JPH01170946U - - Google Patents
Info
- Publication number
- JPH01170946U JPH01170946U JP6687288U JP6687288U JPH01170946U JP H01170946 U JPH01170946 U JP H01170946U JP 6687288 U JP6687288 U JP 6687288U JP 6687288 U JP6687288 U JP 6687288U JP H01170946 U JPH01170946 U JP H01170946U
- Authority
- JP
- Japan
- Prior art keywords
- ion beam
- ion
- primary
- microanalyzer
- primary ion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010884 ion-beam technique Methods 0.000 claims description 8
- 238000001514 detection method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6687288U JPH01170946U (enExample) | 1988-05-23 | 1988-05-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6687288U JPH01170946U (enExample) | 1988-05-23 | 1988-05-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01170946U true JPH01170946U (enExample) | 1989-12-04 |
Family
ID=31292260
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6687288U Pending JPH01170946U (enExample) | 1988-05-23 | 1988-05-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01170946U (enExample) |
-
1988
- 1988-05-23 JP JP6687288U patent/JPH01170946U/ja active Pending
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