JPH084191B2 - Method for forming superconducting wiring - Google Patents
Method for forming superconducting wiringInfo
- Publication number
- JPH084191B2 JPH084191B2 JP62254966A JP25496687A JPH084191B2 JP H084191 B2 JPH084191 B2 JP H084191B2 JP 62254966 A JP62254966 A JP 62254966A JP 25496687 A JP25496687 A JP 25496687A JP H084191 B2 JPH084191 B2 JP H084191B2
- Authority
- JP
- Japan
- Prior art keywords
- forming
- superconducting
- superconducting wiring
- wiring according
- powder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000000034 method Methods 0.000 title claims description 32
- 239000000843 powder Substances 0.000 claims description 34
- 239000002994 raw material Substances 0.000 claims description 18
- 238000010304 firing Methods 0.000 claims description 16
- 230000000737 periodic effect Effects 0.000 claims description 14
- 239000000758 substrate Substances 0.000 claims description 13
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 11
- 239000001301 oxygen Substances 0.000 claims description 11
- 229910052760 oxygen Inorganic materials 0.000 claims description 11
- 150000001875 compounds Chemical class 0.000 claims description 9
- 238000010438 heat treatment Methods 0.000 claims description 9
- 239000000203 mixture Substances 0.000 claims description 8
- 238000004519 manufacturing process Methods 0.000 claims description 7
- 239000002245 particle Substances 0.000 claims description 7
- 238000001354 calcination Methods 0.000 claims description 5
- 239000002131 composite material Substances 0.000 claims description 5
- 239000011347 resin Substances 0.000 claims description 5
- 229920005989 resin Polymers 0.000 claims description 5
- 229910002367 SrTiO Inorganic materials 0.000 claims description 4
- 238000001816 cooling Methods 0.000 claims description 4
- 229910052594 sapphire Inorganic materials 0.000 claims description 3
- 239000010980 sapphire Substances 0.000 claims description 3
- 238000007650 screen-printing Methods 0.000 claims description 3
- 239000002904 solvent Substances 0.000 claims description 3
- VXQBJTKSVGFQOL-UHFFFAOYSA-N 2-(2-butoxyethoxy)ethyl acetate Chemical compound CCCCOCCOCCOC(C)=O VXQBJTKSVGFQOL-UHFFFAOYSA-N 0.000 claims description 2
- 239000004925 Acrylic resin Substances 0.000 claims description 2
- 229920000178 Acrylic resin Polymers 0.000 claims description 2
- 239000001856 Ethyl cellulose Substances 0.000 claims description 2
- ZZSNKZQZMQGXPY-UHFFFAOYSA-N Ethyl cellulose Chemical compound CCOCC1OC(OC)C(OCC)C(OCC)C1OC1C(O)C(O)C(OC)C(CO)O1 ZZSNKZQZMQGXPY-UHFFFAOYSA-N 0.000 claims description 2
- 229910002651 NO3 Inorganic materials 0.000 claims description 2
- NHNBFGGVMKEFGY-UHFFFAOYSA-N Nitrate Chemical compound [O-][N+]([O-])=O NHNBFGGVMKEFGY-UHFFFAOYSA-N 0.000 claims description 2
- QAOWNCQODCNURD-UHFFFAOYSA-L Sulfate Chemical compound [O-]S([O-])(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-L 0.000 claims description 2
- 230000015572 biosynthetic process Effects 0.000 claims description 2
- 150000004649 carbonic acid derivatives Chemical class 0.000 claims description 2
- 238000001035 drying Methods 0.000 claims description 2
- 229920001249 ethyl cellulose Polymers 0.000 claims description 2
- 235000019325 ethyl cellulose Nutrition 0.000 claims description 2
- 238000010298 pulverizing process Methods 0.000 claims description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 claims 1
- BVKZGUZCCUSVTD-UHFFFAOYSA-L Carbonate Chemical compound [O-]C([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-L 0.000 claims 1
- 150000002823 nitrates Chemical class 0.000 claims 1
- 150000003467 sulfuric acid derivatives Chemical class 0.000 claims 1
- 239000000463 material Substances 0.000 description 24
- 239000013078 crystal Substances 0.000 description 15
- 239000002887 superconductor Substances 0.000 description 7
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 6
- 230000000694 effects Effects 0.000 description 5
- 239000007788 liquid Substances 0.000 description 5
- 238000006243 chemical reaction Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 239000012071 phase Substances 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 3
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 3
- 230000007547 defect Effects 0.000 description 3
- 238000002844 melting Methods 0.000 description 3
- 230000008018 melting Effects 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- 239000000523 sample Substances 0.000 description 3
- LTPBRCUWZOMYOC-UHFFFAOYSA-N Beryllium oxide Chemical compound O=[Be] LTPBRCUWZOMYOC-UHFFFAOYSA-N 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 239000002826 coolant Substances 0.000 description 2
- 239000001307 helium Substances 0.000 description 2
- 229910052734 helium Inorganic materials 0.000 description 2
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 239000006104 solid solution Substances 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- OAYXUHPQHDHDDZ-UHFFFAOYSA-N 2-(2-butoxyethoxy)ethanol Chemical compound CCCCOCCOCCO OAYXUHPQHDHDDZ-UHFFFAOYSA-N 0.000 description 1
- 241000920340 Pion Species 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229920005822 acrylic binder Polymers 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- WUOACPNHFRMFPN-UHFFFAOYSA-N alpha-terpineol Chemical compound CC1=CCC(C(C)(C)O)CC1 WUOACPNHFRMFPN-UHFFFAOYSA-N 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 1
- 238000007872 degassing Methods 0.000 description 1
- SQIFACVGCPWBQZ-UHFFFAOYSA-N delta-terpineol Natural products CC(C)(O)C1CCC(=C)CC1 SQIFACVGCPWBQZ-UHFFFAOYSA-N 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 238000000265 homogenisation Methods 0.000 description 1
- 238000005339 levitation Methods 0.000 description 1
- 239000007791 liquid phase Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 125000004430 oxygen atom Chemical group O* 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- XNGIFLGASWRNHJ-UHFFFAOYSA-L phthalate(2-) Chemical compound [O-]C(=O)C1=CC=CC=C1C([O-])=O XNGIFLGASWRNHJ-UHFFFAOYSA-L 0.000 description 1
- 229920002037 poly(vinyl butyral) polymer Polymers 0.000 description 1
- 238000010248 power generation Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000003303 reheating Methods 0.000 description 1
- 230000008054 signal transmission Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 239000002002 slurry Substances 0.000 description 1
- 238000003746 solid phase reaction Methods 0.000 description 1
- 238000010671 solid-state reaction Methods 0.000 description 1
- 238000010561 standard procedure Methods 0.000 description 1
- 229940116411 terpineol Drugs 0.000 description 1
- 238000002560 therapeutic procedure Methods 0.000 description 1
Landscapes
- Superconductor Devices And Manufacturing Methods Thereof (AREA)
- Manufacturing Of Printed Wiring (AREA)
- Parts Printed On Printed Circuit Boards (AREA)
Description
【発明の詳細な説明】 産業上の利用分野 本発明は超伝導性配線の形成方法に関する。より詳細
には、高い超伝導臨界温度並びにこの臨界温度との差が
小さい相転移の終了温度を具備する新規な超伝導材料に
よって形成された配線の作製方法に関する。Description: FIELD OF THE INVENTION The present invention relates to a method for forming superconducting wiring. More specifically, the present invention relates to a method for producing a wiring formed of a novel superconducting material having a high superconducting critical temperature and a phase transition end temperature having a small difference from the critical temperature.
