JPH01174699U - - Google Patents
Info
- Publication number
- JPH01174699U JPH01174699U JP1988071111U JP7111188U JPH01174699U JP H01174699 U JPH01174699 U JP H01174699U JP 1988071111 U JP1988071111 U JP 1988071111U JP 7111188 U JP7111188 U JP 7111188U JP H01174699 U JPH01174699 U JP H01174699U
- Authority
- JP
- Japan
- Prior art keywords
- bearing
- housing
- rolling bearing
- turbo
- molecular pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000314 lubricant Substances 0.000 claims description 5
- 238000006073 displacement reaction Methods 0.000 claims description 4
- 238000005096 rolling process Methods 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C27/00—Elastic or yielding bearings or bearing supports, for exclusively rotary movement
- F16C27/04—Ball or roller bearings, e.g. with resilient rolling bodies
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2360/00—Engines or pumps
- F16C2360/44—Centrifugal pumps
- F16C2360/45—Turbo-molecular pumps
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1988071111U JPH01174699U (de) | 1988-05-31 | 1988-05-31 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1988071111U JPH01174699U (de) | 1988-05-31 | 1988-05-31 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH01174699U true JPH01174699U (de) | 1989-12-12 |
Family
ID=31296322
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1988071111U Pending JPH01174699U (de) | 1988-05-31 | 1988-05-31 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH01174699U (de) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2016084811A (ja) * | 2014-10-24 | 2016-05-19 | プファイファー・ヴァキューム・ゲーエムベーハー | 真空ポンプ |
JP2018159340A (ja) * | 2017-03-23 | 2018-10-11 | 株式会社島津製作所 | 真空ポンプの制御装置、およびポンプ装置 |
-
1988
- 1988-05-31 JP JP1988071111U patent/JPH01174699U/ja active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2016084811A (ja) * | 2014-10-24 | 2016-05-19 | プファイファー・ヴァキューム・ゲーエムベーハー | 真空ポンプ |
JP2018159340A (ja) * | 2017-03-23 | 2018-10-11 | 株式会社島津製作所 | 真空ポンプの制御装置、およびポンプ装置 |