JPH01152776A - Pulse laser oscillator - Google Patents

Pulse laser oscillator

Info

Publication number
JPH01152776A
JPH01152776A JP31098987A JP31098987A JPH01152776A JP H01152776 A JPH01152776 A JP H01152776A JP 31098987 A JP31098987 A JP 31098987A JP 31098987 A JP31098987 A JP 31098987A JP H01152776 A JPH01152776 A JP H01152776A
Authority
JP
Japan
Prior art keywords
main discharge
discharge electrodes
air
gas
air channel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP31098987A
Other languages
Japanese (ja)
Inventor
Hiromichi Kono
広道 河野
Toru Tamagawa
徹 玉川
Koichi Yasuoka
康一 安岡
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP31098987A priority Critical patent/JPH01152776A/en
Publication of JPH01152776A publication Critical patent/JPH01152776A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/038—Electrodes, e.g. special shape, configuration or composition

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)

Abstract

PURPOSE:To improve cooling efficiency, and to miniaturize the whole device by doubling an air channel section and using an air channel on the outside as a gas intake. CONSTITUTION:An air channel 10 is formed in double structure on the upstream side of main discharge electrodes 2, 3, and an air-supply duct 13 as the extension of an air-supply pipe 1b is installed to the double structure section of the air channel 10. Consequently, the upper sections of the surfaces of the main discharge electrodes 2, 3 can be exposed to a novel gas taken in from an air supply system at all times. Accordingly, the cooling efficiency of the main electrodes is also improved, and the discharge electrodes 2, 3 important as the conditions of glow discharge and the state near the discharge electrodes 2, 3 can be kept more constant than conventional devices.

Description

【発明の詳細な説明】 〔発明の目的〕 （産業上の利用分野） 本発明は風洞を改良したパルスレーザ発振装置に関する
。DETAILED DESCRIPTION OF THE INVENTION [Object of the Invention] (Field of Industrial Application) The present invention relates to a pulsed laser oscillation device with an improved wind tunnel.

（従来の技術） 近年、ＣＯ，ｌレーザ等の各種パルスレーザ発振装置に
おける技術の著しい進歩に伴い、これらの各種パルスレ
ーザ発振装置の一層の小型化、高性能化が要求されてい
る。(Prior Art) In recent years, with the remarkable progress in the technology of various pulsed laser oscillation devices such as CO and l lasers, there has been a demand for further miniaturization and higher performance of these various pulsed laser oscillation devices.

この様なパルスレーザ発振装置としては１例えば、第２
図及び第３図に示す様な実開昭６１−１９６５６４号の
考案が存在している。As such a pulse laser oscillation device, for example, a second laser oscillation device is used.
There is a device disclosed in Japanese Utility Model Application No. 61-196564 as shown in FIGS.

第２図及び第３図において、発振ボックス１内には、主
放電電極２，３が対向配置され、この主放電電極２，３
の側方の近接配置には、予備電離電極４が並べて配置さ
れている。主放電電極２゜３及び予備電離電極４の片側
の側方には、若干距離をおいて送風機５が配置されてい
る。この送風機５は、発振ボックス１内のレーザガスを
強制循環させて、主放電電極２，３間の空間に矢印６に
示す様な方向にてレーザガスを送り、グロー放電による
残留ガスを除去して回部のガス交換を行うと共に、過熱
した主放電電極２，３を冷却するものである。発振ボッ
クス１の隔壁には、送風機５による風向き６と直交する
方向を光軸として、リアミラー８と出力ミラー９が対向
配置されている。In FIGS. 2 and 3, main discharge electrodes 2 and 3 are disposed facing each other in an oscillation box 1.
Pre-ionization electrodes 4 are arranged side by side in close proximity to each other. A blower 5 is placed on one side of the main discharge electrode 2.3 and the preliminary ionization electrode 4 at a slight distance. This blower 5 forcibly circulates the laser gas in the oscillation box 1, sends the laser gas in the direction shown by the arrow 6 into the space between the main discharge electrodes 2 and 3, removes residual gas due to glow discharge, and circulates the laser gas. The main discharge electrodes 2 and 3 are cooled, and the main discharge electrodes 2 and 3 are cooled. A rear mirror 8 and an output mirror 9 are disposed opposite to each other on a partition wall of the oscillation box 1, with the optical axis extending in a direction perpendicular to the wind direction 6 produced by the blower 5.

