JPH01155901A - Solvent recovering apparatus - Google Patents
Solvent recovering apparatusInfo
- Publication number
- JPH01155901A JPH01155901A JP62314658A JP31465887A JPH01155901A JP H01155901 A JPH01155901 A JP H01155901A JP 62314658 A JP62314658 A JP 62314658A JP 31465887 A JP31465887 A JP 31465887A JP H01155901 A JPH01155901 A JP H01155901A
- Authority
- JP
- Japan
- Prior art keywords
- solvent
- vapor
- gas
- pressure
- cooling tower
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000002904 solvent Substances 0.000 title claims abstract description 54
- 238000001816 cooling Methods 0.000 claims abstract description 31
- 238000011084 recovery Methods 0.000 claims description 10
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 abstract description 45
- 238000001179 sorption measurement Methods 0.000 abstract description 16
- 229910052799 carbon Inorganic materials 0.000 abstract description 5
- 238000005406 washing Methods 0.000 abstract 3
- 230000006835 compression Effects 0.000 abstract 1
- 238000007906 compression Methods 0.000 abstract 1
- 238000007599 discharging Methods 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 239000007789 gas Substances 0.000 description 39
- 239000007788 liquid Substances 0.000 description 16
- 238000004140 cleaning Methods 0.000 description 14
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 description 11
- 230000001105 regulatory effect Effects 0.000 description 5
- 239000003507 refrigerant Substances 0.000 description 4
- 238000003915 air pollution Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000005057 refrigeration Methods 0.000 description 3
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 2
- 229910052801 chlorine Inorganic materials 0.000 description 2
- 239000000460 chlorine Substances 0.000 description 2
- 230000006837 decompression Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 230000001276 controlling effect Effects 0.000 description 1
- 238000003795 desorption Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000004821 distillation Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 239000012046 mixed solvent Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/10—Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working
Landscapes
- Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
- Coating Apparatus (AREA)
- Treating Waste Gases (AREA)
Abstract
Description
【発明の詳細な説明】
（イ）発明の分野
この発明は、例えば半導体や電子機器その他のワーク洗
浄に用いるＲ１１３および塩素系溶剤より発生したガス
を回収するような溶剤回収装置に関する。DETAILED DESCRIPTION OF THE INVENTION (a) Field of the Invention The present invention relates to a solvent recovery device for recovering gas generated from R113 and chlorine-based solvents used, for example, in cleaning semiconductors, electronic devices, and other workpieces.
（ロ）従来技術
従来、上述例の半導体や電子機器その他の各種ワークの
洗浄には、Ｒ１１３（ＣＣＪＩ２ＦＣＣｊＦ２、化学名
は１．１．２−トリクロル−１，２゜２−トリフルオル
エタン）や塩素系溶剤等が用いられているが、Ｒ１１３
および塩素系溶剤が洗浄中に溶剤ガスとして大気中に流
出し、大気汚染の要因となる。(B) Prior Art Conventionally, R113 (CCJI2FCCjF2, chemical name: 1.1.2-trichloro-1,2°2-trifluoroethane) and chlorine have been used to clean semiconductors, electronic devices, and other various workpieces as described above. Although R113-based solvents are used,
Also, chlorinated solvents leak into the atmosphere as solvent gas during cleaning, causing air pollution.
このような溶剤ガスの流出を防止し、同溶剤より発生し
たガスを回収するため、従来においては活性炭（アクテ
ィブカーボン）による吸着ロータを有する活性炭吸着装
置などの回収装置が用いられていたが、ガス吸着能力が
低いため装置が大型化し、また管理が煩雑なうえ、コス
ト高となり、加えてフロン洗浄機とのユニット化が困難
となる等の諸種の問題点を有していた。In order to prevent such outflow of solvent gas and recover the gas generated from the same solvent, recovery devices such as activated carbon adsorption devices with adsorption rotors using activated carbon have been used in the past. Due to the low adsorption capacity, the device becomes large, the management is complicated, the cost is high, and in addition, it is difficult to unitize with a fluorocarbon cleaning machine.
