JPH01161259U - - Google Patents
Info
- Publication number
- JPH01161259U JPH01161259U JP5530088U JP5530088U JPH01161259U JP H01161259 U JPH01161259 U JP H01161259U JP 5530088 U JP5530088 U JP 5530088U JP 5530088 U JP5530088 U JP 5530088U JP H01161259 U JPH01161259 U JP H01161259U
- Authority
- JP
- Japan
- Prior art keywords
- evaporation
- electron beam
- electron gun
- small electromagnetic
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010894 electron beam technology Methods 0.000 claims description 7
- 239000002184 metal Substances 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 4
- 238000007738 vacuum evaporation Methods 0.000 claims description 3
- 238000001704 evaporation Methods 0.000 claims 6
- 230000008020 evaporation Effects 0.000 claims 6
- 230000008021 deposition Effects 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 claims 1
- 238000007740 vapor deposition Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5530088U JPH01161259U (zh) | 1988-04-26 | 1988-04-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5530088U JPH01161259U (zh) | 1988-04-26 | 1988-04-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01161259U true JPH01161259U (zh) | 1989-11-09 |
Family
ID=31281200
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5530088U Pending JPH01161259U (zh) | 1988-04-26 | 1988-04-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01161259U (zh) |
-
1988
- 1988-04-26 JP JP5530088U patent/JPH01161259U/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| EP0758408B1 (en) | Rectangular vacuum-arc plasma source | |
| US5418348A (en) | Electron beam source assembly | |
| JPH01161259U (zh) | ||
| US4947404A (en) | Magnet structure for electron-beam heated evaporation source | |
| JP2648799B2 (ja) | 金属化合物を基板上に反応性蒸着するための方法及び装置 | |
| JPH04231458A (ja) | 電子ビーム蒸発源 | |
| JP3143801B2 (ja) | イオンプレーティング装置 | |
| JPH0189955U (zh) | ||
| JPH01129253U (zh) | ||
| JPS5690432A (en) | Production of magnetic recording medium | |
| JP3961158B2 (ja) | 電子ビーム蒸発装置 | |
| JP3741160B2 (ja) | 連続真空蒸着装置および連続真空蒸着方法 | |
| JPH0630843Y2 (ja) | 金属の蒸発装置 | |
| JPS6254076A (ja) | イオンプレ−テイング装置 | |
| JPH0481960U (zh) | ||
| JPH0322063U (zh) | ||
| JPH0329770Y2 (zh) | ||
| JPH0762240B2 (ja) | 電子ビーム蒸着用電子銃 | |
| JPS61194172A (ja) | 蒸着装置用電子ビ−ム加熱装置 | |
| JPS63149961U (zh) | ||
| JPH0261130B2 (zh) | ||
| JPS63110563U (zh) | ||
| JPH0120494B2 (zh) | ||
| JPS62136564U (zh) | ||
| JPH0336519Y2 (zh) |