尚、以下の記述においては、超電導臨界温度をTc、超
電導体の電気抵抗が全く零となる相転移の終了温度をTc
i、TcとTciとの差をΔＴとして表す。In the following description, the superconducting critical temperature is Tc, and the end temperature of the phase transition at which the electric resistance of the superconductor becomes zero is Tc.
The difference between i, Tc and Tci is represented as ΔT.
従来の技術 超電導現象で物質は完全な反磁性をを示し、内部で有
限な定常電流が流れているにも関わらず電位差を現れな
くなる。そこで、超電導体は電力損失の全くない伝送媒
体とする各種の応用が提案されている。2. Description of the Related Art Due to superconductivity, a substance shows perfect diamagnetism and no potential difference appears even though a finite steady current flows inside. Therefore, various applications have been proposed in which a superconductor is used as a transmission medium having no power loss.
即ち、電力分野におけるMHD発電、電力送電、電力貯
蔵等、或いは、動力分野における磁気浮上列車、電磁気
推進船舶等の動力分野、更に、医療あるいは計測の分野
における磁場、マイクロ波、放射線等の超高感度センサ
としてNMR、π中間子治療、高エネルギー物質実験装置
など極めて多くの適用を挙げることができる。That is, MHD power generation, power transmission, power storage, etc. in the electric power field, power field such as magnetic levitation train, electromagnetic propulsion ship in the power field, and ultra high magnetic field, microwave, radiation, etc. in the medical or measurement field. As a sensitive sensor, an extremely large number of applications such as NMR, pion therapy, and a high-energy substance experimental device can be mentioned.
また、ジョセフソン素子に代表されるエレクトロニク
ス素子の分野でも、単なる消費電力の低減のみならず、
極めて高速な動作を実現し得る技術として期待されてい
る。Also, in the field of electronic devices represented by Josephson devices, not only mere reduction of power consumption,
It is expected as a technology that can realize extremely high-speed operation.
ところで、従来、超電導現象は極端な低温下において
のみ観測されていた。従来の超電導材料として最も高い
超電導臨界温度Tcを有すると言われていたNb3Geにおい
ても23.2K程度であった。By the way, conventionally, the superconducting phenomenon has been observed only under an extremely low temperature. Even in Nb 3 Ge, which was said to have the highest superconducting critical temperature Tc as a conventional superconducting material, it was about 23.2K.
そこで、従来は、超電導現象を実現するために、沸点
が4.2Kの液体ヘリウムを用いて超電導材料をTc以下まで
冷却していた。しかしながら、液体ヘリウムの使用は、
液化設備を含めた冷却設備による技術的負担並びにコス
ト的負担が極めて大きく、超電導技術の実用化への妨げ
となっていた。Therefore, conventionally, in order to realize the superconducting phenomenon, liquid helium having a boiling point of 4.2K was used to cool the superconducting material to Tc or lower. However, the use of liquid helium has
The technical burden and cost burden of the cooling equipment including the liquefaction equipment were extremely large, which hindered the practical application of the superconducting technology.
一方、近年に至ってII a族元素あるいはIII a族元素
の酸化物を含む焼成体が高いTcを有する超電導体となり
得ることが報告され、非低温超電導体による超電導体の
実用化が俄かに促進されている。On the other hand, it has been reported in recent years that a fired body containing an oxide of a group IIa element or a group IIIa element can be a superconductor having a high Tc, and the practical application of a superconductor by a non-low temperature superconductor is accelerated. Has been done.
既に報告されている例では、オルソロンビック構造等
のプロブスカイト型酸化物と類似した結晶構造を有する
と考えられる〔La,Ba〕2CuO4あるいは〔La,Sr〕2CuO4等
の複合酸化物がある。これらの物質では、30乃至50Kと
いう従来のTcに比べて飛躍的に高いTcが観測され、更
に、80K以上のTcが報告されている。In the previously reported examples, it is considered that the compound oxides such as [La, Ba] 2 CuO 4 or [La, Sr] 2 CuO 4 are considered to have a crystal structure similar to that of the perovskite type oxide such as the orthorhombic structure. There is. With these substances, a Tc of 30 to 50K, which is dramatically higher than that of the conventional Tc, was observed, and a Tc of 80K or more was reported.
このように、超電導材料のTcが向上すると、入手が容
易で廉価な液体窒素を冷却媒体として用いることがで
き、超電導現象を産業的に利用することが可能となる。As described above, when the Tc of the superconducting material is improved, liquid nitrogen that is easily available and inexpensive can be used as the cooling medium, and the superconducting phenomenon can be industrially used.
発明が解決しようとする問題点 ところが、上述のようなプロブスカイト型または擬似
プロブスカイト型酸化物はいわゆる焼成体として得られ
るので取扱が不便である。何故ならば、焼成体は一般に
脆く、僅かな機械的負荷に対しても容易に破損する。殊
に、超電導材料は、電力の伝送媒体としての利用が多い
ので細い線状の形状で用いる必要があり、上述のように
機械的負荷に対して脆弱な超電導材料は実用的に用いる
ことができない。従って、電気抵抗が例であるという極
めて有利な特徴を有しながら、超電導材料を電力あるい
は信号の伝送媒体として実用的に利用することができな
かった。The problem to be solved by the invention is that it is inconvenient to handle, because the above-mentioned perovskite type or pseudo-provskite type oxide is obtained as a so-called fired body. Because, the fired body is generally brittle and easily breaks even under a slight mechanical load. In particular, since the superconducting material is often used as a power transmission medium, it is necessary to use it in a thin linear shape, and as described above, the superconducting material vulnerable to mechanical load cannot be practically used. . Therefore, it has not been possible to practically use the superconducting material as a power or signal transmission medium, while having a very advantageous feature that electric resistance is an example.
