JPH01173943U - - Google Patents

Info

Publication number
JPH01173943U
JPH01173943U JP7094888U JP7094888U JPH01173943U JP H01173943 U JPH01173943 U JP H01173943U JP 7094888 U JP7094888 U JP 7094888U JP 7094888 U JP7094888 U JP 7094888U JP H01173943 U JPH01173943 U JP H01173943U
Authority
JP
Japan
Prior art keywords
boat
base
semiconductor wafers
disposed
carrier
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7094888U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7094888U priority Critical patent/JPH01173943U/ja
Publication of JPH01173943U publication Critical patent/JPH01173943U/ja
Pending legal-status Critical Current

Links

JP7094888U 1988-05-27 1988-05-27 Pending JPH01173943U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7094888U JPH01173943U (enrdf_load_stackoverflow) 1988-05-27 1988-05-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7094888U JPH01173943U (enrdf_load_stackoverflow) 1988-05-27 1988-05-27

Publications (1)

Publication Number Publication Date
JPH01173943U true JPH01173943U (enrdf_load_stackoverflow) 1989-12-11

Family

ID=31296161

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7094888U Pending JPH01173943U (enrdf_load_stackoverflow) 1988-05-27 1988-05-27

Country Status (1)

Country Link
JP (1) JPH01173943U (enrdf_load_stackoverflow)

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