JPH01171337U - - Google Patents
Info
- Publication number
- JPH01171337U JPH01171337U JP6760688U JP6760688U JPH01171337U JP H01171337 U JPH01171337 U JP H01171337U JP 6760688 U JP6760688 U JP 6760688U JP 6760688 U JP6760688 U JP 6760688U JP H01171337 U JPH01171337 U JP H01171337U
- Authority
- JP
- Japan
- Prior art keywords
- silicon
- diaphragm
- silicon diaphragm
- pressure
- strain gauge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 21
- 229910052710 silicon Inorganic materials 0.000 claims description 21
- 239000010703 silicon Substances 0.000 claims description 21
- 239000000758 substrate Substances 0.000 claims description 7
- 239000012530 fluid Substances 0.000 claims description 5
- 125000006850 spacer group Chemical group 0.000 claims description 2
- 239000004020 conductor Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
- 238000009429 electrical wiring Methods 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6760688U JPH0628662Y2 (ja) | 1988-05-23 | 1988-05-23 | 振動形差圧センサ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6760688U JPH0628662Y2 (ja) | 1988-05-23 | 1988-05-23 | 振動形差圧センサ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01171337U true JPH01171337U (enrdf_load_stackoverflow) | 1989-12-05 |
| JPH0628662Y2 JPH0628662Y2 (ja) | 1994-08-03 |
Family
ID=31292973
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6760688U Expired - Lifetime JPH0628662Y2 (ja) | 1988-05-23 | 1988-05-23 | 振動形差圧センサ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0628662Y2 (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2568269A2 (en) | 2011-08-25 | 2013-03-13 | Yokogawa Electric Corporation | Resonant pressure sensor and method of manufacturing the same |
| CN104422547A (zh) * | 2013-08-19 | 2015-03-18 | 横河电机株式会社 | 谐振式压力传感器及其制造方法 |
-
1988
- 1988-05-23 JP JP6760688U patent/JPH0628662Y2/ja not_active Expired - Lifetime
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2568269A2 (en) | 2011-08-25 | 2013-03-13 | Yokogawa Electric Corporation | Resonant pressure sensor and method of manufacturing the same |
| US9003889B2 (en) | 2011-08-25 | 2015-04-14 | Yokogawa Electric Corporation | Resonant pressure sensor and method of manufacturing the same |
| CN104422547A (zh) * | 2013-08-19 | 2015-03-18 | 横河电机株式会社 | 谐振式压力传感器及其制造方法 |
| EP2840373A3 (en) * | 2013-08-19 | 2015-04-08 | Yokogawa Electric Corporation | Resonant pressure sensor and manufacturing method therefor |
| US11243131B2 (en) | 2013-08-19 | 2022-02-08 | Yokogawa Electric Corporation | Resonant pressure sensor and manufacturing method therefor |
| US11835413B2 (en) | 2013-08-19 | 2023-12-05 | Yokogawa Electric Corporation | Resonant pressure sensor and manufacturing method therefor |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0628662Y2 (ja) | 1994-08-03 |