そこで、本発明は、上記従来技術の問題点を解決し、
高いTc並びにTciを有する超電導材料の機械的安定な使
用を可能とすることを目的としている。Therefore, the present invention solves the above-mentioned problems of the conventional technology,
The purpose is to enable mechanically stable use of superconducting materials having high Tc and Tci.
問題点を解決するための手段 即ち、本発明に従い、周期律表II a族元素から選択さ
れた少なくとも１種の元素αまたは該元素αを含む化合
物と、周期律表III a族から選択された少なくとも１種
の元素βまたは該元素βを含む化合物と、周期律表I
b、II b、III b、IV a、VIII a族から選択された少なく
とも１種の元素γまたは該元素γを含む化合物と、の粉
末を原料粉末とし、該原料粉末をビヒクルと混合してペ
ースト状とし、スクリーン印刷法によりSrTiO3またはサ
ファイアの基板上に該ペーストによる所定のパターンを
描き、該ペーストからビヒクルを揮散・除去した後加熱
して焼成し、 一般式：αｗβｘγｙδｚ （但し、元素αは周期律表II a族から選択された１種の
元素であり、元素βは周期律表III a族から選択された
１種の元素であり、元素γは周期律表I b、II b、III
b、IV a、VIII a族から選択された少なくとも１種の元
素であり、元素δはＯ（酸素）であり、ｗ、ｘ、ｙ、ｚ
はそれぞれ１≦ｗ≦５、１≦ｘ≦５、１≦ｙ≦15、１≦
ｚ≦20を満たす数である） で表される組成の複合酸化物配線パターンを該基板上に
形成することを特徴とする超電導性配線の形成方法が提
供される。Means for Solving the Problems That is, according to the present invention, at least one element α selected from Group IIa elements of the periodic table or a compound containing the element α and a group selected from Group IIIa of the periodic table At least one element β or a compound containing the element β, and a periodic table I
A powder of at least one element γ selected from the groups b, II b, III b, IV a, and VIII a or a compound containing the element γ is used as a raw material powder, and the raw material powder is mixed with a vehicle to paste. And draw a predetermined pattern of the paste on the substrate of SrTiO 3 or sapphire by the screen printing method, volatilize and remove the vehicle from the paste, and then heat and bake, the general formula: α w β x γ y δ z (however, the element α is one element selected from Group IIa of the periodic table, the element β is one element selected from Group IIIa of the periodic table, and the element γ is I b, II b, III
b, IVa, VIIIa is at least one element selected from the group, element δ is O (oxygen), w, x, y, z
Are 1 ≦ w ≦ 5, 1 ≦ x ≦ 5, 1 ≦ y ≦ 15, 1 ≦, respectively.
There is provided a method for forming superconducting wiring, characterized in that a complex oxide wiring pattern having a composition represented by the formula: z ≦ 20 is formed on the substrate.
作用 本発明に従う超電導性配線の形成方法は、優れた超電
導特性を有する超電導材料の原料粉末をペースト状に形
成し、これを用いて基板上にパターンを形成した後に焼
成して超電導性配線とすることをその主要な特徴として
いる。Operation The method for forming a superconducting wiring according to the present invention is to form a raw material powder of a superconducting material having excellent superconducting properties in a paste form, form a pattern on a substrate using this, and then form a superconducting wiring. That is the main feature.
即ち、このようにして作製された超電導性配線は、基
板上に密着して形成されているので、一般的な取り扱い
においても破損することがない。また、一般的な配線の
他、小型のコイル、ヨーク等配線以外の小部品の作製に
も応用できる。That is, since the superconducting wiring thus manufactured is formed in close contact with the substrate, it will not be damaged even in general handling. In addition to general wiring, it can be applied to the production of small parts such as small coils and yokes other than wiring.
尚、このような超電導性配線を形成する超電導材料と
しては、 一般式：αｗβｘγｙδｚ （但し、元素αは周期律表II a族から選択された１種の
元素であり、元素βは周期律表III a族から選択された
１種の元素であり、元素γは周期律表I b、II b、III
b、IV a、VIII a族から選択された少なくとも１種の元
素であり、元素δはＯ（酸素）であり、ｗ、ｘ、ｙ、ｚ
はそれぞれ１≦ｗ≦５、１≦ｘ≦５、１≦ｙ≦15、１≦
ｚ≦20を満たす数である） で表される組成の複合酸化物が好ましい。この材料は液
体窒素温度以上の温度領域で有効な超電導特性を有して
いる。In addition, as a superconducting material for forming such superconducting wiring, a general formula: α w β x γ y δ z (where the element α is one kind of element selected from Group IIa of the periodic table, The element β is one kind of element selected from Group IIIa of the periodic table, and the element γ is Ib, IIb, III of the periodic table.
b, IVa, VIIIa is at least one element selected from the group, element δ is O (oxygen), w, x, y, z
Are 1 ≦ w ≦ 5, 1 ≦ x ≦ 5, 1 ≦ y ≦ 15, 1 ≦, respectively.
It is a number satisfying z ≦ 20). This material has superconducting properties effective in the temperature range above liquid nitrogen temperature.
このような複合酸化物配線を形成する原料としては、
上述の元素α、β並びにγを含有する化合物を粉末とし
て用いる。即ち具体的には上記元素の酸化物、炭酸塩、
硫酸塩または硝酸塩の粉末が入手も容易で廉価できる。As a raw material for forming such a composite oxide wiring,
A compound containing the above-mentioned elements α, β and γ is used as powder. That is, specifically, oxides, carbonates of the above elements,
Sulfate or nitrate powders are easily available and inexpensive.
また、本発明の好ましい態様に従えば、超電導配線を
形成する原料として、上記各元素の化合物粉末を焼成し
て予め複合酸化物を形成したものを粉末として用いる。
この場合は、予め複合酸化物の形成を有効な制御板で形
成することができるので、配線として形成された後の超
電導特性が安定する。Further, according to a preferred embodiment of the present invention, as a raw material for forming a superconducting wiring, a powder obtained by firing a compound powder of each element described above to form a composite oxide in advance is used.
