JPH01162341A - Semiconductor resin-sealed device - Google Patents

Abstract

PURPOSE:To dispense with a work for confirming a vacuum gauge during a resin sealing process by a method wherein, after the interior of a metal mold is sealed, the interior is evacuated for a constant time and the degree of vacuum reached at that time is compared with a set degree of vacuum to decide whether there is an abnormality or not. CONSTITUTION:When a metal mold is brought into a state that the metal mold is clamped, a clamping detector 4 outputs a signal and a solenoid valve 2 is opened by a vacuum control means 52 to start an evacuation in the metal mold. The degree of vacuum in this metal mold is detected by a vacuum gauge 3 and the measured value is inputted in a decision means A53. The means A 53 decides whether the degree of vacuum reached a setpoint within a previously set constant time and in case the degree of vacuum reached the setpoint, a plunger 1b is driven to pour a sealing resin. In case the degree of vacuum does not reach the setpoint, a display signal is outputted to an alarm display A6 and at the same time, a signal for stopping an operation is outputted to the means 52.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an improvement in a semiconductor resin encapsulation device for encapsulating semiconductors such as ICs with resin.

[Conventional technology]

FIG. 8 is a block diagram showing a conventional semiconductor resin encapsulation device disclosed in, for example, Japanese Patent Laid-Open No. 61-41134.

In the figure, (1) is a resin sealing press, (1a) is an upper platen, and has a resin injection plunger (1b) at the top. (1c) is a movable platen that can move up and down, and is loosely fitted in a plurality of guide bars (not shown) that fix the upper platen (1a) and the lower platen (not shown) so that it can move up and down. . (1d) is the upper mold and the upper platen (1a)
is fixed. (1e) The moving platen (
IC), and the upper gold m (] d) - the lower gold m (l
e) Both are equipped with a resin material such as a Q IJ tank (not shown). (2) is a vacuum device, (2a) is a solenoid valve, (2b
) is a filter, (2C) is a vacuum tank and an empty pump (
The solenoid valve (2d) is provided for the purpose of leveling out load fluctuations in order to minimize the capacity of
) and a filter (2b), and are connected to the upper mold (1d) or the lower mold (1e) by piping. (3) is a vacuum gauge arranged and connected to the upper mold (1d) or the lower mold W (le).

Next, the operation will be explained. When the movable platen (IC) rises to the point where the an of the stopper die (1d) and the lower die (1e) touch, the solenoid valve (2a) is opened and the vacuum pump (2
By the action of d), the air in the mold mating portion is drawn toward the vacuum tank (2C), which is controlled at a predetermined vacuum pressure, resulting in a negative pressure state. Here - check the degree of vacuum of the vacuum gauge (3),
Once a predetermined degree of vacuum is reached, one solenoid valve (2a) is closed. After that, the sealing resin (
(not shown). By repeating this operation, I
Perform resin sealing of C.

[Problems to be solved by the invention] Since the conventional device is configured as described above, it is necessary to check the vacuum level of the vacuum gauge each time to check whether the vacuum pressure suitable for resin sealing has been reached. Not only does this method have to be checked, but it also has problems such as poor reliability in resin sealing work, as it may indicate a normal vacuum level even if there is a leak in the piping system. there were.

This invention has been developed to solve the above-mentioned problems, and aims to provide a semiconductor resin encapsulation device that can facilitate resin encapsulation work and improve reliability. shall be.

[Means for Solving the Problems] The semiconductor resin encapsulation device according to the present invention is a half-wafer mold sealing method in which a plunger is driven to inject resin into a cavity after the inside of a mold is evacuated. After the inside of the mold is sealed, the vacuum control means evacuates the inside of the mold, and after this vacuum control means starts evacuation, the set degree of vacuum is reached within a certain period of time. The figure is a top view of a determining means that drives the plunger when the target reaches the target and outputs an abnormality display signal when the target does not reach the target.