（ハ）発明の目的
この発明は、回収した溶剤ガスのガス濃度を高めて冷却
液化することで、濃度の薄いガスでも充分回収液化する
ことができて、回収能力の向上を図ると共に、装置の小
型化を図ることができる溶剤回収装置の提供を目的とす
る。(c) Purpose of the Invention This invention increases the gas concentration of the recovered solvent gas and liquefies it by cooling, thereby making it possible to sufficiently recover and liquefy even gas with a low concentration. The purpose of the present invention is to provide a solvent recovery device that can be downsized.
（ニ）発明の構成
この発明は、フロン等の溶剤を貯溜した溶剤槽のガス層
に、溶剤ガスを吸引する吸気ラインを接続し、この吸気
ラインに圧縮機を介して高圧冷却塔を接続すると共に、
上記平圧冷却塔には、溶剤より発生したガスを高圧下で
冷却液化する蒸発器を配設した溶剤回収装置であること
を特徴とする。(d) Structure of the Invention This invention connects an intake line for sucking solvent gas to the gas layer of a solvent tank storing solvents such as fluorocarbons, and connects a high-pressure cooling tower to this intake line via a compressor. With,
The flat pressure cooling tower is characterized by being a solvent recovery device equipped with an evaporator that cools and liquefies the gas generated from the solvent under high pressure.
（ホ）発明の作用
この発明によれば、溶剤槽から上方に流動して大気中に
流出しようとする溶剤より発生したガスは、圧縮機の駆
動により吸気ラインを介して吸引圧縮されて高濃度とな
り、このｔＳ濃度となったガスは高圧冷却塔内において
、蒸発器の作用で冷却液化される。(E) Effect of the Invention According to this invention, the gas generated by the solvent flowing upward from the solvent tank and attempting to flow out into the atmosphere is suctioned and compressed through the intake line by the drive of the compressor, and is concentrated to a high concentration. The gas having this tS concentration is cooled and liquefied by the action of the evaporator in the high-pressure cooling tower.
（へ）発明の効果
この結果、回収した溶剤ガスのガス濃度を高めて冷却液
化することができるので、濃度の薄いガスでも充分回収
液化することができて、回収能力の向上を図ると共に、
装置の小型化を図ることができる効果がある。(f) Effects of the invention As a result, the gas concentration of the recovered solvent gas can be increased and the gas can be cooled and liquefied, so even gas with a low concentration can be sufficiently recovered and liquefied, improving the recovery capacity and
This has the effect of making the device smaller.
また回収液化した液溶剤は再利用に供することができる
ので、溶剤消費囲の低減を図ることができると共に、溶
剤ガ、スによる大気汚染を防止することができる効果が
ある。Furthermore, since the recovered and liquefied liquid solvent can be reused, it is possible to reduce the amount of solvent consumed and to prevent air pollution caused by solvent gas and gas.
加えて、簡単な装置および配管を付加することで、例え
ばフロン洗浄装置に対して容易に取付けることができて
、ユニット化が可能となる効果がある。In addition, by adding a simple device and piping, it can be easily attached to, for example, a fluorocarbon cleaning device, making it possible to unitize the device.
（ト）発明の実施例
この発明の一実施例を以下図面に基づいて詳”ｒｆｉ＝
する。(G) Embodiment of the Invention An embodiment of the invention will be described in detail below based on the drawings.
do.
図面は溶剤回収装置を示し、例えば内部にＲ１１３等の
溶剤を貯溜したフロン洗浄機１を設け、このフロン洗浄
１１１１のフロンガス層上部に張架した冷却手段（冷ｕ
１コイルや冷却ジャケット等）の上側部には、溶剤ガス
を吸引する吸気ライン２を接続している。The drawing shows a solvent recovery device, for example, a fluorocarbon cleaning machine 1 that stores a solvent such as R113 inside, and a cooling means (cooling utensil) stretched over the fluorocarbon gas layer of this fluorocarbon cleaning 1111.