In this case, since the complex oxide can be formed in advance with an effective control plate, the superconducting characteristics after being formed as wiring are stable.
即ち、まず、予備焼成付す原料粉末の粒径を15μｍ以
下、特に好ましくは５μｍ以下とする。これは、平均粒
径が５μｍを越えると、焼成後の粉砕工程を経た後も結
晶粒径の微細化が不十分となるからである。従って、完
成後の配線内の結晶粒径の微細化を図るためには、原料
粉末の粒径が上記範囲内であることが好ましい。That is, first, the particle diameter of the raw material powder to be pre-baked is set to 15 μm or less, particularly preferably 5 μm or less. This is because if the average grain size exceeds 5 μm, the fine grain size of the crystal grains becomes insufficient even after the crushing step after firing. Therefore, in order to reduce the crystal grain size in the wiring after completion, it is preferable that the grain size of the raw material powder is within the above range.
また、予備焼成後の粉砕工程は、後の本焼成後の結晶
粒径に直接的な影響があり、10μｍを越えると、本焼成
後の焼成体の結晶粒径が大きくなり結晶粒界面積が減少
する。前述のように、結晶粒界の減少は、高いTcの達成
に好ましくない。Further, the crushing step after the preliminary firing has a direct effect on the crystal grain size after the main firing, and when it exceeds 10 μm, the crystal grain size of the fired body after the main firing becomes large and the crystal grain boundary area becomes large. Decrease. As described above, the reduction of grain boundaries is not preferable for achieving a high Tc.
尚、予備焼成→粉砕の工程は、これを複数回繰り返す
ことによって原料粉末あるいは焼成体の均質化が一層促
進される。また、特に最後の粉砕工程後の焼成体粉末の
粒径は、特に製品の特性に密接な関係を有し、これを10
μｍ以下とすることが好ましい。Incidentally, the steps of pre-baking and crushing are repeated a plurality of times to further promote homogenization of the raw material powder or the fired body. In addition, the particle size of the fired body powder after the final crushing step has a close relationship with the characteristics of the product.
It is preferable that the thickness is less than μm.
また、本焼成温度は、極めて重要な制御因子であり、
固相反応で焼成が進行すること、並びに、焼成されたプ
ロブスカイト型または擬似プロブスカイト型酸化物の結
晶成長が過大とならないように制御する必要がある。一
方、有効な焼結反応が促進されなければならないことは
言うまでもなく、これらの観点を総合した結果、本焼成
温度は、原料粉末のうちで最も融点の低い原料の融点を
上限とし、この融点との温度差が100℃以内の温度範囲
で行うことが好ましい。特に、上限を融点としたのは、
原料粉末が溶解した場合に原料粉末が液相反応を起こ
し、このようなプロセスを得た超電導材料の特性が大き
く劣化するからである。Further, the main firing temperature is an extremely important control factor,
It is necessary to control the progress of the calcination in the solid-state reaction and the crystal growth of the calcined perovskite-type or pseudo-provskite-type oxide from becoming excessive. On the other hand, it goes without saying that an effective sintering reaction must be promoted, and as a result of combining these viewpoints, the main firing temperature is the melting point of the raw material having the lowest melting point among the raw material powders as an upper limit, and It is preferable that the temperature difference is within 100 ° C. Especially, the upper limit is the melting point,
This is because, when the raw material powder is dissolved, the raw material powder causes a liquid phase reaction, and the characteristics of the superconducting material obtained by such a process are greatly deteriorated.
更に、上述の本焼成の制御と同様の理由で、予備焼成
温度も、上記範囲に達しない場合は、固溶反応が十分に
進行せず、有効なプロブスカイト型または擬似プロブス
カイ型酸化物が得られない。一方、予備焼成温度が950
℃を越えると、本焼成の場合と同様に、焼成体に固溶相
が生じ、あるいは結晶粒の粗大化が生じ、以後の工程に
おける粉砕による微細化が困難になる。Further, for the same reason as in the control of the main calcination described above, when the pre-calcination temperature also does not reach the above range, the solid solution reaction does not proceed sufficiently, and an effective probskite-type or pseudo-probskite-type oxide is obtained. I can't. On the other hand, the pre-baking temperature is 950
When the temperature exceeds ℃, as in the case of the main calcination, a solid solution phase is generated in the fired body or the crystal grains are coarsened, and it becomes difficult to reduce the size by pulverization in the subsequent steps.
更に、本発明者等の知見によれば、プロブスカイト型
または擬似プロブスカイト型酸化物による超電導体は、
特に焼成体の表面近傍において優れた特性を発揮する。
これは、材料の表面付近では、焼成時または熱処理時に
雰囲気との反応が超電導特性に好ましく進行し、また、
表面に近い相は歪み効果を受けるので優れた超電導特性
が出現したものと考えられる。従って、本発明の方法に
おいては、配線を形成するペーストの粘度並びに基板に
対する塗膜の厚さを慎重に制御する必要がある。即ち、
塗布したペーストの厚さが10μｍ未満の場合は、厚さが
均一な連続した膜の形成が困難となる。また、厚さが50
μｍを越えた場合は、所謂ダレによるパターンの変形が
生じ易く、また形成された配線の基板近傍と配線表面と
の間で特性に差異が生じ易くなる。Further, according to the knowledge of the present inventors, a superconductor made of a perovskite type oxide or a pseudo perovskite type oxide is
Particularly, excellent properties are exhibited near the surface of the fired body.
This is because in the vicinity of the surface of the material, the reaction with the atmosphere during firing or heat treatment favorably progresses to the superconducting property, and
It is considered that excellent superconducting properties appeared because the phase close to the surface was subjected to the strain effect. Therefore, in the method of the present invention, it is necessary to carefully control the viscosity of the paste forming the wiring and the thickness of the coating film on the substrate. That is,
If the thickness of the applied paste is less than 10 μm, it becomes difficult to form a continuous film having a uniform thickness. Also, the thickness is 50
When the thickness exceeds μm, the pattern is likely to be deformed due to so-called sag, and the characteristics of the formed wiring are likely to be different between the vicinity of the substrate and the wiring surface.
また、複合酸化物焼結体による超電導材料は、特に結
晶粒界すなわち結晶粒間の境界面に超電導臨界温度の高
い物質が形成され易く、本発明の方法に従って形成され
た超電導配線は、その特徴的な作製方法によって、結晶
が微細組織化されており、極めて高い臨界温度を有する
超電導材料として形成される。Further, the superconducting material of the composite oxide sintered body is particularly apt to form a substance having a high superconducting critical temperature at the crystal grain boundary, that is, the boundary surface between the crystal grains, and the superconducting wiring formed according to the method of the present invention has the following characteristics. The crystal is finely structured by a typical manufacturing method and is formed as a superconducting material having an extremely high critical temperature.