Furthermore, a semiconductor resin encapsulation device according to another origin of the present invention is
In a semiconductor resin sealing device that injects resin into a cavity by driving a plunger, after the inside of the mold is evacuated, after the mold is sealed, there is a vacuum control means that evacuates the inside of the mold. After the vacuum braking means starts evacuation, the degree of vacuum achieved within the first predetermined time is compared with the first setting p and the empty leg, and if it is determined to be an abnormal value, the first setting outputs an abnormality display signal. 1. Judgment means - When this first judgment means judges that it is a normal value, it compares the achieved vacuum degree within a second fixed period with the second set vacuum degree and reaches the above-mentioned second set vacuum degree. The device is equipped with a second determining means that drives the plunger when the target is reached, and outputs an abnormality display signal when the plunger has not reached the target.

[Function] After sealing the inside of a mold, the half-body resin sealing device according to the present invention evacuates the inside of the mold for a certain period of time.The vacuum level reached at that time is compared with the set vacuum level to determine whether it is normal or abnormal. This eliminates the need to check the vacuum gauge, and also allows you to confirm that the equipment is operating normally.

In addition, in another invention of this invention, after confirming the vacuum level reached by the first child, the vacuum is further evacuated for a certain period of time and then the achieved trueness level is checked once again, so that abnormalities in the vacuum system can be detected early and reliably. can.

[Embodiment of the Invention] An embodiment of the invention will be described below with reference to FIGS. 1 and 2. In the figure, - (30) indicates when the degree of vacuum between the upper mold (1d) and lower mold (1e) reaches a predetermined value (the vacuum gauge - (4) that outputs this signal is measured by a strain cage, etc.). A mold clamping detector (5) detects when the clamping mold (1d) and the lower mold (1e) are clamped. IC), plunger (1
b), a control device for driving and controlling the solenoid valve (1b), etc.;
51) is a timer A- (521) which starts when the mold clamping detector (4) outputs a mold clamping state signal (521 opens the solenoid valve (2a) based on the output signal of the mold clamping detector (4), The vacuum control means (rotation) that starts evacuation inside the mold (1d) and the lower mold (1e) is based on the output signal of the mold clamping detector (4), and the output signal of the vacuum gauge (30) is determined. Judgment means A determines whether or not the set value has been reached within a certain time. When the set value is reached within a certain time, the plunger (1b) is driven, and when the set value is not reached (this is an alarm display A (6)). It outputs a display signal to the vacuum control means (52) and also outputs a signal for stopping the operation of the vacuum control means (52).

Next, the operation will be explained. Upper mold (1d) and lower mold (
When the mold is in the mold clamping state, the mold clamping detector (4) outputs a signal. At this point, since the vacuum control means (521) opens the solenoid valve (2a), as shown in step (7) of the flowchart in FIG. - In the unlikely event that both molds (1d) (1e
, ) is detected by the vacuum gauge (3), and at the same time as the mold clamping detector (4) outputs the mold clamping signal, the determining means Aω) detects the signal from the vacuum gauge (3). When input, timer A T511 executes step (8) of flowchart (8).
8) is set as shown below. In the determining means, it is determined in step (9) whether the degree of vacuum has reached the set value P1, and when the degree of vacuum reaches the set value P1, the plunger (1b) is driven as in step 00).

In addition, in curve A of Fig. 4, when the degree of vacuum has not reached the set value P1, it is determined whether or not timer A (5) is set up in the step circle, that is, whether it is within Tl in Fig. 4. If it is within T1, for example T2, step (
9) will be repeated. Here, set value P1 at -T3
When it reaches , it moves to step (1υ). By the way, the fourth
In the case of curve B in the figure, at -T4, the set vacuum level Pit has not been reached within the specified time Tl, and since step a, the alarm display A (6) displays an alarm. As shown in (13), the vacuum control means (5) outputs a signal to stop the apparatus.Therefore, the operator inspects the abnormal state here and carries out necessary processing.

Next, another embodiment of the present invention will be described with reference to FIG.

In the figure, timer B starts with the output signal of the mold clamping detector (4), and is set to a longer time than timer A (51+).
) outputs a mold clamping signal, and when timer B (Incorporated) is set, judgment means B judges whether the degree of vacuum has reached the set value P2 within one ITs, and within a fixed time T5. When the set value P2 is not reached, a display signal is output to alarm display B (56+).