1 coil, cooling jacket, etc.) is connected to an intake line 2 for sucking the solvent gas.
この吸気ライン２には吸引ガスを圧縮して、ガス濃度を
高化する圧縮機３を介して高圧冷却塔４を接続すると共
に、この高圧冷却塔４内の略中火には、溶剤より発生し
たガスを高圧（たとえばプラス圧〜５Ｋｇ／ｄ）下で冷
却液化する第１蒸発器５を配設している。A high-pressure cooling tower 4 is connected to this intake line 2 via a compressor 3 that compresses the suction gas and increases the gas concentration. A first evaporator 5 is provided to cool and liquefy the gas under high pressure (for example, positive pressure to 5 kg/d).
この第１蒸発器５は冷凍サイクルの熱交換器で、Ｒ１１
、Ｒ１２、Ｒ２２等の冷媒を用いる冷凍機において、圧
縮機の吐出側に凝縮器、受液器、液ｉｆ磁弁、膨張機構
（膨張弁やキャピラリーチューブ）を介して上述の第１
蒸発器５を接続し、この第１蒸発器５の後位をアキュー
ムレータを介して圧縮機に接続して冷凍サイクルを構成
する。This first evaporator 5 is a heat exchanger of a refrigeration cycle, and R11
, R12, R22, etc., the above-mentioned first
An evaporator 5 is connected, and a downstream part of the first evaporator 5 is connected to a compressor via an accumulator to form a refrigeration cycle.
上述の冷凍サイクルは周知の如く、圧縮機の駆動により
、同圧縮機で圧縮され高圧となった冷媒が、凝縮器に送
られ、ここで液化して受液器に至った後に、この高圧冷
媒は液電磁弁を介して膨張機構に尊びかれ、この膨張機
構で絞り膨張されて低圧となった冷媒は上述の第１蒸発
器５に入り、周囲より熱を奪って蒸発して蒸発ガスとな
り、アキュムレータを介して再び圧縮機に吸い込まれる
。As is well known, in the above-mentioned refrigeration cycle, when the compressor is driven, the compressor compresses the refrigerant, which becomes high-pressure, and sends it to the condenser, where it is liquefied and reaches the receiver, after which the high-pressure refrigerant is The refrigerant is sent to the expansion mechanism via the liquid electromagnetic valve, and the refrigerant that has been throttled and expanded by the expansion mechanism to a low pressure enters the first evaporator 5, absorbs heat from the surroundings, and evaporates to become evaporated gas. It is sucked back into the compressor via the accumulator.
前述の高圧冷却塔４の液溶剤貯溜部位としての底部と、
フロン洗浄機１内の蒸溜ＷＩ（図示せず〉上部との間に
は、第１電磁弁６および第１液体ポンプ７を介設した第
１リターン路８を接続して、上述の第１蒸発器５で冷却
液化された液溶剤をフロン洗浄機１の所定部に還流すべ
く構成している。the bottom of the aforementioned high-pressure cooling tower 4 as a liquid solvent storage area;
A first return path 8 in which a first solenoid valve 6 and a first liquid pump 7 are interposed is connected between the upper part of the distillation WI (not shown) in the fluorocarbon washer 1, and the above-mentioned first evaporation The system is configured so that the liquid solvent cooled and liquefied in the vessel 5 is returned to a predetermined part of the fluorocarbon cleaning machine 1.
上述の高圧冷却塔４の上部には第１送気管９を介して高
圧活性炭吸着塔１０を接続している。A high-pressure activated carbon adsorption tower 10 is connected to the upper part of the above-mentioned high-pressure cooling tower 4 via a first air pipe 9.
