JPH01171586U - - Google Patents
Info
- Publication number
- JPH01171586U JPH01171586U JP6405988U JP6405988U JPH01171586U JP H01171586 U JPH01171586 U JP H01171586U JP 6405988 U JP6405988 U JP 6405988U JP 6405988 U JP6405988 U JP 6405988U JP H01171586 U JPH01171586 U JP H01171586U
- Authority
- JP
- Japan
- Prior art keywords
- coil
- magnet
- linear motor
- magnetic field
- moves
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010586 diagram Methods 0.000 description 3
- 230000004907 flux Effects 0.000 description 2
Landscapes
- Linear Motors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988064059U JPH0721107Y2 (ja) | 1988-05-17 | 1988-05-17 | リニアモータ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988064059U JPH0721107Y2 (ja) | 1988-05-17 | 1988-05-17 | リニアモータ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01171586U true JPH01171586U (de) | 1989-12-05 |
| JPH0721107Y2 JPH0721107Y2 (ja) | 1995-05-15 |
Family
ID=31289542
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988064059U Expired - Lifetime JPH0721107Y2 (ja) | 1988-05-17 | 1988-05-17 | リニアモータ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0721107Y2 (de) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010154596A (ja) * | 2008-12-24 | 2010-07-08 | Nikon Corp | リニアモータ、ステージ装置及び露光装置並びにデバイスの製造方法 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS535402A (en) * | 1976-07-06 | 1978-01-19 | Ebara Corp | Eddy engenderment preventive equipment of pumping water tank |
-
1988
- 1988-05-17 JP JP1988064059U patent/JPH0721107Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS535402A (en) * | 1976-07-06 | 1978-01-19 | Ebara Corp | Eddy engenderment preventive equipment of pumping water tank |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010154596A (ja) * | 2008-12-24 | 2010-07-08 | Nikon Corp | リニアモータ、ステージ装置及び露光装置並びにデバイスの製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0721107Y2 (ja) | 1995-05-15 |