JPH01155248U - - Google Patents

Info

Publication number
JPH01155248U
JPH01155248U JP5091588U JP5091588U JPH01155248U JP H01155248 U JPH01155248 U JP H01155248U JP 5091588 U JP5091588 U JP 5091588U JP 5091588 U JP5091588 U JP 5091588U JP H01155248 U JPH01155248 U JP H01155248U
Authority
JP
Japan
Prior art keywords
microwave
ion source
intensity
attenuator
discharge chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5091588U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5091588U priority Critical patent/JPH01155248U/ja
Publication of JPH01155248U publication Critical patent/JPH01155248U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP5091588U 1988-04-18 1988-04-18 Pending JPH01155248U (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5091588U JPH01155248U (fr) 1988-04-18 1988-04-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5091588U JPH01155248U (fr) 1988-04-18 1988-04-18

Publications (1)

Publication Number Publication Date
JPH01155248U true JPH01155248U (fr) 1989-10-25

Family

ID=31276941

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5091588U Pending JPH01155248U (fr) 1988-04-18 1988-04-18

Country Status (1)

Country Link
JP (1) JPH01155248U (fr)

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