JPS63175807U - - Google Patents
Info
- Publication number
- JPS63175807U JPS63175807U JP6624987U JP6624987U JPS63175807U JP S63175807 U JPS63175807 U JP S63175807U JP 6624987 U JP6624987 U JP 6624987U JP 6624987 U JP6624987 U JP 6624987U JP S63175807 U JPS63175807 U JP S63175807U
- Authority
- JP
- Japan
- Prior art keywords
- shaft
- gap
- set surface
- displacement sensor
- reference position
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000006073 displacement reaction Methods 0.000 claims description 5
- 238000010586 diagram Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
Landscapes
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6624987U JPH0519766Y2 (de) | 1987-05-02 | 1987-05-02 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6624987U JPH0519766Y2 (de) | 1987-05-02 | 1987-05-02 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS63175807U true JPS63175807U (de) | 1988-11-15 |
JPH0519766Y2 JPH0519766Y2 (de) | 1993-05-25 |
Family
ID=30904079
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6624987U Expired - Lifetime JPH0519766Y2 (de) | 1987-05-02 | 1987-05-02 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0519766Y2 (de) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005214833A (ja) * | 2004-01-30 | 2005-08-11 | Mitsutoyo Corp | 段差・隙間測定装置 |
KR20160126901A (ko) * | 2015-04-24 | 2016-11-02 | 가부시키가이샤 호리바 에스텍 | 마이크로-위치 갭 센서 조립체 |
-
1987
- 1987-05-02 JP JP6624987U patent/JPH0519766Y2/ja not_active Expired - Lifetime
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005214833A (ja) * | 2004-01-30 | 2005-08-11 | Mitsutoyo Corp | 段差・隙間測定装置 |
JP4509588B2 (ja) * | 2004-01-30 | 2010-07-21 | 株式会社ミツトヨ | 段差・隙間測定装置 |
KR20160126901A (ko) * | 2015-04-24 | 2016-11-02 | 가부시키가이샤 호리바 에스텍 | 마이크로-위치 갭 센서 조립체 |
Also Published As
Publication number | Publication date |
---|---|
JPH0519766Y2 (de) | 1993-05-25 |