O].[Cu].[Y].[Ba] BTGZYWWSOPEHMM-UHFFFAOYSA-N 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- WUOACPNHFRMFPN-UHFFFAOYSA-N alpha-terpineol Chemical compound CC1=CCC(C(C)(C)O)CC1 WUOACPNHFRMFPN-UHFFFAOYSA-N 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 229910001422 barium ion Inorganic materials 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 229960004643 cupric oxide Drugs 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- SQIFACVGCPWBQZ-UHFFFAOYSA-N delta-terpineol Natural products CC(C)(O)C1CCC(=C)CC1 SQIFACVGCPWBQZ-UHFFFAOYSA-N 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 235000019325 ethyl cellulose Nutrition 0.000 description 1
- 229920001249 ethyl cellulose Polymers 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- -1 holosium Chemical compound 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 229910000765 intermetallic Inorganic materials 0.000 description 1
- 229910052745 lead Inorganic materials 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- 238000000634 powder X-ray diffraction Methods 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
- 229940116411 terpineol Drugs 0.000 description 1
- 229910021521 yttrium barium copper oxide Inorganic materials 0.000 description 1
Landscapes
- Manufacturing Of Printed Wiring (AREA)
- Superconductors And Manufacturing Methods Therefor (AREA)
- Parts Printed On Printed Circuit Boards (AREA)
- Inorganic Compounds Of Heavy Metals (AREA)
- Superconductor Devices And Manufacturing Methods Thereof (AREA)
Abstract
Description
【発明の詳細な説明】
(産業上の利用分野)
本発明は、超伝導体酸化物を利用するセラミック厚膜印
刷体の製造方法に関するものである。DETAILED DESCRIPTION OF THE INVENTION (Industrial Field of Application) The present invention relates to a method of manufacturing a ceramic thick film printed body using a superconducting oxide.
(従来の技術)
従来より超伝導材料としてPb、 Nb、 Nb3Ge
等の単体金属、合金、金属間化合物が知られていた。こ
れらの材料は主に薄膜化、綿材化を行い加工することに
よってその超伝導性を応用したデバイスが作成されてき
た。これらの材料の超伝導転移温度はすべて23.2に
以下であったため液体ヘリウムによる冷却が必要であっ
た。このため、超伝導体を応用したデバイスは限られた
ものしか適用されていなかった。近年、La−Ba−C
u−0系のうち(La1−xBax)2CuO4で0.
075≦X≦0.1の組成のものがTcが30Kに、Y
−Ba−Cu−0系のうちYBa2Cu30yの組成の
もののTcが90に前後をもつと相次いで報告されてい
る。さらにこのYBa2Cu30yのYの位置を他の希
土類元素のうちランタン、ネオジミウム、サマリウム、
ユーロピウム、ガドリニウム、ジスプロシウム、ホロミ
ウム、エルビウム、ツリウム、イッテルビラム、ツリウ
ムに置き換えても、またこれらの元素が2種類以上混合
されていても、はぼ同じ90に程度のTcをもつことも
報告されている。Y−Ba−Cu−0系を始めとするこ
れらの超伝導体のTcは液体窒素の沸点(77K)より
も高くなったことにより、実用材料としての期待が大き
くなってきている。(Conventional technology) Conventionally, Pb, Nb, Nb3Ge have been used as superconducting materials.
Elemental metals, alloys, and intermetallic compounds were known. Devices that take advantage of their superconductivity have been created by processing these materials, mainly by forming them into thin films or cotton materials. Since the superconducting transition temperatures of these materials were all below 23.2, cooling with liquid helium was necessary. For this reason, only a limited number of devices have been applied using superconductors. In recent years, La-Ba-C
Among u-0 series, (La1-xBax)2CuO4 has 0.
The composition with 075≦X≦0.1 has Tc of 30K and Y
Among the -Ba-Cu-0 systems, it has been reported one after another that the composition of YBa2Cu30y has a Tc of around 90. Furthermore, the position of Y in YBa2Cu30y is changed to lanthanum, neodymium, samarium, among other rare earth elements.
