JPH01153479A - Packaging method for semiconductor device - Google Patents
Packaging method for semiconductor deviceInfo
- Publication number
- JPH01153479A JPH01153479A JP62310159A JP31015987A JPH01153479A JP H01153479 A JPH01153479 A JP H01153479A JP 62310159 A JP62310159 A JP 62310159A JP 31015987 A JP31015987 A JP 31015987A JP H01153479 A JPH01153479 A JP H01153479A
- Authority
- JP
- Japan
- Prior art keywords
- bag
- semiconductor device
- thin film
- sealing
- sealed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 title claims abstract description 36
- 238000004806 packaging method and process Methods 0.000 title claims description 17
- 238000000034 method Methods 0.000 title claims description 11
- 239000010409 thin film Substances 0.000 claims abstract description 11
- 238000007789 sealing Methods 0.000 abstract description 10
- 239000011347 resin Substances 0.000 abstract description 8
- 229920005989 resin Polymers 0.000 abstract description 8
- 239000004698 Polyethylene Substances 0.000 abstract description 5
- -1 polyethylene Polymers 0.000 abstract description 5
- 229920000573 polyethylene Polymers 0.000 abstract description 5
- OEPOKWHJYJXUGD-UHFFFAOYSA-N 2-(3-phenylmethoxyphenyl)-1,3-thiazole-4-carbaldehyde Chemical compound O=CC1=CSC(C=2C=C(OCC=3C=CC=CC=3)C=CC=2)=N1 OEPOKWHJYJXUGD-UHFFFAOYSA-N 0.000 abstract description 2
- 230000009545 invasion Effects 0.000 abstract 1
- 238000010521 absorption reaction Methods 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 2
- 229920003023 plastic Polymers 0.000 description 2
- 239000004033 plastic Substances 0.000 description 2
- 238000005476 soldering Methods 0.000 description 2
- 101000852483 Homo sapiens Interleukin-1 receptor-associated kinase 1 Proteins 0.000 description 1
- 102100036342 Interleukin-1 receptor-associated kinase 1 Human genes 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000004043 dyeing Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 239000008188 pellet Substances 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
- 238000009834 vaporization Methods 0.000 description 1
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は半導体装置の包装方法に関し、特にトレ1脂封
止型の半導体装置の包装方法に関する。DETAILED DESCRIPTION OF THE INVENTION [Industrial Field of Application] The present invention relates to a method of packaging a semiconductor device, and particularly to a method of packaging a one-tray resin-sealed semiconductor device.
従来、この種の半導体装置の包装方法には主に3つの形
態がある。一つは、デイアルインラインパッケージ、ス
モールアウトラインパッケージ及びプラスチックリープ
イツトチップキャリヤ等の樹脂封止型の半導体装置の場
合、チューブと呼ばれるアルミニウム製又はプラスチッ
ク製の筒状の容器に半導体装置を挿入し、両端をストッ
パで固定して出荷包装としていた。Conventionally, there are mainly three types of packaging methods for this type of semiconductor device. One is for resin-sealed semiconductor devices such as daily in-line packages, small outline packages, and plastic leap-fit chip carriers, in which the semiconductor device is inserted into a cylindrical container made of aluminum or plastic called a tube. Both ends were fixed with stoppers and packaged for shipping.
2つめは、′クワッドフラットパッケージのように四方
向に特に細くかつ薄いリード端子を有するパッケージの
場合は、トレーと呼ばれる半導体装置の収納容器を50
程度に分割し、各々に半導体装置を挿入し、これを多段
に重ねて出荷包装とするものがある。Second, in the case of a package that has particularly narrow and thin lead terminals in all four directions, such as a quad flat package, the storage container for semiconductor devices, called a tray, is
There is a method that divides the package into several parts, inserts a semiconductor device into each part, stacks them in multiple stages, and packages them for shipping.
3つめは、テープ状の紙に粘着させリールにまいたり、
又は、エンボス状に窪みを設は半導体装置を挿入し、上
がちカバ下テープを圧着してリールに巻き出荷するテー
プアンドリール方式の出荷包装がある。The third method is to attach it to a tape-like paper and spread it on a reel.
Alternatively, there is a tape-and-reel shipping packaging method in which a semiconductor device is inserted into an embossed recess, a tape on the top and bottom of the cover is crimped, and the package is wound onto a reel and shipped.
上述した従来の半導体装置の包装方法は、外界と半導体
装置とは完全に遮断されていないので、外気の湿度が高
い場合、半導体装置の樹脂が外気の水分を吸収してしま
う。In the conventional semiconductor device packaging method described above, the semiconductor device is not completely isolated from the outside world, so when the humidity of the outside air is high, the resin of the semiconductor device absorbs moisture from the outside air.