この高圧活性炭吸着塔１０の内部中央にはアクティブカ
ーボン（ａｃｔｉｖａｔｅｄ ｃａｒｂｏｎ）による吸
着ロータなどの活性炭ＦＪＩＩ・・・を上下に離間して
複数層例えば合計３層配設し、かつ、これら活性炭層１
１．１１間にはヒートポンプ装置（図示せず）に接続し
た熱交換器１２．１２を配設している。In the center of the high-pressure activated carbon adsorption tower 10, a plurality of layers of activated carbon FJII, such as an adsorption rotor made of activated carbon, are arranged vertically apart, for example, three layers in total, and these activated carbon layers 1
A heat exchanger 12.12 connected to a heat pump device (not shown) is arranged between 1.11 and 12.11.
上述の熱交換器１２．１２は上述のじ一トボンプ装置の
四路切換弁（図示せず゛）等の切換制御で、ガス吸着時
には活性炭層１１．．１１を冷却するエバポレータ（蒸
発器）として作用する一方、ガス脱離時には活性炭層１
１．１１を加熱するコンデンサ（凝縮器）として作用す
る。The above-mentioned heat exchanger 12.12 is controlled by switching the four-way switching valve (not shown) of the above-mentioned single pump device, and when gas is adsorbed, the activated carbon layer 11. ．． 11, while the activated carbon layer 1 acts as an evaporator to cool the activated carbon layer 1 during gas desorption.
Acts as a condenser (condenser) to heat 1.11.
また、前述の高圧活性炭吸着塔１０の上部塔外には、こ
の高圧活性炭吸着塔１０内を所定高圧に保持する開弁制
御可能な圧力調整弁１３を接続し、この圧力調整弁１３
の設定圧を圧縮機吐出圧力と対応する圧力に設定してい
る。Further, a pressure regulating valve 13 whose opening can be controlled and which maintains the inside of this high pressure activated carbon adsorption tower 10 at a predetermined high pressure is connected to the outside of the upper tower of the above-mentioned high pressure activated carbon adsorption tower 10.
The set pressure of the compressor is set to a pressure corresponding to the compressor discharge pressure.
この圧力調整弁１３の前位つまり上流側には、第２電磁
弁１４を介設した第２送気管１５を介して、減圧冷却塔
１６を接続している。A reduced pressure cooling tower 16 is connected upstream of the pressure regulating valve 13 via a second air pipe 15 in which a second electromagnetic valve 14 is interposed.
そして、この減圧冷却塔１６の内部の略中夫には第２蒸
発器１７を配設する一方、この減圧冷却塔１６の液溶剤
貯溜部位としての底部と、前述のフロン洗浄機１内の熱
温槽上部との間には第３電磁弁１８および第２液体ポン
プ１９を介設した第２リターン路２０を接続して、上述
の蒸発器１７で冷Ｗ液化された液溶剤を遠流すべく構成
している。A second evaporator 17 is disposed approximately inside the vacuum cooling tower 16, while the bottom of the vacuum cooling tower 16 as a liquid solvent storage area and the aforementioned fluorocarbon washer 1 are heated. A second return path 20 having a third electromagnetic valve 18 and a second liquid pump 19 interposed therebetween is connected to the upper part of the hot tank, so that the liquid solvent liquefied by the cold water in the evaporator 17 can be far-flowed. It consists of
ざらに、上述の減圧冷却塔１６と前述の圧縮機３の吸込
み側との間には、第４電磁弁２１および逆止弁２２を介
設した減圧ライン２３を接続して、該冷却塔１６に対す
るガス投入前に同冷却塔１６内を負圧に減圧制御するこ
とで、塔容積の小型化を図っている。Roughly speaking, a pressure reduction line 23 having a fourth electromagnetic valve 21 and a check valve 22 interposed is connected between the above-mentioned reduced pressure cooling tower 16 and the suction side of the above-mentioned compressor 3. By controlling the pressure inside the cooling tower 16 to be reduced to negative pressure before gas is introduced into the cooling tower, the volume of the tower is reduced.
図示実施例は上記の如く構成するものにして、以下作用
を説明する。The illustrated embodiment is constructed as described above, and its operation will be explained below.