It has also been reported that even if it is replaced with europium, gadolinium, dysprosium, holmium, erbium, thulium, ytterbium, or thulium, or even if two or more of these elements are mixed, the Tc remains approximately the same at about 90. . Since the Tc of these superconductors including the Y-Ba-Cu-0 system has become higher than the boiling point (77K) of liquid nitrogen, there are increasing expectations for their use as practical materials.
この液体窒素の沸点以上で超伝導を示す酸化物の発見に
よって冷却装置が小型で簡便なもので済むようになるた
め、従来は用いられなかった低価格の超伝導を利用した
デバイスが作成される可能性がでてきた。そのため大型
で高価な設備が必要とされる薄膜や線材よりも安価な設
備で作成可能な印刷技術を利用した厚膜が安価な超伝導
デバイスへ応用されることが期待される。The discovery of this oxide that exhibits superconductivity above the boiling point of liquid nitrogen will allow the cooling device to be small and simple, allowing the creation of low-cost devices using superconductivity that have not been used in the past. The possibility has emerged. Therefore, it is expected that thick films using printing technology, which can be produced with cheaper equipment than thin films and wires that require large and expensive equipment, will be applied to inexpensive superconducting devices.
しかしながら、この酸化物を厚膜印刷で配線パターンや
5QUID等のデバイスを作成する試みはほとんど報告
されていない。現在、スクリーン印刷法によって超伝導
体厚膜を作成した例が数件報告されているが、用いる基
板と超伝導体酸化物との間に反応が起こってしまうため
安定した超伝導体厚膜は得られるに至っていない。However, there have been few reports of attempts to create wiring patterns or devices such as 5QUIDs by thick film printing of this oxide. Currently, several cases have been reported in which thick superconductor films have been created using the screen printing method, but since a reaction occurs between the substrate used and the superconductor oxide, stable superconductor thick films cannot be achieved. It has not yet been achieved.
(発明が解決しようとする問題点)
本発明はスクリーン印刷法により形成された超伝導体厚
膜を焼結するために熱処理を行うと、焼結と同時に基板
と反応が起こり、超伝導体の超伝導転移温度が低下する
問題を解決する超伝導厚膜の製造方法を提供することに
ある。(Problems to be Solved by the Invention) The present invention provides that when heat treatment is performed to sinter a superconductor thick film formed by a screen printing method, a reaction occurs with the substrate at the same time as sintering, and the superconductor thick film is heated. An object of the present invention is to provide a method for manufacturing a superconducting thick film that solves the problem of lowering the superconducting transition temperature.
(問題点を解決するための手段)
本発明は希土類−バリウム−銅系の酸化物を有機ビヒク
ルとともに混練することによりペーストを作成し、これ
を部分安定化ジルコニア基板上にスクリーン印刷法によ
り超伝導体厚膜を形成し、酸化性雰囲気中で950℃か
ら1000℃の温度にて焼成時間が10分以下であるこ
とを特徴とする超伝導体厚膜の製造方法である。(Means for Solving the Problems) The present invention involves creating a paste by kneading rare earth-barium-copper-based oxides with an organic vehicle, and printing the paste onto a partially stabilized zirconia substrate using a screen printing method to make it superconducting. The present invention is a method for producing a superconductor thick film, characterized in that the superconductor thick film is formed and the firing time is 10 minutes or less at a temperature of 950° C. to 1000° C. in an oxidizing atmosphere.
以下、本発明を実施例によりさらに詳細に説明する。Hereinafter, the present invention will be explained in more detail with reference to Examples.