従って、赤外線リフローやペイパーフェイズソルダリン
グ等の半導体装置を全体的に加熱することで半導体装置
をプリント基板に実装する場合には、加熱により樹脂中
の水分が気1ヒして半導体装置の樹脂に亀裂を生じると
いう欠点がある。亀裂はペレ・ソトが大きい半導体装置
や、又は、樹脂分の少い半導体装置の場合に著しい。亀
裂はペレットの端や半導体素子搭載部の端などから内部
に発生しなり、激しいときには内部がち外部まで達し、
半導体装置の耐湿性の著しい劣化や亀裂がボンディング
ワイヤを横ぎるときには断線障害を発生するという欠点
がある。Therefore, when mounting a semiconductor device on a printed circuit board by heating the entire semiconductor device, such as by infrared reflow or paper-phase soldering, the moisture in the resin is evaporated by the heating, and the resin of the semiconductor device is heated. It has the disadvantage of causing cracks. Cracks are noticeable in semiconductor devices with large Pelle/Soto or semiconductor devices with a small resin content. Cracks occur internally from the edges of the pellet or the edges of the semiconductor element mounting area, and in severe cases they can extend from the inside to the outside.
There is a drawback that when the moisture resistance of the semiconductor device deteriorates significantly or a crack crosses the bonding wire, a disconnection failure occurs.
本発明の半導体装置の包装方法は、複数個の樹脂封止型
の半導体装置を容器に収納し、複数個の前記容器を薄膜
フィルムの袋に収納し、該袋を0.8気圧以上の状態に
密閉保持するように構成される。A semiconductor device packaging method of the present invention includes storing a plurality of resin-sealed semiconductor devices in a container, storing the plurality of containers in a thin film bag, and keeping the bag at a pressure of 0.8 atmosphere or more. Constructed to maintain a tight seal.
次に、本発明について図面を参照して説明する。 Next, the present invention will be explained with reference to the drawings.
第1図は本発明の第1の実施例による包装具の一部切欠
き斜視図である。FIG. 1 is a partially cutaway perspective view of a packaging device according to a first embodiment of the present invention.
第1図に示すように、樹脂封止をの半導体装置1を複数
個チューブ2に収納し、チューブ2の両端をストッパ3
で封止する。このように半導体装置1を収納したチュー
ブ2を複数本、薄膜フィルムの袋4に収納して、袋4の
内部を0.8気圧以上にして袋4の閉口の封止部5を熱
圧着により密封する。As shown in FIG. 1, a plurality of resin-sealed semiconductor devices 1 are housed in a tube 2, and both ends of the tube 2 are connected to stoppers 3.
Seal with. A plurality of tubes 2 containing semiconductor devices 1 as described above are housed in a thin film bag 4, and the inside of the bag 4 is heated to 0.8 atmosphere or higher, and a sealing part 5 at the closure of the bag 4 is sealed by thermocompression bonding. Seal.
第2図は第1図の薄膜フィルムの染の断面図である。FIG. 2 is a cross-sectional view of the dyeing of the thin film of FIG.
第2図に示すように、袋4(第1図参照)を形成する薄
膜フィルムはポリエチレン6と塩1ヒビニリデン7の2
層構造になっていて、袋4の内面側をポリエチレン6と
することで封止部5の熱圧着が可能になり、室内で密閉
作業を行えば、0.8気圧以上の状態に密閉することは
極めて容易である。As shown in FIG. 2, the thin film forming the bag 4 (see FIG. 1) consists of two parts: polyethylene 6, salt 1, hibinylidene 7.
It has a layered structure, and by using polyethylene 6 on the inner side of the bag 4, the sealing part 5 can be bonded by thermocompression, and if the sealing work is done indoors, it can be sealed to a state of 0.8 atmosphere or more. is extremely easy.
次に、第3図は包装状態と吸湿率の相関を示す特性図で
ある。Next, FIG. 3 is a characteristic diagram showing the correlation between the packaging state and the moisture absorption rate.
第3図において、Aは第1の実施例の場合、Bは袋の中
を真空に保った場合、Cは従来の容器のみの場合である
。上記の各包装方法に対して40°C90%RHの雰囲
気で2週間(25℃60%RHで約1年間に相当)放置
した結果を示し、第1の実施例のものは吸湿率が0.1
%以下であり、真空のものより少〈従来のものより1/
3以下になっている。In FIG. 3, A is the case of the first embodiment, B is the case where the inside of the bag is kept in vacuum, and C is the case where only the conventional container is used. The results of each of the above packaging methods after being left in an atmosphere of 40°C and 90% RH for 2 weeks (equivalent to about 1 year at 25°C and 60% RH) are shown, and the moisture absorption rate of the first example was 0. 1
% or less than the vacuum type (1/1/2 compared to the conventional type)
It is below 3.