尚、ビヒクルとしては、テルピオネールあるいは酢酸
ブチルカルビトール等を溶剤としたエチルセルロース樹
脂またはアクリル樹脂等を用いることができる。As the vehicle, ethyl cellulose resin or acrylic resin using terpionel, butyl carbitol acetate or the like as a solvent can be used.
また、基板材料としては、アルミナ、ベリリア、窒化
アルミニウム等の一般的な材料の他に、SrTiO3、サファ
イア等を特に有利な材料として挙げることができる。こ
れらの材料では、超電導複合酸化物と近似した結晶構造
を有する等、直上に形成された超電導性配線の特性を向
上する効果がある。Further, as the substrate material, in addition to general materials such as alumina, beryllia, and aluminum nitride, SrTiO 3 , sapphire, and the like can be cited as particularly advantageous materials. These materials have the effect of improving the characteristics of the superconducting wiring formed immediately above, such as having a crystal structure similar to that of the superconducting composite oxide.
更に、本発明の好ましい態様に従うと、得られた焼成
体をさらに熱処理して実質的に均一な擬似ペロブスカイ
ト型酸化物とする。この熱処理により電気抵抗が完全に
零となる超電導臨界温度が著しく上昇する。この熱処理
は、500〜800℃の範囲の温度で実施することが好まし
く、減圧下の酸素雰囲気で実施するのがさらに好まし
い。すなわち、この低酸素分圧下での熱処理によって焼
成体から酸素原子が剥奪され、酸素欠陥が発生する。こ
の欠陥により生ずるキャリアによって電子のクーパー対
ができる確率が高くなり、抵抗が完全に零となる超電導
臨界温度が著しく上昇するものと推定される。Further, according to a preferred embodiment of the present invention, the obtained fired body is further heat-treated to obtain a substantially uniform pseudo-perovskite type oxide. This heat treatment remarkably raises the superconducting critical temperature at which the electric resistance becomes completely zero. This heat treatment is preferably carried out at a temperature in the range of 500 to 800 ° C., more preferably under a reduced pressure in an oxygen atmosphere. That is, the heat treatment under the low oxygen partial pressure deprives the fired body of oxygen atoms, and oxygen defects are generated. It is presumed that the carriers generated by this defect increase the probability that an electron Cooper pair will be formed, and the superconducting critical temperature at which the resistance becomes completely zero will rise significantly.
尚、加熱温度が500℃未満の場合は、焼成体が目的と
するプロブスカイト型または擬似プロブスカイト型酸化
物とならず、所望の超電導臨界温度が得られないか、あ
るいは、長時間の熱処理が必要となる。一方、800℃を
超える処理温度では超電導効果を有するプロブスカイト
型の結晶構造が消滅して臨界温度は著しく低下する。When the heating temperature is less than 500 ° C., the fired body does not become the desired probskite-type or pseudo-probskite-type oxide, and the desired superconducting critical temperature cannot be obtained, or a long-time heat treatment is performed. Will be needed. On the other hand, at a processing temperature of more than 800 ° C, the perovskite-type crystal structure having a superconducting effect disappears and the critical temperature drops significantly.
これらの焼成後の熱処理により、ΔＴは更に３〜５℃
向上する。尚、熱処理は10-1torr以下の酸素減圧下で行
うことが好ましい。この理由は、これ以上の酸素分圧下
では酸素欠陥の形成に長時間を要するので工業的でない
こと、および500℃未満あるいは800℃を越える温度で
は、やはり酸素欠陥の形成が過小又は過大となり、十分
に高いTciが得難いためである。Due to the heat treatment after firing, ΔT is further 3 to 5 ° C.
improves. The heat treatment is preferably performed under reduced pressure of oxygen of 10 -1 torr or less. The reason for this is that under higher oxygen partial pressure, it takes a long time to form oxygen vacancies, which is not industrial, and at temperatures below 500 ° C. or above 800 ° C., too, the formation of oxygen vacancies becomes too small or too large. This is because it is difficult to obtain a high Tci.
更に本発明の好ましい態様に従うと、上記焼成後、ま
たは焼成後に500〜800℃の範囲に再加熱してから20℃／
分以下の冷却速度で徐冷することによって、さらに超電
導臨界温度を向上するとができる。また、これらの本発
明の好ましい態様に従うことによって超電導材料の組成
が均一化されると共に安定し、具体的に後述するよう
に、特性の経時劣化が少ないことも認められた。Further in accordance with a preferred embodiment of the present invention, after the above firing, or after reheating to a range of 500 ~ 800 ° C after firing, 20 ° C /
By gradually cooling at a cooling rate of not more than a minute, the superconducting critical temperature can be further improved. Further, it was also confirmed that the composition of the superconducting material was made uniform and stable by following these preferred embodiments of the present invention, and that the deterioration of the characteristics with time was small, as will be specifically described later.
以下に本発明を実施例により具体的に説明するが、以
下の開示によって本発明の技術的範囲は何等制限される
ものではない。Hereinafter, the present invention will be specifically described with reference to Examples, but the technical scope of the present invention is not limited by the following disclosure.
実施例 純度3N以上、平均粒径３μｍ以下のBaCO3、Y2O3、CuO
の各の粉末を、焼成後の組成がBa1-xYxCu1O3としたとき
に、ｘ＝0.2、0.4、0.8となるように混合した３種類の
材料を用意した。Example BaCO 3 , Y 2 O 3 and CuO having a purity of 3 N or more and an average particle size of 3 μm or less
Each of the powder of the composition after firing when the Ba 1-x Y x Cu 1 O 3, were prepared three kinds of materials were mixed so that the x = 0.2,0.4,0.8.
これらの粉末を、900℃で12時間大気中で焼成し、ケ
ーキ状に固化した粉末をアルミナ製のボールミルによっ
て８時間粉砕し、平均粒径４μｍの粉末を得た。この操
作を３回繰り返し、特に最後の工程においては粉末焼成
体が２〜３μｍとなるように粉砕した。These powders were fired at 900 ° C. for 12 hours in the air, and the cake-solidified powder was pulverized for 8 hours by a ball mill made of alumina to obtain a powder having an average particle diameter of 4 μm. This operation was repeated three times, and particularly in the last step, the powder fired body was pulverized to have a particle size of 2 to 3 μm.