(実施例)
本発明において、超伝導体ペーストは以下により作成し
た。出発原料として純度99.9%以上の酸化イツトリ
ウム(Y2O2)、炭酸バリウム(BaCOa)、酸化
第二銅(Cub)を使用し、配合比がモル比で1:2:
3となるように秤量した。これらをボールミルを用いて
湿式混合した後、空気中880℃から920℃の温度で
仮焼し、再びホールミルにて再粉砕を行った粉を有機バ
インダーとともに有機溶媒で混練しペースト化した。ペ
ーストの作成においてはバインダーとしてエチルセルロ
ース系のバインダーと有機溶媒としてテルピネオールを
それぞれ適量加え、混練しペースト化した。得られたペ
ーストをスクリーンを用いてイツトリア安定化ジルコニ
ア基板上に印刷を行った。次に基板上の印刷体を酸化性
もしくは中性雰囲気で脱バインダーを行い、さらに酸化
性雰囲気で9506C,980°G、 1000℃にて
焼成した。焼成する温度から室温までの降温速度を1時
間当り100℃以下となるようにコントロールした。こ
れは、イツトリウム−バリウム−銅系の酸化物が超伝導
を示すためには、酸素欠陥を少なくしてやる必要がある
ため、降温を遅くし導体の酸化物に酸素を入れるためで
ある。ここで焼成時間をθ分、5分。(Example) In the present invention, a superconductor paste was created as follows. Yttrium oxide (Y2O2), barium carbonate (BaCOa), and cupric oxide (Cub) with a purity of 99.9% or more are used as starting materials, and the molar ratio is 1:2:
It was weighed so that it was 3. These were wet mixed using a ball mill, then calcined in air at a temperature of 880°C to 920°C, and re-pulverized using a hole mill.The powder was kneaded with an organic binder and an organic solvent to form a paste. In preparing the paste, appropriate amounts of an ethylcellulose-based binder and terpineol as an organic solvent were added and kneaded to form a paste. The resulting paste was printed onto an yttria-stabilized zirconia substrate using a screen. Next, the printed material on the substrate was debindered in an oxidizing or neutral atmosphere, and further fired at 9506C, 980°G, and 1000°C in an oxidizing atmosphere. The temperature reduction rate from the firing temperature to room temperature was controlled to be 100° C. or less per hour. This is because in order for the yttrium-barium-copper oxide to exhibit superconductivity, it is necessary to reduce oxygen defects, so the temperature drop is slowed down and oxygen is introduced into the conductor oxide. Here, the baking time is θ minutes, 5 minutes.
10分、15分、30分、60分として焼成を行った。Firing was performed for 10 minutes, 15 minutes, 30 minutes, and 60 minutes.
このようにして作成した超伝導体厚膜の電気的特性を測
定した結果、実施例の範囲ではおよそ90にで超伝導状
態に転移し、電気抵抗が0となるものがあった。本実施
例において作成した超伝導体厚膜の超伝導転移温度(0
抵抗開始温度)の結果を第1表にまとめる。As a result of measuring the electrical characteristics of the superconductor thick films produced in this manner, it was found that in the range of Examples, some of them transitioned to a superconducting state at about 90 ℃ and the electrical resistance became 0. The superconducting transition temperature (0
The results are summarized in Table 1.
焼成温度980℃にて30分以上の焼成、1000℃に
て15分以上の焼成では印刷体は緑色に変質してしまい
絶縁体となってしまった。これを粉末X線回折法を用い
て同定した結果、Y2BaCuO5に変質していること
が分かった。さらにこれら印刷体と基板の断面の形態を
走査型電子顕微鏡(SEM)を用いて観察し、印刷体と
基板の界面の元素分布をエネルギー分散型X線分析装置
(EDX)を用いて分析したところ、基板内部の界面に
BaZrO3が生成していることが判明した。これらの
分析結果から酸化物超伝導体組成物であるYBa2Cu
3O7は焼結が起こる温度でイツトリア安定化ジルコニ
アとたやすく反応し、BaZrO3が生成し、印刷体中
のBaイオンが不足するために印刷体がY2BaCuO
5に変質したと考えられる。これらのことから、印刷体
と基板の反応を制御しながら、超伝導体厚膜の焼結を行
うには焼成時間を短くすることによって達成することが
判明した。When firing at a firing temperature of 980° C. for 30 minutes or more, or at 1000° C. for 15 minutes or more, the printed material turned green and became an insulator. As a result of identifying this using powder X-ray diffraction, it was found that it had changed into Y2BaCuO5. Furthermore, the cross-sectional morphology of these printed bodies and substrates was observed using a scanning electron microscope (SEM), and the elemental distribution at the interface between the printed bodies and the substrate was analyzed using an energy dispersive X-ray analyzer (EDX). It was found that BaZrO3 was generated at the interface inside the substrate. From these analysis results, the oxide superconductor composition YBa2Cu
3O7 readily reacts with Yttria-stabilized zirconia at the temperature at which sintering occurs, producing BaZrO3, and the lack of Ba ions in the print makes the print Y2BaCuO.
