JPH01174922U - - Google Patents
Info
- Publication number
- JPH01174922U JPH01174922U JP7138888U JP7138888U JPH01174922U JP H01174922 U JPH01174922 U JP H01174922U JP 7138888 U JP7138888 U JP 7138888U JP 7138888 U JP7138888 U JP 7138888U JP H01174922 U JPH01174922 U JP H01174922U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- cart
- film forming
- holder
- thin film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 8
- 239000010409 thin film Substances 0.000 claims 2
- 239000010408 film Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7138888U JPH0650983Y2 (ja) | 1988-05-30 | 1988-05-30 | 薄膜形成装置の基板カート |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7138888U JPH0650983Y2 (ja) | 1988-05-30 | 1988-05-30 | 薄膜形成装置の基板カート |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01174922U true JPH01174922U (ru) | 1989-12-13 |
| JPH0650983Y2 JPH0650983Y2 (ja) | 1994-12-21 |
Family
ID=31296596
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7138888U Expired - Lifetime JPH0650983Y2 (ja) | 1988-05-30 | 1988-05-30 | 薄膜形成装置の基板カート |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0650983Y2 (ru) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01313924A (ja) * | 1988-06-13 | 1989-12-19 | Fuji Electric Co Ltd | 縦型プラズマｃｖｄ装置 |
| WO2009148087A1 (ja) * | 2008-06-06 | 2009-12-10 | 株式会社アルバック | 薄膜太陽電池製造装置 |
| JP2011124348A (ja) * | 2009-12-09 | 2011-06-23 | Ulvac Japan Ltd | 基板ホルダー及び基板搬送装置 |
| JP2012089589A (ja) * | 2010-10-15 | 2012-05-10 | Ulvac Japan Ltd | 基板ホルダー及び基板搬送装置 |
-
1988
- 1988-05-30 JP JP7138888U patent/JPH0650983Y2/ja not_active Expired - Lifetime
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01313924A (ja) * | 1988-06-13 | 1989-12-19 | Fuji Electric Co Ltd | 縦型プラズマｃｖｄ装置 |
| WO2009148087A1 (ja) * | 2008-06-06 | 2009-12-10 | 株式会社アルバック | 薄膜太陽電池製造装置 |
| JP5328786B2 (ja) * | 2008-06-06 | 2013-10-30 | 株式会社アルバック | 薄膜太陽電池製造装置 |
| TWI424579B (zh) * | 2008-06-06 | 2014-01-21 | Ulvac Inc | 薄膜太陽電池製造裝置 |
| JP2011124348A (ja) * | 2009-12-09 | 2011-06-23 | Ulvac Japan Ltd | 基板ホルダー及び基板搬送装置 |
| JP2012089589A (ja) * | 2010-10-15 | 2012-05-10 | Ulvac Japan Ltd | 基板ホルダー及び基板搬送装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0650983Y2 (ja) | 1994-12-21 |