粉末焼成体をポリビニルブチラール及びデブチルフ
タレートと混合し、更に、イソプロピルアルコール1:メ
チルエチルケトン２の割合で混合したのちボールミル12
Hr混合し、その後脱気・粘度調整を行い900ポアズ（at2
0℃）のスラリーを作成した。The powder calcined product was mixed with polyvinyl butyral and debutyl phthalate, and further mixed at a ratio of isopropyl alcohol 1: methyl ethyl ketone 2 and then ball mill 12
After mixing with Hr, degassing and viscosity adjustment were performed, and then 900 poise (at2
0 degree C) slurry was prepared.
粉末焼成体を、テルピネオール及びブチルカルビト
ールと混合したのち３方ロールで混合した。The powder fired body was mixed with terpineol and butyl carbitol, and then mixed with a three-way roll.
粉末焼成体を、アクリル系バインダー及びチクソト
ロピ性付与の為シリコン系添加物を付加し、ボールミル
で混合した。The fired powder was added with an acrylic binder and a silicon additive for imparting thixotropy, and mixed by a ball mill.
これらのペースト、およびを、それぞれ320メ
ッシュのステンレスクリーンを用いてSrTiO2製の基板上
に、厚さが約25μｍとなるように所定のパターンで印刷
し、メッシュベルト式乾燥機を用いて150℃30分間乾燥
した。この乾燥工程を経たペースト膜の厚さは約22μｍ
であった。更に、この乾燥したペーストを搭載した基板
を450℃迄２℃／分で昇温し、450℃〜900℃迄３℃/min
で昇温した後930℃で12時間O2ガス気流中に保持して焼
成した。Each of these pastes was printed on a SrTiO 2 substrate with a 320 mesh stainless clean in a predetermined pattern so that the thickness was about 25 μm, and the temperature was 150 ° C. using a mesh belt dryer. It was dried for 30 minutes. The thickness of the paste film after this drying process is about 22 μm
Met. Furthermore, the substrate on which this dried paste is mounted is heated up to 450 ° C at a rate of 2 ° C / minute, and 450 ° C to 900 ° C at 3 ° C / min.
Then, the temperature was raised at 930 ° C., and the mixture was baked in an O 2 gas stream at 930 ° C. for 12 hours.
尚、こうして得られた配線の臨界温度Tc並びにTciの
測定は、定法に従って試料の両端にAg導電ペーストにて
電極を付け、クライオスタット中で直流４点プローブ法
で行った。温度はキャリブレーション済みのAu（Fe）−
Ag熱電対を用いて行った。温度を少しずつ上昇させなが
ら抵抗の変化を測定し、測定されたTc並びにTciを第１
表に示す。The critical temperatures Tc and Tci of the wiring thus obtained were measured by a DC four-point probe method in a cryostat by attaching electrodes with Ag conductive paste on both ends of the sample according to a standard method. Temperature is calibrated Au (Fe)-
This was done using an Ag thermocouple. Measure the resistance change while gradually raising the temperature, and measure the measured Tc and Tci first.
Shown in the table.
更に、周期律表II a族並びにIII a族の元素を、第１
表に示すような組成で、上述のものと同じ条件で配線化
し、上述の方法で各試料のTc、Tciの測定を行った、ま
た、基板材料についても第１表に示すように幾つかの種
類のものを用いた。Furthermore, the elements of Group IIa and Group IIIa of the Periodic Table are
Wiring was performed under the same conditions as those described above with the composition shown in the table, and Tc and Tci of each sample were measured by the method described above. I used one of a kind.
発明の効果 以上説明した如く、本発明に従えば、電気抵抗あるい
はインピーダンスが全く存在しないという理想的な特性
を有するセラミックス系超電導材料による配線パターン
が形成される。 EFFECTS OF THE INVENTION As described above, according to the present invention, a wiring pattern made of a ceramics-based superconducting material having an ideal characteristic of having no electric resistance or impedance is formed.
一方、近年ジョセフソン素子を中心とするデバイスベ
ースでの高速化が進められているが、これらデバイスの
性能は当然ながら回路基板や、パッケージに登載されて
機能する。換言すればデバイスでの性能が如何に向上し
てもそれに見合った周辺部材としての配線等が完成しな
ければその性能を充分に発揮し得ない。On the other hand, in recent years, speeding up has been promoted in device bases centering on Josephson devices, but the performance of these devices naturally functions by being mounted on a circuit board or a package. In other words, no matter how the performance of the device is improved, the performance cannot be sufficiently exhibited unless the wiring and the like as the peripheral member corresponding to it are completed.
本回路基板はこれら超電導を利用したデバイスを登載
し、機能を引き出す為のパターンに利用すると効果的で
ある。It is effective for this circuit board to mount these devices using superconductivity and use them as a pattern to bring out the functions.
本発明に従って作製された配線は、極めて良好な超電
導特性を示すと共に、その優れた特性が長期間に亘って
安定している。The wiring produced according to the present invention exhibits extremely good superconducting properties, and its excellent properties are stable over a long period of time.
これは、本発明の特徴的な製造方法に従って、結晶粒
の微細化による結晶界面長の増加と、酸素欠陥濃度の均
一性が達成されて高いTciと小さなΔＴが得られたもの
である。This is because according to the characteristic manufacturing method of the present invention, the increase of the crystal interface length due to the refinement of the crystal grains and the uniformity of the oxygen defect concentration were achieved, and a high Tci and a small ΔT were obtained.
基板上に配線として形成された超電導体は、基板によ
って支持されているので機械的に安定しており取り扱い
に優れる。また、強度を持たせるために、超電導材料を
何時要以上に使用する必要がないので経済的でもある。Since the superconductor formed as a wiring on the substrate is supported by the substrate, it is mechanically stable and easy to handle. Further, it is economical because it is not necessary to use the superconducting material more than necessary in order to have strength.
この様に、本発明に従えば、高く安定したTcを有する
超電導材料が、使い易い形態で得られるため、経済的な
液体窒素を冷却媒体として用いる超電導性配線が得ら
れ、超電導技術の実用化が可能となる。As described above, according to the present invention, a superconducting material having a high and stable Tc can be obtained in an easy-to-use form, so that an economical superconducting wiring using liquid nitrogen as a cooling medium can be obtained, and the superconducting technology can be put into practical use. Is possible.
