JPH01161259U - - Google Patents

Info

Publication number

JPH01161259U

JPH01161259U JP5530088U JP5530088U JPH01161259U JP H01161259 U JPH01161259 U JP H01161259U JP 5530088 U JP5530088 U JP 5530088U JP 5530088 U JP5530088 U JP 5530088U JP H01161259 U JPH01161259 U JP H01161259U

Authority

JP

Japan

Prior art keywords

evaporation

electron beam

electron gun

small electromagnetic

substrate

Prior art date

1988-04-26

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000010894 electron beam technology Methods 0.000 claims description 7
• 239000002184 metal Substances 0.000 claims description 4
• 239000000758 substrate Substances 0.000 claims description 4
• 238000007738 vacuum evaporation Methods 0.000 claims description 3
• 238000001704 evaporation Methods 0.000 claims 6
• 230000008020 evaporation Effects 0.000 claims 6
• 230000008021 deposition Effects 0.000 claims 1
• 238000010438 heat treatment Methods 0.000 claims 1
• 238000007740 vapor deposition Methods 0.000 description 4
• 238000010586 diagram Methods 0.000 description 1
• 238000007789 sealing Methods 0.000 description 1