フロン洗浄機１で、のワーク洗浄に際して、ワークの出
し入れにともなって上方へ流動しようとする溶剤より発
生したガスは、圧縮機３の駆動により前述の吸気ライン
２を介して吸引され、この吸引ガスは、圧縮機３で圧縮
されて、ガス濃度が高くなる。When cleaning a workpiece in the Freon cleaning machine 1, the gas generated from the solvent that tends to flow upward as the workpiece is taken in and out is sucked through the above-mentioned intake line 2 by the drive of the compressor 3, and this suction gas is compressed by the compressor 3, and the gas concentration increases.
上述の圧縮機３により高濃度化されたガスは高圧冷却塔
４内に流入し、蒸発器５の作用によって所定高圧下（例
えばプラス圧〜５ｋｙ／ｃｄ）で冷却液化する。The gas highly concentrated by the compressor 3 described above flows into the high-pressure cooling tower 4, and is cooled and liquefied under a predetermined high pressure (for example, positive pressure to 5 ky/cd) by the action of the evaporator 5.
冷却液化された液溶剤は上述の高圧冷却塔４底部に貯溜
し、第１電磁弁６の開弁および第１液体ポンプ７の駆動
時に第１リターン路８を介してフロン洗浄Ｉ１１の熱温
槽に遠流され、再利用に供される。The cooled and liquefied liquid solvent is stored at the bottom of the above-mentioned high-pressure cooling tower 4, and when the first electromagnetic valve 6 is opened and the first liquid pump 7 is driven, it is transferred to the thermothermal bath of the Freon cleaning I11 via the first return path 8. The water is sent to a distant place and used for reuse.
上述の蒸発器５の作用で液化されない比較的低濃度のガ
スは、第１送気管９を介して次段の高圧活性炭吸着塔１
０内に送気される。The relatively low concentration gas that is not liquefied by the action of the evaporator 5 described above is passed through the first air pipe 9 to the high-pressure activated carbon adsorption tower 1 in the next stage.
Air is delivered within 0.
この高圧活性炭吸着塔１０は、複数の活性炭層１１に対
するガス吸着時に、塔内を前述の圧力調整弁１３の設定
圧に保持すると共に、活性炭ｌ！１１１．１１間に介設
した熱交換器１２をエバポレータとして作用させ、斯る
加圧、冷却の両条件により活性体層１１におけるアクテ
ィブカーボンの吸着能力を大幅に高めるので、前述の低
濃度ガスはその分子がアクティブカーボンの界面（１ｎ
ｔｅｒｆａｃｅ）部分に高効率で吸着処理される。This high-pressure activated carbon adsorption tower 10 maintains the inside of the tower at the set pressure of the pressure regulating valve 13 mentioned above during gas adsorption onto the plurality of activated carbon layers 11, and also maintains the activated carbon l! The heat exchanger 12 interposed between 111 and 11 acts as an evaporator, and the adsorption capacity of active carbon in the active layer 11 is greatly increased by both pressurization and cooling conditions. The molecule is the active carbon interface (1n
The adsorption treatment is carried out with high efficiency on the surface (interface) part.
このようにして活性炭層１１に吸着（ａｄｓｏｒｐｔｉ
ｏｎ）されたガス分子を脱離（ａｅｓｏｒｐｔｔｏｎ）
するには、まず圧力調整弁１３を開弁じて高圧活性炭吸
着塔１０内を減圧し、次に圧力調整弁１３を閉弁する。In this way, the activated carbon layer 11 is adsorbed.
desorbs (aesorptton) gas molecules that are turned on)
To do this, first, the pressure regulating valve 13 is opened to reduce the pressure inside the high-pressure activated carbon adsorption tower 10, and then the pressure regulating valve 13 is closed.
次に減圧ライン２３に介設した第４電磁弁２１を開弁し
て圧縮機３の駆動で予め次段の減圧冷却塔１６内を負圧
に減圧処理した後に、第４電磁弁２１を閉弁する。Next, the fourth solenoid valve 21 installed in the decompression line 23 is opened, and after the compressor 3 is driven to reduce the pressure in the next stage decompression cooling tower 16 to negative pressure, the fourth solenoid valve 21 is closed. speak.
