JPH01173155U - - Google Patents

Info

Publication number

JPH01173155U

JPH01173155U JP7060488U JP7060488U JPH01173155U JP H01173155 U JPH01173155 U JP H01173155U JP 7060488 U JP7060488 U JP 7060488U JP 7060488 U JP7060488 U JP 7060488U JP H01173155 U JPH01173155 U JP H01173155U

Authority

JP

Japan

Prior art keywords

compound semiconductor

boat

disposed

manufacturing apparatus

polycrystal

Prior art date

1988-05-27

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000004519 manufacturing process Methods 0.000 claims description 4
• 239000003708 ampul Substances 0.000 claims description 2
• 239000010453 quartz Substances 0.000 claims description 2
• VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 2
• 150000001875 compounds Chemical class 0.000 claims 6
• 239000004065 semiconductor Substances 0.000 claims 6
• 239000000470 constituent Substances 0.000 claims 1
• 239000013078 crystal Substances 0.000 description 2
• 238000010586 diagram Methods 0.000 description 2
• 229910001218 Gallium arsenide Inorganic materials 0.000 description 1