吸湿率が0.1%であれば半導体装置の樹脂内に含まれ
る水分の量が低いため、半導体装置の実装時の加熱によ
る水分の気化が少くなり亀裂の発生がなくなる。If the moisture absorption rate is 0.1%, the amount of moisture contained in the resin of the semiconductor device is low, so that vaporization of moisture due to heating during mounting of the semiconductor device is reduced, and cracks do not occur.
第4図は本発明の第2の実施例による包装具の一部切欠
き斜視図である。FIG. 4 is a partially cutaway perspective view of a packaging device according to a second embodiment of the present invention.
第4図に示すように、第2の実施例による包装具は薄膜
フィルムの代りにゴム状の薄膜フィルムの袋4aに収納
し、袋4a内を図示しない加圧装置で高圧にした後、表
4aの開口をひも8で密閉している。As shown in FIG. 4, the packaging device according to the second embodiment is stored in a rubber-like thin film bag 4a instead of a thin film, and after applying high pressure inside the bag 4a with a pressurizing device (not shown), the packaging device is opened. The opening of 4a is sealed with a string 8.
以上説明したように本発明は、半導体装置を3膜のフィ
ルムで0.8気圧以上の状態に保持して密閉することに
より外界から水分が浸入することを防止でき、半導体装
置は長期間にわたって吸湿することがなく0.1%以下
の吸湿率に保持できるので、赤外線リフローやペイパー
フェイズソルダリング等によりプリント基板に実装する
場合に、加熱によって半導体装置の樹脂中の水分が気化
することが少く、実装時に半導体装置の樹脂に亀裂が生
じることを防止でき、耐湿性の劣fヒや亀裂がボンディ
ングワイヤを横ぎる場合に生じる断線障害の発生を防止
できる効果がある。As explained above, the present invention can prevent moisture from entering from the outside world by keeping the semiconductor device in a state of 0.8 atmosphere or higher with three films and sealing it, and the semiconductor device can absorb moisture for a long period of time. Since the moisture absorption rate can be maintained at 0.1% or less without causing any damage, the moisture in the resin of the semiconductor device is less likely to vaporize due to heating when mounted on a printed circuit board by infrared reflow or paper-phase soldering. This has the effect of preventing cracks from occurring in the resin of the semiconductor device during mounting, and preventing poor moisture resistance and disconnection failures that would occur if the cracks cross the bonding wire.
第1図は本発明の第1の実施例による包装具の一部切欠
き斜視図、第2図は第1図の薄膜フィルムの袋の断面図
、第3図は包装状!ぶと吸湿率の相関を示す特性図、第
4図は本発明の第2の実施例による包装具の一部切欠き
斜視図である。
1・・・半導体装置、2・・・チューブ、3・・・スト
ッパ、4.4a・・・袋、5・・・封止部、6・・・ポ
リエチレン、7・・・塩化ビニリデン、8・・・ひも。Fig. 1 is a partially cutaway perspective view of a packaging device according to a first embodiment of the present invention, Fig. 2 is a cross-sectional view of the thin film bag of Fig. 1, and Fig. 3 is a packaging! FIG. 4 is a partially cutaway perspective view of a packaging device according to a second embodiment of the present invention. DESCRIPTION OF SYMBOLS 1... Semiconductor device, 2... Tube, 3... Stopper, 4.4a... Bag, 5... Sealing part, 6... Polyethylene, 7... Vinylidene chloride, 8... ...string.
Claims (1)
個の前記容器を薄膜フィルムの袋に収納し、該袋を0.
8気圧以上の状態に密閉保持することを特徴とする半導
体装置の包装方法。A plurality of resin-sealed semiconductor devices are housed in a container, the plurality of containers are housed in a thin film bag, and the bag is heated to a temperature of 0.
A method for packaging a semiconductor device, characterized by keeping the semiconductor device hermetically sealed at a pressure of 8 atmospheres or more.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62310159A JPH01153479A (en) | 1987-12-07 | 1987-12-07 | Packaging method for semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62310159A JPH01153479A (en) | 1987-12-07 | 1987-12-07 | Packaging method for semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH01153479A true JPH01153479A (en) | 1989-06-15 |
Family
ID=18001869
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62310159A Pending JPH01153479A (en) | 1987-12-07 | 1987-12-07 | Packaging method for semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH01153479A (en) |
-
1987
- 1987-12-07 JP JP62310159A patent/JPH01153479A/en active Pending
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