JPH01171454U - - Google Patents

Info

Publication number
JPH01171454U
JPH01171454U JP1988064337U JP6433788U JPH01171454U JP H01171454 U JPH01171454 U JP H01171454U JP 1988064337 U JP1988064337 U JP 1988064337U JP 6433788 U JP6433788 U JP 6433788U JP H01171454 U JPH01171454 U JP H01171454U
Authority
JP
Japan
Prior art keywords
slit
original plate
width
inclined portion
photomask
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1988064337U
Other languages
English (en)
Japanese (ja)
Other versions
JPH064348Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988064337U priority Critical patent/JPH064348Y2/ja
Publication of JPH01171454U publication Critical patent/JPH01171454U/ja
Application granted granted Critical
Publication of JPH064348Y2 publication Critical patent/JPH064348Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1988064337U 1988-05-16 1988-05-16 フォトマスク原板 Expired - Lifetime JPH064348Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988064337U JPH064348Y2 (ja) 1988-05-16 1988-05-16 フォトマスク原板

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988064337U JPH064348Y2 (ja) 1988-05-16 1988-05-16 フォトマスク原板

Publications (2)

Publication Number Publication Date
JPH01171454U true JPH01171454U (enExample) 1989-12-05
JPH064348Y2 JPH064348Y2 (ja) 1994-02-02

Family

ID=31289807

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988064337U Expired - Lifetime JPH064348Y2 (ja) 1988-05-16 1988-05-16 フォトマスク原板

Country Status (1)

Country Link
JP (1) JPH064348Y2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013050575A (ja) * 2011-08-31 2013-03-14 Dainippon Printing Co Ltd パターン位相差フィルムの製造方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013050575A (ja) * 2011-08-31 2013-03-14 Dainippon Printing Co Ltd パターン位相差フィルムの製造方法
CN103765256A (zh) * 2011-08-31 2014-04-30 大日本印刷株式会社 图案相位差膜的制造方法
CN103765256B (zh) * 2011-08-31 2015-04-01 大日本印刷株式会社 图案相位差膜的制造方法

Also Published As

Publication number Publication date
JPH064348Y2 (ja) 1994-02-02

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