JPH01165629U - - Google Patents
Info
- Publication number
- JPH01165629U JPH01165629U JP6187488U JP6187488U JPH01165629U JP H01165629 U JPH01165629 U JP H01165629U JP 6187488 U JP6187488 U JP 6187488U JP 6187488 U JP6187488 U JP 6187488U JP H01165629 U JPH01165629 U JP H01165629U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- processing tank
- robot
- tank
- transfer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 22
- 238000012545 processing Methods 0.000 claims description 11
- 238000004140 cleaning Methods 0.000 claims description 5
- 238000012993 chemical processing Methods 0.000 claims description 4
- 238000001035 drying Methods 0.000 claims description 3
- 238000007654 immersion Methods 0.000 claims description 3
- 239000000126 substance Substances 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6187488U JPH01165629U (enExample) | 1988-05-10 | 1988-05-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6187488U JPH01165629U (enExample) | 1988-05-10 | 1988-05-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01165629U true JPH01165629U (enExample) | 1989-11-20 |
Family
ID=31287519
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6187488U Pending JPH01165629U (enExample) | 1988-05-10 | 1988-05-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01165629U (enExample) |
-
1988
- 1988-05-10 JP JP6187488U patent/JPH01165629U/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR960002616A (ko) | 기판표면 처리장치 및 기판표면 처리방법 | |
| JPS5928036Y2 (ja) | 化学エツチング処理装置 | |
| JPH10193551A (ja) | グラビア製版工場 | |
| JPH01165629U (enExample) | ||
| WO2004075285A1 (ja) | 基板処理装置 | |
| JP2864326B2 (ja) | 基板洗浄処理装置 | |
| JPS61194198A (ja) | 表面処理に於ける被処理物の移送装置 | |
| DE3863279D1 (de) | Verfahren zum automatischen bearbeiten von kaeselaiben und maschine zur durchfuehrung des verfahrens. | |
| JPS61249581A (ja) | 洗浄装置 | |
| KR940008022A (ko) | 기판처리장치 | |
| JPS5845368U (ja) | 管状部材酸洗設備における管状部材洗浄装置 | |
| JPS61155107A (ja) | 基板収納装置 | |
| JPH0257063U (enExample) | ||
| JP2864376B2 (ja) | 基板処理装置 | |
| JPH0610686Y2 (ja) | ウエハ移し替装置 | |
| JPS6243028A (ja) | 電子銃用カソ−ドヒ−タの絶縁膜形成方法 | |
| JPH0234823Y2 (enExample) | ||
| JPH059102Y2 (enExample) | ||
| JPH06278803A (ja) | 基板搬送装置 | |
| JPH0180934U (enExample) | ||
| JPS59219984A (ja) | Ｉｃ用全自動はんだ付け装置 | |
| JPH0338636U (enExample) | ||
| JPH0311672Y2 (enExample) | ||
| JPH0249216Y2 (enExample) | ||
| JP3628864B2 (ja) | 基板処理装置 |