JPH01158942U - - Google Patents
Info
- Publication number
- JPH01158942U JPH01158942U JP3564689U JP3564689U JPH01158942U JP H01158942 U JPH01158942 U JP H01158942U JP 3564689 U JP3564689 U JP 3564689U JP 3564689 U JP3564689 U JP 3564689U JP H01158942 U JPH01158942 U JP H01158942U
- Authority
- JP
- Japan
- Prior art keywords
- inert gas
- treatment chamber
- gas
- surface treatment
- supply pipe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011261 inert gas Substances 0.000 claims description 7
- 238000004381 surface treatment Methods 0.000 claims description 4
- 239000007789 gas Substances 0.000 claims description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 1
- 229910052782 aluminium Inorganic materials 0.000 claims 1
- 238000004868 gas analysis Methods 0.000 claims 1
- 239000012535 impurity Substances 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 239000002023 wood Substances 0.000 claims 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Sampling And Sample Adjustment (AREA)
Description
第１図はこの考案の装置の原理を説明する図、
第２図はこの考案の装置を具体的に示す正面図、
第３図は同平面図である。
１……放電洗浄室（表面処理室）、１０……ヘ
リウムガス供給装置（不活性ガス供給装置）、１
８……供給管、１９……不活性ガスボンベ、２０
……トラツプ、Ｓ……試料。
Figure 1 is a diagram explaining the principle of the device of this invention.
Figure 2 is a front view specifically showing the device of this invention;
FIG. 3 is a plan view of the same. 1... Discharge cleaning chamber (surface treatment chamber), 10... Helium gas supply device (inert gas supply device), 1
8... Supply pipe, 19... Inert gas cylinder, 20
...Trap, S...sample.
Claims (1)
導入し、試料の表面から表面ガスを除去する処理
を施す表面処理室を備えたアルミニウム材中のガ
ス分折装置であつて、 表面処理室に不活性ガス供給装置が設けられ、
不活性ガス供給装置が、供給管を介して表面処理
室に接続された不活性ガスボンベと、供給管の途
中に設けられ、かつ不活性ガスに含まれている不
純物を除去するトラツプとよりなるアルミニウム
材中のガス分析装置。[Scope of Claim for Utility Model Registration] A gas spectrometer in aluminum material equipped with a surface treatment chamber that creates a high vacuum inside and introduces an inert gas to remove surface gas from the surface of the sample. An inert gas supply device is installed in the surface treatment chamber,
The inert gas supply device consists of an inert gas cylinder connected to the surface treatment chamber via a supply pipe, and a trap installed in the middle of the supply pipe to remove impurities contained in the inert gas. Gas analysis device in wood.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3564689U JPH01158942U (en) | 1989-03-28 | 1989-03-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3564689U JPH01158942U (en) | 1989-03-28 | 1989-03-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01158942U true JPH01158942U (en) | 1989-11-02 |
Family
ID=31262290
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3564689U Pending JPH01158942U (en) | 1989-03-28 | 1989-03-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01158942U (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59183368A (en) * | 1983-04-01 | 1984-10-18 | Sumitomo Metal Ind Ltd | Analysis of gas in metal |
| JPS60122741A (en) * | 1983-12-08 | 1985-07-01 | Hitachi Cable Ltd | Manufacture of parent material for optical fiber |
-
1989
- 1989-03-28 JP JP3564689U patent/JPH01158942U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59183368A (en) * | 1983-04-01 | 1984-10-18 | Sumitomo Metal Ind Ltd | Analysis of gas in metal |
| JPS60122741A (en) * | 1983-12-08 | 1985-07-01 | Hitachi Cable Ltd | Manufacture of parent material for optical fiber |