JPH01160829U - - Google Patents
Info
- Publication number
- JPH01160829U JPH01160829U JP4981488U JP4981488U JPH01160829U JP H01160829 U JPH01160829 U JP H01160829U JP 4981488 U JP4981488 U JP 4981488U JP 4981488 U JP4981488 U JP 4981488U JP H01160829 U JPH01160829 U JP H01160829U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor substrate
- short wavelength
- wavelength light
- support mechanism
- reticle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 7
- 239000004065 semiconductor Substances 0.000 claims description 5
- 230000003287 optical effect Effects 0.000 claims description 4
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4981488U JPH01160829U (th) | 1988-04-13 | 1988-04-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4981488U JPH01160829U (th) | 1988-04-13 | 1988-04-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01160829U true JPH01160829U (th) | 1989-11-08 |
Family
ID=31275898
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4981488U Pending JPH01160829U (th) | 1988-04-13 | 1988-04-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01160829U (th) |
-
1988
- 1988-04-13 JP JP4981488U patent/JPH01160829U/ja active Pending
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