次に第２送気管１５を介設した第２電磁弁１５を開弁す
ると共に、ヒートポンプ装置に接続した前述の熱交換器
１２・・・を四路切換弁等の切換制御によりコンデンサ
として作用させると、活性炭層１１・・・は減圧条件下
で加熱されるので、この活性炭層１１・・・に吸着した
低濃度ガスはアクティブカーボンから脱離し、第２送気
管１５を介して減圧冷却塔１６内に送気される。Next, the second solenoid valve 15 with the second air pipe 15 interposed therebetween is opened, and the aforementioned heat exchanger 12 connected to the heat pump device is operated as a condenser by switching control of a four-way switching valve or the like. Since the activated carbon layer 11 is heated under reduced pressure conditions, the low-concentration gas adsorbed on the activated carbon layer 11 is desorbed from the active carbon and sent to the vacuum cooling tower 16 via the second air pipe 15. Air is blown inside.
この減圧冷却塔１６内に流入した低濃度ガスは第２蒸発
Ｓ！１７の作用によって冷却液化され、冷却液化された
液溶剤は該減圧冷却塔１６底部に貯溜する。The low concentration gas flowing into the vacuum cooling tower 16 is the second evaporator S! 17, and the cooled and liquefied liquid solvent is stored at the bottom of the vacuum cooling tower 16.
そして、第３電磁弁１８の開弁および第２液体ポンプ１
９の駆動時に第２リターン路２０を介して上述の液溶剤
がフロン洗浄機１の熱温槽に３１！流されて、再利用に
供される。Then, the third solenoid valve 18 is opened and the second liquid pump 1 is opened.
9, the above-mentioned liquid solvent is supplied to the hot bath of the Freon washer 1 through the second return path 20 31! It is washed away and given for reuse.
なお、前述の第１リターン路８と第２リターン路２０並
びに第１液体ポンプ７と第２液体ポンプ１９とは何れか
一方のみに単一化して８塔４．１６′で共用してもよい
。Note that the first return path 8, the second return path 20, the first liquid pump 7, and the second liquid pump 19 described above may be unified into only one of them and shared by the eight columns 4.16'. .
以上型するに、回収した溶剤ガスのガスＩＩｒ！１を高
めて冷却液化することができるので、濃度の薄いガスで
も充分に回収液化することができて、回収能力の大幅な
向上を図ることができ、また装置の小型化を図ることが
できる効果がある。In summary, the recovered solvent gas IIr! 1 can be cooled and liquefied, so even gases with low concentrations can be sufficiently recovered and liquefied, greatly improving the recovery capacity and making the equipment more compact. There is.
加えて、回収液化した液溶剤を再利用に供することがで
きるので、溶剤消費量の低減を図ることができると共に
、溶剤ガスによる大気汚染を防止することができる効果
がある。In addition, since the recovered and liquefied liquid solvent can be reused, the amount of solvent consumed can be reduced and air pollution caused by solvent gas can be prevented.
さらに、構造が簡単かつ小型コンパクトであるから、例
えばフロン洗浄装置に対して容易に取付けることができ
て、洗浄装置と回収装置との一体ユニット化を図ること
が可能となる。Furthermore, since the structure is simple and compact, it can be easily attached to, for example, a fluorocarbon cleaning device, making it possible to integrate the cleaning device and the recovery device into an integrated unit.
この発明の構成と、上述の実施例との対応において、
この発明のフロン等の溶剤を貯溜した溶剤槽は、実施例
のフロン洗浄機１に対応し、
以下同様に、
蒸発器は、第１蒸発器５に対応するも、この発明は、上
述の実施例の構成のみに限定されるものではない。In the correspondence between the configuration of this invention and the above-described embodiments, the solvent tank storing a solvent such as fluorocarbon of the present invention corresponds to the fluorocarbon cleaning machine 1 of the embodiment, and similarly, the evaporator is the first evaporator. Although the present invention corresponds to the evaporator 5, it is not limited to the configuration of the above-described embodiment.