───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 昭63−271815（ＪＰ，Ａ) 特開 昭63−271994（ＪＰ，Ａ) 特開 昭63−278397（ＪＰ，Ａ) 特開 昭63−279522（ＪＰ，Ａ) 特開 昭63−300594（ＪＰ，Ａ) ─────────────────────────────────────────────────── ─── Continuation of front page (56) Reference JP-A-63-271815 (JP, A) JP-A-63-271994 (JP, A) JP-A-63-278397 (JP, A) JP-A-63- 279522 (JP, A) JP-A-63-300594 (JP, A)
Claims (23)
とも１種の元素αまたは該元素を含む化合物と、周期律
表III a族から選択された少なくとも１種の元素βまた
は該元素βを含む化合物と、周期律表I b、II b、III
b、IV a、VIII a族から選択された少なくとも１種の元
素γまたは該元素γを含む化合物と、の粉末を原料粉末
とし、 該原料粉末をビヒクルと混合してペースト状とし、 スクリーン印刷法によりSrTiO3またはサファイアの基板
上に該ペーストによる所定のパターンを描き、 該ペーストからビヒクルを揮散・除去した後加熱して焼
成し、 一般式：αｗβｘγｙδｚ （但し、元素αは周期律表II a族から選択された１種の
元素であり、元素βは周期律表III a族から選択された
１種の元素であり、元素γは周期律表I b、II b、III
b、IV a、VIII a族から選択された少なくとも１種の元
素であり、元素δはＯ（酸素）であり、ｗ、ｘ、ｙ、ｚ
はそれぞれ１≦ｗ≦５、１≦ｘ≦５、１≦ｙ≦15、１≦
ｚ≦20を満たす数である） で表される組成の複合酸化物配線パターンを該基板上に
形成することを特徴とする超電導性配線の形成方法。1. At least one element α selected from an element of group IIa of the periodic table or a compound containing the element, and at least one element β selected from group IIIa of the periodic table or the element β. A compound containing, and Ib, IIb, III of the periodic table
A powder of at least one element γ selected from the groups b, IV a, and VIII a or a compound containing the element γ is used as a raw material powder, and the raw material powder is mixed with a vehicle to form a paste, and a screen printing method is used. A predetermined pattern of the paste is drawn on a substrate of SrTiO 3 or sapphire by means of, and the vehicle is volatilized and removed from the paste and then heated and baked, and the general formula: α w β x γ y δ z (where the element α Is an element selected from Group IIa of the Periodic Table, element β is an element selected from Group IIIa of the Periodic Table, and element γ is Ib, IIb, III
b, IVa, VIIIa is at least one element selected from the group, element δ is O (oxygen), w, x, y, z
Are 1 ≦ w ≦ 5, 1 ≦ x ≦ 5, 1 ≦ y ≦ 15, 1 ≦, respectively.
A composite oxide wiring pattern having a composition represented by the formula: z ≦ 20) is formed on the substrate.
れぞれの酸化物、炭酸塩、硫酸塩または硝酸塩の粉末で
あることを特徴とする特許請求の範囲第１項に記載の超
電導性配線の形成方法。2. The superconductivity according to claim 1, wherein the raw material powder is a powder of oxide, carbonate, sulfate or nitrate of each of the elements α, β and γ. Wiring formation method.
れぞれの酸化物、炭酸塩、硫酸塩または硝酸塩の粉末を
混合した粉末混合物を予備焼成し、得られた焼成体を粉
砕して得た焼成体粉末であることを特徴とする特許請求
の範囲第１項に記載の超電導性配線の形成方法。3. A powder mixture in which the raw material powder is a mixture of powders of oxides, carbonates, sulfates or nitrates of the elements α, β and γ, respectively, is pre-fired, and the fired body obtained is pulverized. The method for forming a superconducting wiring according to claim 1, which is the obtained fired body powder.
することを特徴とする特許請求の範囲第３項に記載の超
電導性配線の形成方法。4. The method for forming a superconducting wiring according to claim 3, wherein the pre-baking is carried out at 700 to 950 ° C.
で行われる粉砕とを含む工程を少なくとも３回繰り返す
ことを特徴とする特許請求の範囲第３項乃至第４項の何
れか１項に記載の超電導性配線の形成方法。5. The method according to claim 3, wherein a step including pre-baking of the raw material powder and pulverization performed after the pre-baking is repeated at least three times. A method of forming a superconducting wiring according to item.
ｍ以下に粉砕することを特徴とする特許請求の範囲第３
項乃至第５項の何れか１項に記載の超電導性配線の形成
方法。6. The average particle size of the fired body after the final preliminary firing is 8 μm.
Claim 3 characterized by crushing to m or less
Item 7. A method for forming a superconducting wiring according to any one of items 5 to 5.
特徴とする特許請求の範囲第３項乃至第６項の何れか１
項に記載の超電導性配線の形成方法。7. The method according to claim 3, wherein the crushing is performed by a ball mill.
A method of forming a superconducting wiring according to item.
以上粉砕を行うことを特徴とする特許請求の範囲第７項
に記載の超電導性配線の形成方法。8. The method for forming a superconducting wiring according to claim 7, wherein crushing is performed for at least 5 hours using Al 2 O 3 balls.
ましくは５μｍ以下であることを特徴とする特許請求の
範囲第１項乃至第８項の何れか１項に記載の超電導性配
線の形成方法。9. The superconducting wiring according to any one of claims 1 to 8, wherein each of the raw material powders has a particle diameter of 15 μm or less, preferably 5 μm or less. Forming method.
ことを特徴とする特許請求の範囲第１項乃至第９項に記
載の超電導性配線の形成方法。10. The method for forming a superconducting wiring according to claim 1, wherein the vehicle comprises a resin and a solvent.
アクリル樹脂であることを特徴とする特許請求の範囲第
10項に記載の超電導性配線の形成方法。11. The resin according to claim 1, wherein the resin is ethyl cellulose resin or acrylic resin.
11. The method for forming superconducting wiring according to item 10.
酸ブチルカルビトールであることを特徴とする特許請求
の範囲第10項または第11項に記載の超電導性配線の形成
方法。12. The method for forming a superconducting wiring according to claim 10 or 11, wherein the solvent is terpionel or butyl carbitol acetate.
することを特徴とする特許請求の範囲第１項乃至第12項
の何れか１項に記載の超電導性配線の形成方法。13. The method for forming a superconducting wiring according to claim 1, wherein the paste has a viscosity of 100 to 1000 poises.