In the configuration as described above, the timer B (541 is set in step I of the flowchart in FIG. 6, and the judgment means B (541) is determined in step 05 as to whether or not the set vacuum level P2 has been reached (T55). If the plunger (16) is determined to be reached, the plunger (16) is driven, and if the plunger (16) is not reached, the step (
], lil determines whether or not timer B is up, and if not, step (151) is not repeated.If time is up, an alarm is displayed at step aη.In other words, curve C in FIG. , timer B set time T
At T6 in 5, it is determined that -P2 has not been reached at 151, and the process moves to step 0ω.
In this step (16), it is determined that the time-up has not occurred, and step 05) is repeated. At T9, the degree of vacuum reached Pg within 15 hours, so one step (I
t]l, the plunger (1b) is driven.

On the other hand, in the case of a curve - even at T8, the degree of vacuum does not reach the set value P2, so a display signal is output at -step (an abnormality is determined at 161 - an alarm display screen at step 0η).

Therefore, it is the operator's turn to overhaul the device. In other words, it can be determined that the entire device is due for inspection.

〔Effect of the invention〕

As described above, in this invention, after the inside of the mold is evacuated, -
In a semiconductor resin sealing device that drives a plunger to inject resin into a cavity, after sealing the inside of the mold,
Vacuum control means for evacuating the inside of the mold; after this vacuum control means starts evacuation, the plunger is driven when the set vacuum level is reached within a predetermined time, and when the vacuum level is not reached, an abnormality display signal is output. Since the means is provided, there is no need to check the degree of vacuum during the resin sealing process - and it can be determined at all times that the device itself is operating normally, which has the effect of improving the reliability of the device.

Another invention of the present invention is a semiconductor resin sealing device that injects resin into a cavity by driving a plunger after evacuating the inside of a mold. Vacuum control means for evacuating the inside of the mold - After this vacuum control means starts summer evacuation, the degree of vacuum achieved within the first fixed time is compared with the first set degree of vacuum, and the value is determined to be an abnormal value. If the first judgment means determines that the value is normal, it compares the degree of vacuum reached within a second fixed time with the second set degree of vacuum, and Equipped with a second judgment means that drives the plunger when the second set vacuum degree has been reached, and outputs an abnormality display signal when the second set vacuum degree has not been reached, so that abnormalities in one vacuum system can be detected early.
Moreover, not only can the invention be reliably achieved and a highly reliable device obtained, but also the time for maintenance can be determined and serious failures of the device can be prevented.

[Brief explanation of the drawing]

Fig. 1 is a block diagram showing an embodiment of the present invention, Fig. 2 is a block diagram showing the overall configuration of the invention, Fig. 3 is its operation flowchart, Fig. 4 is its characteristic diagram, and Fig. 5 is its characteristic diagram. A block diagram showing another embodiment of the invention - FIG. 6 is an operation flowchart thereof, FIG. 7 is a characteristic diagram thereof, and FIG. 8 is a block diagram of a conventional device. In the figure - (1b) is a plunger, (2a) is a solenoid valve, (3) is a vacuum gauge, (4) is a mold clamping detector, (5) is a control device, and 6D is a timer A152 is a vacuum control means - ( (to) is the judgment means A, (6) is the alarm display A to (goods) is the timer B, and (to) is the judgment means 3 [is the alarm display B. Show parts.

Claims (2)

[Claims] (1) In a semiconductor resin encapsulation device that evacuates the inside of the mold and then drives a plunger to inject resin into the cavity, the inside of the mold is evacuated after the inside of the mold is sealed. A semiconductor resin encapsulation device comprising a braking means and a determining means for driving a plunger when a set degree of vacuum is reached within a predetermined time after the vacuum control means starts evacuation, and for outputting an abnormality display signal when the degree of vacuum is not reached. . (2) Vacuum control that vacuums the inside of the mold after sealing the mold in a semiconductor resin sealing device that injects resin into the cavity by driving a plunger after the inside of the mold is evacuated. means, after the vacuum control means starts evacuation, the degree of vacuum achieved within a first fixed time is compared with the first set degree of vacuum, and if it is determined that the value is an abnormal value, an abnormality display signal is outputted; When the first determining means determines that the value is normal, it compares the achieved vacuum level within a second fixed time with the second set vacuum level, and determines when the second set vacuum level is reached. A semiconductor resin encapsulation device comprising a second determining means that drives the plunger when the plunger has reached the target and outputs an abnormality display signal when the plunger has not reached the target.