JPH01157152U - - Google Patents

Info

Publication number
JPH01157152U
JPH01157152U JP5288488U JP5288488U JPH01157152U JP H01157152 U JPH01157152 U JP H01157152U JP 5288488 U JP5288488 U JP 5288488U JP 5288488 U JP5288488 U JP 5288488U JP H01157152 U JPH01157152 U JP H01157152U
Authority
JP
Japan
Prior art keywords
arc electrode
outer circumferential
circumferential surface
vacuum
arc
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5288488U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0619564Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988052884U priority Critical patent/JPH0619564Y2/ja
Publication of JPH01157152U publication Critical patent/JPH01157152U/ja
Application granted granted Critical
Publication of JPH0619564Y2 publication Critical patent/JPH0619564Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1988052884U 1988-04-19 1988-04-19 真空アーク放電型ｐｖｄ装置のアーク電極装置 Expired - Lifetime JPH0619564Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988052884U JPH0619564Y2 (ja) 1988-04-19 1988-04-19 真空アーク放電型ｐｖｄ装置のアーク電極装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988052884U JPH0619564Y2 (ja) 1988-04-19 1988-04-19 真空アーク放電型ｐｖｄ装置のアーク電極装置

Publications (2)

Publication Number Publication Date
JPH01157152U true JPH01157152U (US07166745-20070123-C00016.png) 1989-10-30
JPH0619564Y2 JPH0619564Y2 (ja) 1994-05-25

Family

ID=31278879

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988052884U Expired - Lifetime JPH0619564Y2 (ja) 1988-04-19 1988-04-19 真空アーク放電型ｐｖｄ装置のアーク電極装置

Country Status (1)

Country Link
JP (1) JPH0619564Y2 (US07166745-20070123-C00016.png)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59208070A (ja) * 1983-05-09 1984-11-26 ヴアツク・テツク・システムズ・インコ−ポレ−テツド ア−ク安定化装置
JPS6210266A (ja) * 1985-07-06 1987-01-19 Kobe Steel Ltd 蒸着装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59208070A (ja) * 1983-05-09 1984-11-26 ヴアツク・テツク・システムズ・インコ−ポレ−テツド ア−ク安定化装置
JPS6210266A (ja) * 1985-07-06 1987-01-19 Kobe Steel Ltd 蒸着装置

Also Published As

Publication number Publication date
JPH0619564Y2 (ja) 1994-05-25

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