JPH01163534U - - Google Patents

Info

Publication number
JPH01163534U
JPH01163534U JP5853988U JP5853988U JPH01163534U JP H01163534 U JPH01163534 U JP H01163534U JP 5853988 U JP5853988 U JP 5853988U JP 5853988 U JP5853988 U JP 5853988U JP H01163534 U JPH01163534 U JP H01163534U
Authority
JP
Japan
Prior art keywords
gas
module
hollow fiber
supply device
water vapor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5853988U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5853988U priority Critical patent/JPH01163534U/ja
Publication of JPH01163534U publication Critical patent/JPH01163534U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Pipeline Systems (AREA)
JP5853988U 1988-05-02 1988-05-02 Pending JPH01163534U (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5853988U JPH01163534U (cs) 1988-05-02 1988-05-02

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5853988U JPH01163534U (cs) 1988-05-02 1988-05-02

Publications (1)

Publication Number Publication Date
JPH01163534U true JPH01163534U (cs) 1989-11-15

Family

ID=31284344

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5853988U Pending JPH01163534U (cs) 1988-05-02 1988-05-02

Country Status (1)

Country Link
JP (1) JPH01163534U (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003042395A (ja) * 2001-07-26 2003-02-13 Shin Etsu Handotai Co Ltd ガス供給方法およびガス供給装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5940199A (ja) * 1982-08-27 1984-03-05 ヘルマン　ヤ−ン 閉空間内に存在する大気と同一空間内にあるガス状物質との混合を防止又は禁止する方法
JPS62273028A (ja) * 1986-05-20 1987-11-27 Asahi Chem Ind Co Ltd ガスの除湿方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5940199A (ja) * 1982-08-27 1984-03-05 ヘルマン　ヤ−ン 閉空間内に存在する大気と同一空間内にあるガス状物質との混合を防止又は禁止する方法
JPS62273028A (ja) * 1986-05-20 1987-11-27 Asahi Chem Ind Co Ltd ガスの除湿方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003042395A (ja) * 2001-07-26 2003-02-13 Shin Etsu Handotai Co Ltd ガス供給方法およびガス供給装置

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