JPH01158573U - - Google Patents

Info

Publication number
JPH01158573U
JPH01158573U JP5059388U JP5059388U JPH01158573U JP H01158573 U JPH01158573 U JP H01158573U JP 5059388 U JP5059388 U JP 5059388U JP 5059388 U JP5059388 U JP 5059388U JP H01158573 U JPH01158573 U JP H01158573U
Authority
JP
Japan
Prior art keywords
discharge chamber
magnetic circuit
ion
electron impact
electrons
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5059388U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5059388U priority Critical patent/JPH01158573U/ja
Publication of JPH01158573U publication Critical patent/JPH01158573U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
  • Plasma Technology (AREA)
JP5059388U 1988-04-15 1988-04-15 Pending JPH01158573U (US06650917-20031118-M00005.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5059388U JPH01158573U (US06650917-20031118-M00005.png) 1988-04-15 1988-04-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5059388U JPH01158573U (US06650917-20031118-M00005.png) 1988-04-15 1988-04-15

Publications (1)

Publication Number Publication Date
JPH01158573U true JPH01158573U (US06650917-20031118-M00005.png) 1989-11-01

Family

ID=31276631

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5059388U Pending JPH01158573U (US06650917-20031118-M00005.png) 1988-04-15 1988-04-15

Country Status (1)

Country Link
JP (1) JPH01158573U (US06650917-20031118-M00005.png)

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