JPH01171338U - - Google Patents

Info

Publication number

JPH01171338U

JPH01171338U JP6749188U JP6749188U JPH01171338U JP H01171338 U JPH01171338 U JP H01171338U JP 6749188 U JP6749188 U JP 6749188U JP 6749188 U JP6749188 U JP 6749188U JP H01171338 U JPH01171338 U JP H01171338U

Authority

JP

Japan

Prior art keywords

conductor film

pressure sensor

connection

semiconductor pressure

center

Prior art date

1988-05-24

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
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• 239000004020 conductor Substances 0.000 claims description 7
• 239000004065 semiconductor Substances 0.000 claims description 7
• 239000012212 insulator Substances 0.000 claims description 3
• 239000002184 metal Substances 0.000 claims description 2
• 229910000679 solder Inorganic materials 0.000 claims description 2
• XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 1
• 239000013078 crystal Substances 0.000 claims 1
• 229910052710 silicon Inorganic materials 0.000 claims 1
• 239000010703 silicon Substances 0.000 claims 1
• 239000000758 substrate Substances 0.000 claims 1
• 238000009795 derivation Methods 0.000 description 1
• 238000001514 detection method Methods 0.000 description 1
• 238000010586 diagram Methods 0.000 description 1
• 239000007788 liquid Substances 0.000 description 1