It is thought that it has changed into 5. From these results, it has been found that sintering a superconductor thick film can be achieved by shortening the firing time while controlling the reaction between the printed body and the substrate.
なお希土類元素がイツトリウムでなくランタン、ネオジ
ミウム、サマリウム、ユーロピウム、ガドリニウム、ジ
スプロシウム、ホロシウム、エルビウム、ツリウム、イ
ッテルビウム、ルテチウムなどである酸化物超伝導の一
種以上でも同様の効果を確認した。Similar effects were also confirmed with one or more types of oxide superconductors in which the rare earth element is not yttrium but lanthanum, neodymium, samarium, europium, gadolinium, dysprosium, holosium, erbium, thulium, ytterbium, lutetium, etc.
(発明の効果)
実施例からも明らかなように、本発明の超伝導体厚膜は
90に付近で電気抵抗が0となる。本発明によれば従来
用いられていた超伝導体薄膜に比べて安価にデバイスを
作成することができ、ジョセフソン素子や超伝導トラン
ジスタや超伝導配線のLSI等を実装することができる
配線基板や5QUIDに応用が期待されるものである。(Effects of the Invention) As is clear from the examples, the superconductor thick film of the present invention has an electrical resistance of 0 near 90°C. According to the present invention, devices can be produced at a lower cost than conventionally used superconductor thin films, and wiring substrates and wiring boards on which Josephson elements, superconducting transistors, LSIs with superconducting wiring, etc. can be mounted, etc. This is expected to be applied to 5QUID.
第1表Table 1
Claims (2)
体を有機ビヒクルとともに混練したペーストを、スクリ
ーン印刷により所望の形状に部分安定化ジルコニア基板
上に形成し、酸化性雰囲気中950℃以上1000℃以
下の温度で、焼成時間が10分以下の条件で焼成するこ
とを特徴とする超伝導体厚膜の製造方法。(1) A paste made by kneading a superconductor consisting of a rare earth-barium-copper oxide with an organic vehicle is formed into the desired shape on a partially stabilized zirconia substrate by screen printing, and the paste is formed at 950°C or higher in an oxidizing atmosphere. A method for producing a superconductor thick film, comprising firing at a temperature of 1000° C. or lower and for a firing time of 10 minutes or less.
ウム、サマリウム、ユーロピウム、ガドリニウム、ジス
プロシウム、ホロミウム、エルビウム、ツリウム、イッ
テルビウム、ルテチウムの1種類か、これらの2種以上
の混合物であることを特徴とする特許請求の範囲第1項
記載の超伝導体厚膜の製造方法。(2) A patent claim characterized in that the rare earth element is one of yttrium, lanthanum, neodymium, samarium, europium, gadolinium, dysprosium, holmium, erbium, thulium, ytterbium, and lutetium, or a mixture of two or more of these elements. A method for producing a superconductor thick film according to item 1.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62336033A JPH01175793A (en) | 1987-12-29 | 1987-12-29 | Manufacture of superconductor thick film |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62336033A JPH01175793A (en) | 1987-12-29 | 1987-12-29 | Manufacture of superconductor thick film |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH01175793A true JPH01175793A (en) | 1989-07-12 |
JPH053158B2 JPH053158B2 (en) | 1993-01-14 |
Family
ID=18295010
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62336033A Granted JPH01175793A (en) | 1987-12-29 | 1987-12-29 | Manufacture of superconductor thick film |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH01175793A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0269990A (en) * | 1988-09-05 | 1990-03-08 | Mitsubishi Mining & Cement Co Ltd | Manufacture of ceramic superconductor wiring board |
-
1987
- 1987-12-29 JP JP62336033A patent/JPH01175793A/en active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0269990A (en) * | 1988-09-05 | 1990-03-08 | Mitsubishi Mining & Cement Co Ltd | Manufacture of ceramic superconductor wiring board |
Also Published As
Publication number | Publication date |
---|---|
JPH053158B2 (en) | 1993-01-14 |
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