JPH01173155U - - Google Patents
Info
- Publication number
- JPH01173155U JPH01173155U JP7060488U JP7060488U JPH01173155U JP H01173155 U JPH01173155 U JP H01173155U JP 7060488 U JP7060488 U JP 7060488U JP 7060488 U JP7060488 U JP 7060488U JP H01173155 U JPH01173155 U JP H01173155U
- Authority
- JP
- Japan
- Prior art keywords
- compound semiconductor
- boat
- disposed
- manufacturing apparatus
- polycrystal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 239000003708 ampul Substances 0.000 claims description 2
- 239000010453 quartz Substances 0.000 claims description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 2
- 150000001875 compounds Chemical class 0.000 claims 6
- 239000004065 semiconductor Substances 0.000 claims 6
- 239000000470 constituent Substances 0.000 claims 1
- 239000013078 crystal Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7060488U JPH01173155U (enExample) | 1988-05-27 | 1988-05-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7060488U JPH01173155U (enExample) | 1988-05-27 | 1988-05-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01173155U true JPH01173155U (enExample) | 1989-12-08 |
Family
ID=31295838
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7060488U Pending JPH01173155U (enExample) | 1988-05-27 | 1988-05-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01173155U (enExample) |
-
1988
- 1988-05-27 JP JP7060488U patent/JPH01173155U/ja active Pending
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