JPH01167050U - - Google Patents
Info
- Publication number
- JPH01167050U JPH01167050U JP6363688U JP6363688U JPH01167050U JP H01167050 U JPH01167050 U JP H01167050U JP 6363688 U JP6363688 U JP 6363688U JP 6363688 U JP6363688 U JP 6363688U JP H01167050 U JPH01167050 U JP H01167050U
- Authority
- JP
- Japan
- Prior art keywords
- base
- top plate
- wafer
- support
- entrance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 claims 10
- 230000002093 peripheral effect Effects 0.000 claims 1
- 230000003014 reinforcing effect Effects 0.000 claims 1
- 230000002787 reinforcement Effects 0.000 description 2
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6363688U JPH01167050U (US07576130-20090818-C00114.png) | 1988-05-14 | 1988-05-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6363688U JPH01167050U (US07576130-20090818-C00114.png) | 1988-05-14 | 1988-05-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01167050U true JPH01167050U (US07576130-20090818-C00114.png) | 1989-11-22 |
Family
ID=31289130
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6363688U Pending JPH01167050U (US07576130-20090818-C00114.png) | 1988-05-14 | 1988-05-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01167050U (US07576130-20090818-C00114.png) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009182332A (ja) * | 2008-01-30 | 2009-08-13 | Asm Internatl Nv | ウェハボート |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6117730B2 (US07576130-20090818-C00114.png) * | 1975-12-15 | 1986-05-09 | Ricoh Kk | |
| JPS6233315U (US07576130-20090818-C00114.png) * | 1985-08-14 | 1987-02-27 | ||
| JPS6228437B2 (US07576130-20090818-C00114.png) * | 1979-12-13 | 1987-06-19 | Hitachi Ltd |
-
1988
- 1988-05-14 JP JP6363688U patent/JPH01167050U/ja active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6117730B2 (US07576130-20090818-C00114.png) * | 1975-12-15 | 1986-05-09 | Ricoh Kk | |
| JPS6228437B2 (US07576130-20090818-C00114.png) * | 1979-12-13 | 1987-06-19 | Hitachi Ltd | |
| JPS6233315U (US07576130-20090818-C00114.png) * | 1985-08-14 | 1987-02-27 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009182332A (ja) * | 2008-01-30 | 2009-08-13 | Asm Internatl Nv | ウェハボート |
