JPH01158940U - - Google Patents

Info

Publication number
JPH01158940U
JPH01158940U JP5358188U JP5358188U JPH01158940U JP H01158940 U JPH01158940 U JP H01158940U JP 5358188 U JP5358188 U JP 5358188U JP 5358188 U JP5358188 U JP 5358188U JP H01158940 U JPH01158940 U JP H01158940U
Authority
JP
Japan
Prior art keywords
inspected
vacuum chamber
supplies
cascade
arm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5358188U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5358188U priority Critical patent/JPH01158940U/ja
Publication of JPH01158940U publication Critical patent/JPH01158940U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Examining Or Testing Airtightness (AREA)
JP5358188U 1988-04-22 1988-04-22 Pending JPH01158940U (en, 2012)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5358188U JPH01158940U (en, 2012) 1988-04-22 1988-04-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5358188U JPH01158940U (en, 2012) 1988-04-22 1988-04-22

Publications (1)

Publication Number Publication Date
JPH01158940U true JPH01158940U (en, 2012) 1989-11-02

Family

ID=31279550

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5358188U Pending JPH01158940U (en, 2012) 1988-04-22 1988-04-22

Country Status (1)

Country Link
JP (1) JPH01158940U (en, 2012)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59133445A (ja) * 1983-01-20 1984-07-31 Furukawa Seisakusho:Kk 包装製品のピンホール検出装置
JPS6032128A (ja) * 1983-07-30 1985-02-19 Konishiroku Photo Ind Co Ltd 磁気記録媒体の製造方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59133445A (ja) * 1983-01-20 1984-07-31 Furukawa Seisakusho:Kk 包装製品のピンホール検出装置
JPS6032128A (ja) * 1983-07-30 1985-02-19 Konishiroku Photo Ind Co Ltd 磁気記録媒体の製造方法

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