JPH01167211A - Diamond-like carbon film and production thereof - Google Patents

Diamond-like carbon film and production thereof

Info

Publication number
JPH01167211A
JPH01167211A JP32404887A JP32404887A JPH01167211A JP H01167211 A JPH01167211 A JP H01167211A JP 32404887 A JP32404887 A JP 32404887A JP 32404887 A JP32404887 A JP 32404887A JP H01167211 A JPH01167211 A JP H01167211A
Authority
JP
Grant status
Application
Patent type
Prior art keywords
layer
diamond
carbon
film
carbon film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP32404887A
Inventor
Hiroshi Miyadera
Yukio Saito
Yasushi Sato
Hideaki Tanaka
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date

Links

Abstract

PURPOSE: To lower the film stress and improve the surface-smoothness of a diamond-like carbon film, by constituting the diamond-like carbon film with a layer containing large amount of amorphous carbon and a layer having low amorphous carbon content.
CONSTITUTION: The diamond-like film is composed of (A) a diamond-like carbon layer having high amorphous carbon content and (B) a diamond-like carbon layer having low amorphous carbon content. Although the layer A has excellent surface smoothness, it has poor hardness, light-transmittance and electrical resistivity compared with the layer B. On the contrary, the layer B has high internal stress and rough surface, however, it has excellent hardness, light- transmittance and electrical resistivity compared with the layer A. When the layers A and B are alternately deposited in layers placing the layer A at the top, the internal stress in the layer B is absorbed by the layer A and the surface smoothness can be improved. The carbon film can be produced by periodically varying the reaction pressure in the vapor-phase synthesis of carbon film.
COPYRIGHT: (C)1989,JPO&Japio
JP32404887A 1987-12-23 1987-12-23 Diamond-like carbon film and production thereof Pending JPH01167211A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP32404887A JPH01167211A (en) 1987-12-23 1987-12-23 Diamond-like carbon film and production thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP32404887A JPH01167211A (en) 1987-12-23 1987-12-23 Diamond-like carbon film and production thereof

Publications (1)

Publication Number Publication Date
JPH01167211A true true JPH01167211A (en) 1989-06-30

Family

ID=18161570

Family Applications (1)

Application Number Title Priority Date Filing Date
JP32404887A Pending JPH01167211A (en) 1987-12-23 1987-12-23 Diamond-like carbon film and production thereof

Country Status (1)

Country Link
JP (1) JPH01167211A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5135730A (en) * 1990-03-28 1992-08-04 Kabushiki Kaisha Kobe Seiko Sho Method and apparatus for synthesizing diamond by combustion
US5455081A (en) * 1990-09-25 1995-10-03 Nippon Steel Corporation Process for coating diamond-like carbon film and coated thin strip
JP2009185314A (en) * 2008-02-04 2009-08-20 Meiji Univ Apparatus for producing dlc film, member therewith, and production method therefor
JP2010269944A (en) * 2009-05-19 2010-12-02 Nippon Telegr & Teleph Corp <Ntt> Method and apparatus for producing graphite thin film
US7947372B2 (en) * 2005-08-18 2011-05-24 Sulzer Metaplas Gmbh Substrate coated with a layered structure comprising a tetrahedral carbon layer and a softer outer layer
JP2013163600A (en) * 2012-02-09 2013-08-22 Nippon Telegr & Teleph Corp <Ntt> Method for producing graphite thin film

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5135730A (en) * 1990-03-28 1992-08-04 Kabushiki Kaisha Kobe Seiko Sho Method and apparatus for synthesizing diamond by combustion
US5455081A (en) * 1990-09-25 1995-10-03 Nippon Steel Corporation Process for coating diamond-like carbon film and coated thin strip
US7947372B2 (en) * 2005-08-18 2011-05-24 Sulzer Metaplas Gmbh Substrate coated with a layered structure comprising a tetrahedral carbon layer and a softer outer layer
JP2009185314A (en) * 2008-02-04 2009-08-20 Meiji Univ Apparatus for producing dlc film, member therewith, and production method therefor
JP2010269944A (en) * 2009-05-19 2010-12-02 Nippon Telegr & Teleph Corp <Ntt> Method and apparatus for producing graphite thin film
JP2013163600A (en) * 2012-02-09 2013-08-22 Nippon Telegr & Teleph Corp <Ntt> Method for producing graphite thin film

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