このリアミラー８と出力ミラー９とは、主放電′ニ極２
，３にパルス電圧が印加されて、この間にグロー放電を
発生し、これによってレーザガスが励起された際１両者
で共振器として作用し、レーザ発振を行うものである。The rear mirror 8 and the output mirror 9 are connected to the main discharge 'dipolar 2'.
, 3, a glow discharge is generated during this time, and when the laser gas is excited by this, both act as a resonator and perform laser oscillation.

なお、発振ボックス１は、排気パイプ１ａ及び給気パイ
プ１ｂを有しており、給気パイプ１ｂには、調整弁１１
を介してガスボンベ１２が接続され、この構成にて発振
ボックス１内のガス調整がなされる様になっている。The oscillation box 1 has an exhaust pipe 1a and an air supply pipe 1b, and the air supply pipe 1b has a regulating valve 11.
A gas cylinder 12 is connected through the oscillation box 1, and the gas inside the oscillation box 1 can be adjusted with this configuration.

ところで、従来の装置においては、主放電電極２．３近
傍のレーザガス流は中央部比較して遅いため、ここでの
冷却能力が局所的に小さくなる。By the way, in the conventional device, since the laser gas flow near the main discharge electrode 2.3 is slower than that at the center, the cooling capacity there becomes locally small.

このため、送風能力を大きくする必要がある。この結果
、装置全体が大形化することになる。Therefore, it is necessary to increase the air blowing capacity. As a result, the entire device becomes larger.

（発明が解決しようとする問題点） このように、従来のパルスレーザ発振装置にあっては、
主放電電極近傍のレーザガス流が低下するので、＠環及
び冷却能力を維持するために大容量のガス循環装置が必
要となり、全体として小形の装置とすることができなか
った。(Problems to be solved by the invention) As described above, in the conventional pulsed laser oscillation device,
Since the laser gas flow near the main discharge electrode decreases, a large-capacity gas circulation device is required to maintain the ring and cooling capacity, and the overall device cannot be made compact.

本発明は上記問題点を除去するために成されたもので、
全体として効率的なレーザガス流を形成することで、冷
却効率に優れた小形のパルスレーザ発振装置を提供する
ことを目的とする。The present invention was made to eliminate the above problems, and
It is an object of the present invention to provide a compact pulse laser oscillation device with excellent cooling efficiency by forming an efficient laser gas flow as a whole.

〔発明の構成〕[Structure of the invention]

（問題点を解決するための手段） 上記目的を達成するために、本発明においてはガス循環
装置の主放電電極上流側部分を２重の風洞構造とし、外
側の風洞をガスの取入口としている。(Means for solving the problem) In order to achieve the above object, in the present invention, the upstream portion of the main discharge electrode of the gas circulation device has a double wind tunnel structure, and the outer wind tunnel is used as the gas intake port. .

（作　　用） このように構成することにより、新しく取入れられたレ
ーザガスを効率的に主放電電極表面に流すことができ、
冷却効率が上昇するのでガス循環装置ひいては装置全体
を小形化することができる。(Function) With this configuration, the newly introduced laser gas can be efficiently flowed to the main discharge electrode surface,
Since the cooling efficiency increases, the gas circulation device and the entire device can be downsized.

（実　施　例） 以上説明した様な本発明によるパルスレーザ発振装置の
実施例を以下に説明する。なお、第２図及び第３図に示
した従来技術と同一部分には同一符号を付し、説明を省
略する。(Example) An example of the pulsed laser oscillation device according to the present invention as described above will be described below. Note that the same parts as those in the prior art shown in FIGS. 2 and 3 are designated by the same reference numerals, and the description thereof will be omitted.

第１図に、本発明の基本的実施例を示す。第１図に示す
様に、本実施例において、風洞１０は、主放電電極２，
３の上流側で２重構造となっている。FIG. 1 shows a basic embodiment of the invention. As shown in FIG. 1, in this embodiment, the wind tunnel 10 includes a main discharge electrode 2,
It has a double structure on the upstream side of 3.

さらに、風洞１０の２重構造部分には給気パイプ１ｂの
延長である給気ダクト１３が取付けられている。Furthermore, an air supply duct 13, which is an extension of the air supply pipe 1b, is attached to the double structure portion of the wind tunnel 10.

以上の様な構成を有する実施例のパルスレーザ発振装置
においては、主放電電極２，３の表面上を常に給気系よ
り取入れられた新しいガスにさらしておくことができる
ため、主電極の冷却効率も上がり、グロー放電の条件と
して重要な放電電極２．３および放電電極２，３近傍の
状態を従来に比べ一定に保つことができる。In the pulsed laser oscillation device of the embodiment having the above configuration, the surfaces of the main discharge electrodes 2 and 3 can be constantly exposed to fresh gas taken in from the air supply system, so cooling of the main electrodes is possible. Efficiency is also improved, and the conditions of the discharge electrodes 2.3 and the vicinity of the discharge electrodes 2, 3, which are important conditions for glow discharge, can be kept constant compared to the prior art.

