JPH01155651U - - Google Patents
Info
- Publication number
- JPH01155651U JPH01155651U JP5288388U JP5288388U JPH01155651U JP H01155651 U JPH01155651 U JP H01155651U JP 5288388 U JP5288388 U JP 5288388U JP 5288388 U JP5288388 U JP 5288388U JP H01155651 U JPH01155651 U JP H01155651U
- Authority
- JP
- Japan
- Prior art keywords
- implantation
- injection
- dose
- platen
- setting value
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000002347 injection Methods 0.000 claims description 8
- 239000007924 injection Substances 0.000 claims description 8
- 238000002513 implantation Methods 0.000 claims 10
- 238000000034 method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
- 150000002500 ions Chemical class 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5288388U JPH01155651U (cs) | 1988-04-19 | 1988-04-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5288388U JPH01155651U (cs) | 1988-04-19 | 1988-04-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01155651U true JPH01155651U (cs) | 1989-10-25 |
Family
ID=31278878
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5288388U Pending JPH01155651U (cs) | 1988-04-19 | 1988-04-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01155651U (cs) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61292845A (ja) * | 1985-06-20 | 1986-12-23 | Sumitomo Electric Ind Ltd | イオン注入方法および装置 |
-
1988
- 1988-04-19 JP JP5288388U patent/JPH01155651U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61292845A (ja) * | 1985-06-20 | 1986-12-23 | Sumitomo Electric Ind Ltd | イオン注入方法および装置 |
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