JPH0117094B2 - - Google Patents
Info
- Publication number
- JPH0117094B2 JPH0117094B2 JP7579780A JP7579780A JPH0117094B2 JP H0117094 B2 JPH0117094 B2 JP H0117094B2 JP 7579780 A JP7579780 A JP 7579780A JP 7579780 A JP7579780 A JP 7579780A JP H0117094 B2 JPH0117094 B2 JP H0117094B2
- Authority
- JP
- Japan
- Prior art keywords
- lens array
- solid
- value
- scanning element
- average
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000007689 inspection Methods 0.000 claims description 22
- 238000000034 method Methods 0.000 claims description 11
- 238000004364 calculation method Methods 0.000 description 21
- 238000010586 diagram Methods 0.000 description 16
- 238000005286 illumination Methods 0.000 description 7
- 238000012545 processing Methods 0.000 description 7
- 238000005259 measurement Methods 0.000 description 6
- 230000015572 biosynthetic process Effects 0.000 description 4
- 238000012360 testing method Methods 0.000 description 4
- 239000007787 solid Substances 0.000 description 3
- 238000003491 array Methods 0.000 description 2
- 238000012937 correction Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 241000217377 Amblema plicata Species 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
- G01M11/0292—Testing optical properties of objectives by measuring the optical modulation transfer function
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Testing Of Optical Devices Or Fibers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7579780A JPS571948A (en) | 1980-06-05 | 1980-06-05 | Inspecting method for lens array |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7579780A JPS571948A (en) | 1980-06-05 | 1980-06-05 | Inspecting method for lens array |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS571948A JPS571948A (en) | 1982-01-07 |
| JPH0117094B2 true JPH0117094B2 (enrdf_load_stackoverflow) | 1989-03-29 |
Family
ID=13586546
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7579780A Granted JPS571948A (en) | 1980-06-05 | 1980-06-05 | Inspecting method for lens array |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS571948A (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114252243B (zh) * | 2021-12-10 | 2023-09-19 | 中国科学院光电技术研究所 | 一种微柱面透镜阵列的检测装置和方法 |
-
1980
- 1980-06-05 JP JP7579780A patent/JPS571948A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS571948A (en) | 1982-01-07 |
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