JPH01156549U - - Google Patents
Info
- Publication number
- JPH01156549U JPH01156549U JP5240988U JP5240988U JPH01156549U JP H01156549 U JPH01156549 U JP H01156549U JP 5240988 U JP5240988 U JP 5240988U JP 5240988 U JP5240988 U JP 5240988U JP H01156549 U JPH01156549 U JP H01156549U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- suction
- exposure
- suctions
- contracted
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5240988U JPH01156549U (cs) | 1988-04-19 | 1988-04-19 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5240988U JPH01156549U (cs) | 1988-04-19 | 1988-04-19 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH01156549U true JPH01156549U (cs) | 1989-10-27 |
Family
ID=31278407
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5240988U Pending JPH01156549U (cs) | 1988-04-19 | 1988-04-19 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH01156549U (cs) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04290455A (ja) * | 1991-03-19 | 1992-10-15 | Hitachi Electron Eng Co Ltd | ウエハのプリアライメント方式 |
-
1988
- 1988-04-19 JP JP5240988U patent/JPH01156549U/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04290455A (ja) * | 1991-03-19 | 1992-10-15 | Hitachi Electron Eng Co Ltd | ウエハのプリアライメント方式 |
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