〔発明の効果〕〔Effect of the invention〕

以上説明した様に１本発明においては、風洞部を２重化
し、外画の風洞をガス取入口とすることにより、主放電
電極の冷却効率を向上できかつグロー放電も安定させる
ことができる。よって、送風機の小形化により装置の小
形化に貢献し得る優れたパルスレーザ発振装置を提供で
きる。As explained above, in the present invention, by duplicating the wind tunnel section and using the outer wind tunnel as the gas intake port, the cooling efficiency of the main discharge electrode can be improved and the glow discharge can also be stabilized. Therefore, it is possible to provide an excellent pulse laser oscillation device that can contribute to downsizing of the device by downsizing the blower.

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本発明の一実施例を示すパルスレーザ発振装置
の断面図、第２図および第３図はそれぞれ従来のパルス
レーザ発振装置を示す横断面図および縦断面図である。 １・・・発振ボックス、　　１ａ・・・排気パイプ、１
ｂ・・・給気パイプ、　　　　２，３・・・主放電電極
、４・・・予備電離電極、　　５・・・送風機。 ６・・・風向。 ７・・・ピーキングコンデンサ、 ８・・・リアミラー、　　　　９・・・出力ミラー、１
０・・・風洞、１１・・・調整弁、 １２・・・ガスボンベ、　　　１３・・・給気ダクト。 代理人　弁理士　則　近　憲　佑 同　　第子丸　健FIG. 1 is a cross-sectional view of a pulsed laser oscillation device showing an embodiment of the present invention, and FIGS. 2 and 3 are a cross-sectional view and a vertical cross-sectional view, respectively, of a conventional pulsed laser oscillation device. 1... Oscillation box, 1a... Exhaust pipe, 1
b... Air supply pipe, 2, 3... Main discharge electrode, 4... Preliminary ionization electrode, 5... Air blower. 6...Wind direction. 7... Peaking capacitor, 8... Rear mirror, 9... Output mirror, 1
0...Wind tunnel, 11...Adjusting valve, 12...Gas cylinder, 13...Air supply duct. Agent Patent Attorney Noriyuki Chika Yudo Ken Daishimaru

Claims (1)

【特許請求の範囲】[Claims] 　対向配置された主放電電極と、主放電領域を予備電離
するための回路とを備え、主放電電極の表面に沿ってレ
ーザガスを強制循環させるガス循環装置を有するパルス
レーザ発振装置において、前記ガス循環装置の主放電電
極上流側部分を２重の風洞構造とするとともに、外側の
風洞をガスの取入口としたことを特徴とするパルスレー
ザ発振装置。In a pulsed laser oscillation device having a gas circulation device that includes main discharge electrodes arranged opposite to each other and a circuit for pre-ionizing the main discharge region, and forcibly circulates laser gas along the surface of the main discharge electrode, the gas circulation 1. A pulsed laser oscillation device characterized in that a portion upstream of a main discharge electrode of the device has a double wind tunnel structure, and the outer wind tunnel is used as a gas intake port.
JP31098987A 1987-12-10 1987-12-10 Pulse laser oscillator Pending JPH01152776A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP31098987A JPH01152776A (en) 1987-12-10 1987-12-10 Pulse laser oscillator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP31098987A JPH01152776A (en) 1987-12-10 1987-12-10 Pulse laser oscillator

Publications (1)

Publication Number Publication Date
JPH01152776A true JPH01152776A (en) 1989-06-15

Family

ID=18011805

Family Applications (1)

Application Number Title Priority Date Filing Date
JP31098987A Pending JPH01152776A (en) 1987-12-10 1987-12-10 Pulse laser oscillator

Country Status (1)

Country Link
JP (1) JPH01152776A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111175010A (en) * 2020-01-08 2020-05-19 中国空气动力研究与发展中心超高速空气动力研究所 Large-caliber hypersonic-velocity low-density wind tunnel flow field display system based on high-frequency glow

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111175010A (en) * 2020-01-08 2020-05-19 中国空气动力研究与发展中心超高速空气动力研究所 Large-caliber hypersonic-velocity low-density wind tunnel flow field display system based on high-frequency glow

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