シュのステンレスメッシュによって行うことを特徴とす
る特許請求の範囲第１項乃至第13項の何れか１項に記載
の超電導性配線の形成方法。14. The method for forming a superconducting wiring according to claim 1, wherein the screen printing is performed using a stainless mesh of 100 to 325 mesh.
に塗布することを特徴とする特許請求の範囲第１項乃至
第14項の何れか１項に記載の超電導性配線の形成方法。15. The method for forming a superconducting wiring according to claim 1, wherein the paste is applied to a thickness in the range of 10 to 50 μm.
℃の範囲で行うことを特徴とする特許請求の範囲第１項
乃至第15項の何れか１項に記載の超電導性配線の形成方
法。16. Drying the applied paste to 100 to 200
The method for forming a superconducting wiring according to claim 1, wherein the superconducting wiring is formed in a temperature range of ° C.
ることを特徴とする特許請求の範囲第１項乃至第16項の
何れか１項に記載の超電導性配線の形成方法。17. The method for forming a superconducting wiring according to claim 1, wherein the main calcination is carried out in a temperature range of 800 to 1000 ° C.
熱処理することを特徴とする特許請求の範囲第１項乃至
第17項に記載の超電導性配線の形成方法。18. The method for forming a superconducting wiring according to claim 1, wherein the fired body after the main firing is heat-treated in a range of 500 to 800 ° C.
ことを特徴とする特許請求の範囲第18項に記載の超電導
性配線の形成方法。19. The method for forming a superconducting wiring according to claim 18, wherein the O 2 partial pressure during the heat treatment is 10 −1 Torr or less.
至800℃の範囲に再加熱し、20℃／分以下の冷却速度で
徐冷することを特徴とする特許請求の範囲第１項乃至第
19項の何れか１項にに記載の超電導性配線の形成方法。20. Immediately after the firing, or after the firing, it is reheated to a range of 500 to 800 ° C. and gradually cooled at a cooling rate of 20 ° C./min or less.
Item 21. The method for forming a superconducting wire according to any one of items 19.
であり、前記元素γがCuであることを特徴とする特許請
求の範囲第１項乃至第20項の何れか１項に記載の超電導
性部材の製造方法。21. The element α is Ba and the element β is Y
The method for producing a superconducting member according to any one of claims 1 to 20, wherein the element γ is Cu.
であり、前記元素γがCuであることを特徴とする特許請
求の範囲第１項乃至第20項の何れか１項に記載の超電導
性部材の製造方法。22. The element α is Ba and the element β is Dy
The method for producing a superconducting member according to any one of claims 1 to 20, wherein the element γ is Cu.
であり、前記元素γでCuであることを特徴とする特許請
求の範囲第１項乃至第20項の何れか１項に記載の超電導
性部材の製造方法。23. The element α is Sr and the element β is La
The method for producing a superconducting member according to any one of claims 1 to 20, wherein the element γ is Cu.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62254966A JPH084191B2 (en) | 1987-10-09 | 1987-10-09 | Method for forming superconducting wiring |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62254966A JPH084191B2 (en) | 1987-10-09 | 1987-10-09 | Method for forming superconducting wiring |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0196988A JPH0196988A (en) | 1989-04-14 |
| JPH084191B2 true JPH084191B2 (en) | 1996-01-17 |
Family
ID=17272341
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62254966A Expired - Fee Related JPH084191B2 (en) | 1987-10-09 | 1987-10-09 | Method for forming superconducting wiring |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH084191B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0240971A (en) * | 1988-07-29 | 1990-02-09 | Nec Corp | Manufacture of superconducting quantum interference element |
| JPH0269990A (en) * | 1988-09-05 | 1990-03-08 | Mitsubishi Mining & Cement Co Ltd | Manufacture of ceramic superconductor wiring board |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63271994A (en) * | 1987-04-28 | 1988-11-09 | Tdk Corp | Ceramic wiring substrate |
| JPS63271815A (en) * | 1987-04-30 | 1988-11-09 | Taiyo Yuden Co Ltd | Superconductive composite ceramic body and its manufacture |
| JPS63278397A (en) * | 1987-05-11 | 1988-11-16 | Fujitsu Ltd | Superconducting ceramics-glass-ceramics composite circuit substrate |
| JPS63279522A (en) * | 1987-05-11 | 1988-11-16 | Toshiba Corp | Superconductor wire rod |
| JPS63300594A (en) * | 1987-05-29 | 1988-12-07 | Nec Corp | Multilayered ceramic wiring board and manufacture thereof |
-
1987
- 1987-10-09 JP JP62254966A patent/JPH084191B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0196988A (en) | 1989-04-14 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| EP0356722B1 (en) | Oxide superconductor and method of producing the same | |
| JP2571789B2 (en) | Superconducting material and its manufacturing method | |
| JPH084191B2 (en) | Method for forming superconducting wiring | |
| EP0284088B1 (en) | Process for producing superconducting thick film | |
| JP2920497B2 (en) | Manufacturing method of superconducting tape material | |
| KR910004862B1 (en) | Target material for forming superconductive film | |
| US5260263A (en) | Superconductive ceramic wire and method for producing the same | |
| JPH0816025B2 (en) | Superconducting thick film manufacturing method | |
| JP2590370B2 (en) | Superconducting material and manufacturing method thereof | |
| JPH0197320A (en) | Formation of superconductive wiring pattern | |
| JPH013061A (en) | Method for manufacturing superconducting materials | |
| JP2519742B2 (en) | Manufacturing method of superconducting material | |
| JPS63299018A (en) | Manufacture of superconductive material | |
| Hornung et al. | Preparation and characterization of (Bi, Pb) 2Sr2Ca2Cu3O10+ x superconducting thick films on Ag tape using the screen-printing technique | |
| JP2703227B2 (en) | Superconductor device | |
| JP2597578B2 (en) | Superconductor manufacturing method | |
| KR950007088B1 (en) | Bi-sr-ca-cu-o section target for superconductive thin film | |
| JP2525842B2 (en) | Superconducting wire and its manufacturing method | |
| JPH01238190A (en) | Manufacture of superconductor thick film | |
| JP2597579B2 (en) | Superconductor manufacturing method | |
| JPH0248459A (en) | Production of compound oxide superconductor | |
| JPH01161627A (en) | Manufacture of oxide superconducting wire | |
| JPH013054A (en) | Method for manufacturing superconducting materials | |
| JPH013056A (en) | Method for manufacturing superconducting materials | |
| JPH01175793A (en) | Manufacture of superconductor thick film |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |