JPH01145125U - - Google Patents
Info
- Publication number
- JPH01145125U JPH01145125U JP4055888U JP4055888U JPH01145125U JP H01145125 U JPH01145125 U JP H01145125U JP 4055888 U JP4055888 U JP 4055888U JP 4055888 U JP4055888 U JP 4055888U JP H01145125 U JPH01145125 U JP H01145125U
- Authority
- JP
- Japan
- Prior art keywords
- photomask
- sample
- light source
- lens group
- pattern
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011521 glass Substances 0.000 claims 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 claims 1
- 229910052753 mercury Inorganic materials 0.000 claims 1
- 229920002120 photoresistant polymer Polymers 0.000 claims 1
- 239000002985 plastic film Substances 0.000 claims 1
- 229920006255 plastic film Polymers 0.000 claims 1
- 229910052724 xenon Inorganic materials 0.000 claims 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4055888U JPH01145125U (th) | 1988-03-28 | 1988-03-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4055888U JPH01145125U (th) | 1988-03-28 | 1988-03-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01145125U true JPH01145125U (th) | 1989-10-05 |
Family
ID=31267027
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4055888U Pending JPH01145125U (th) | 1988-03-28 | 1988-03-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01145125U (th) |
-
1988
- 1988-03-28 JP JP4055888U patent/JPH01145125U/ja active Pending