JPH01168021A - アウターワークホルダー - Google Patents

アウターワークホルダー

Info

Publication number
JPH01168021A
JPH01168021A JP62325748A JP32574887A JPH01168021A JP H01168021 A JPH01168021 A JP H01168021A JP 62325748 A JP62325748 A JP 62325748A JP 32574887 A JP32574887 A JP 32574887A JP H01168021 A JPH01168021 A JP H01168021A
Authority
JP
Japan
Prior art keywords
substrate
work holder
thickness
outer work
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62325748A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0517698B2 (enEXAMPLES
Inventor
Sadanori Ishida
禎則 石田
Yukio Komura
幸夫 香村
Takuya Nishimoto
卓矢 西本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Furukawa Electric Co Ltd
Original Assignee
Furukawa Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Furukawa Electric Co Ltd filed Critical Furukawa Electric Co Ltd
Priority to JP62325748A priority Critical patent/JPH01168021A/ja
Priority to US07/368,312 priority patent/US4991542A/en
Priority to PCT/JP1988/001043 priority patent/WO1989003587A1/ja
Priority to KR1019890700595A priority patent/KR930003136B1/ko
Priority to EP88908981A priority patent/EP0336979B1/en
Publication of JPH01168021A publication Critical patent/JPH01168021A/ja
Publication of JPH0517698B2 publication Critical patent/JPH0517698B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP62325748A 1987-10-14 1987-12-23 アウターワークホルダー Granted JPH01168021A (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP62325748A JPH01168021A (ja) 1987-12-23 1987-12-23 アウターワークホルダー
US07/368,312 US4991542A (en) 1987-10-14 1988-10-14 Method of forming a thin film by plasma CVD and apapratus for forming a thin film
PCT/JP1988/001043 WO1989003587A1 (en) 1987-10-14 1988-10-14 Method and apparatus for thin film formation by plasma cvd
KR1019890700595A KR930003136B1 (ko) 1987-10-14 1988-10-14 프라즈마 cvd에 의한 박막 형성장치
EP88908981A EP0336979B1 (en) 1987-10-14 1988-10-14 Apparatus for thin film formation by plasma cvd

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62325748A JPH01168021A (ja) 1987-12-23 1987-12-23 アウターワークホルダー

Publications (2)

Publication Number Publication Date
JPH01168021A true JPH01168021A (ja) 1989-07-03
JPH0517698B2 JPH0517698B2 (enEXAMPLES) 1993-03-09

Family

ID=18180206

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62325748A Granted JPH01168021A (ja) 1987-10-14 1987-12-23 アウターワークホルダー

Country Status (1)

Country Link
JP (1) JPH01168021A (enEXAMPLES)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100306824B1 (ko) * 1998-05-06 2001-11-30 윤종용 화학적기계적평탄화기계를위한웨이퍼홀더
JP2002093722A (ja) * 2000-09-14 2002-03-29 Mitsubishi Electric Corp プラズマｃｖｄ装置、薄膜形成方法および太陽電池の製造方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100306824B1 (ko) * 1998-05-06 2001-11-30 윤종용 화학적기계적평탄화기계를위한웨이퍼홀더
JP2002093722A (ja) * 2000-09-14 2002-03-29 Mitsubishi Electric Corp プラズマｃｖｄ装置、薄膜形成方法および太陽電池の製造方法

Also Published As

Publication number Publication date
JPH0517698B2 (enEXAMPLES) 1993-03-09

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