JPH01173942U - - Google Patents

Info

Publication number
JPH01173942U
JPH01173942U JP7094788U JP7094788U JPH01173942U JP H01173942 U JPH01173942 U JP H01173942U JP 7094788 U JP7094788 U JP 7094788U JP 7094788 U JP7094788 U JP 7094788U JP H01173942 U JPH01173942 U JP H01173942U
Authority
JP
Japan
Prior art keywords
semiconductor wafers
boat
wafer
carrier
view
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7094788U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0249718Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7094788U priority Critical patent/JPH0249718Y2/ja
Publication of JPH01173942U publication Critical patent/JPH01173942U/ja
Application granted granted Critical
Publication of JPH0249718Y2 publication Critical patent/JPH0249718Y2/ja
Expired legal-status Critical Current

Links

JP7094788U 1988-05-27 1988-05-27 Expired JPH0249718Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7094788U JPH0249718Y2 (enrdf_load_stackoverflow) 1988-05-27 1988-05-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7094788U JPH0249718Y2 (enrdf_load_stackoverflow) 1988-05-27 1988-05-27

Publications (2)

Publication Number Publication Date
JPH01173942U true JPH01173942U (enrdf_load_stackoverflow) 1989-12-11
JPH0249718Y2 JPH0249718Y2 (enrdf_load_stackoverflow) 1990-12-27

Family

ID=31296160

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7094788U Expired JPH0249718Y2 (enrdf_load_stackoverflow) 1988-05-27 1988-05-27

Country Status (1)

Country Link
JP (1) JPH0249718Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0249718Y2 (enrdf_load_stackoverflow) 1990-12-27

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