例えば、被回収溶剤としては、Ｒ１１３単体の他にＲ１
１３をベースにした混合溶剤やその他の −塩素
系溶剤であってもよい。For example, in addition to R113 alone, R1
A mixed solvent based on No. 13 or other -chlorinated solvents may be used.
図面はこの発明の一実施例を示す溶剤回収装置の系統図
である。
１・・・フロン洗浄機 ２・・・吸気ライン３・・
・圧縮機 ４・・・高圧冷却塔５・・・第１
蒸発器The drawing is a system diagram of a solvent recovery device showing an embodiment of the present invention. 1... Freon cleaning machine 2... Intake line 3...
・Compressor 4...High pressure cooling tower 5...1st
Evaporator
Claims (1)
剤ガスを吸引する吸気ラインを接続 し、 この吸気ラインに圧縮機を介して高圧冷却 塔を接続すると共に、 上記高圧冷却塔には、溶剤より発生したガ スを高圧下で冷却液化する蒸発器を配設し た 溶剤回収装置。(1) An intake line for sucking the solvent gas is connected to the gas layer of the solvent tank storing solvents such as fluorocarbons, and a high-pressure cooling tower is connected to this intake line via a compressor. is a solvent recovery device equipped with an evaporator that cools and liquefies the gas generated from the solvent under high pressure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62314658A JPH07112522B2 (en) | 1987-12-12 | 1987-12-12 | Cleaning solvent recovery device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62314658A JPH07112522B2 (en) | 1987-12-12 | 1987-12-12 | Cleaning solvent recovery device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01155901A true JPH01155901A (en) | 1989-06-19 |
| JPH07112522B2 JPH07112522B2 (en) | 1995-12-06 |
Family
ID=18055979
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62314658A Expired - Fee Related JPH07112522B2 (en) | 1987-12-12 | 1987-12-12 | Cleaning solvent recovery device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH07112522B2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0560501U (en) * | 1992-01-28 | 1993-08-10 | 森川産業株式会社 | Solvent recovery device using a compressor in a closed type washing machine |
| JP2020131068A (en) * | 2019-02-14 | 2020-08-31 | アクトファイブ株式会社 | Cleaning liquid recovery device |
| US11871828B2 (en) | 2016-03-24 | 2024-01-16 | Dyson Technology Limited | Attachment for a handheld appliance |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5123505A (en) * | 1974-08-22 | 1976-02-25 | Chisso Eng Co Ltd | Gasorintono kaishuhoho |
| JPS5134209A (en) * | 1974-09-17 | 1976-03-23 | Yoshio Sakai | Kihatsuseikanengasu no kaishuhoho |
| JPS52150379A (en) * | 1976-06-10 | 1977-12-14 | Mitsubishi Heavy Ind Ltd | Condensation separator for mixed gas |
-
1987
- 1987-12-12 JP JP62314658A patent/JPH07112522B2/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5123505A (en) * | 1974-08-22 | 1976-02-25 | Chisso Eng Co Ltd | Gasorintono kaishuhoho |
| JPS5134209A (en) * | 1974-09-17 | 1976-03-23 | Yoshio Sakai | Kihatsuseikanengasu no kaishuhoho |
| JPS52150379A (en) * | 1976-06-10 | 1977-12-14 | Mitsubishi Heavy Ind Ltd | Condensation separator for mixed gas |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0560501U (en) * | 1992-01-28 | 1993-08-10 | 森川産業株式会社 | Solvent recovery device using a compressor in a closed type washing machine |
| US11871828B2 (en) | 2016-03-24 | 2024-01-16 | Dyson Technology Limited | Attachment for a handheld appliance |
| JP2020131068A (en) * | 2019-02-14 | 2020-08-31 | アクトファイブ株式会社 | Cleaning liquid recovery device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH07112522B2 (en) | 1995-12-06 |
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