JPH01152348U - - Google Patents

Info

Publication number
JPH01152348U
JPH01152348U JP4425988U JP4425988U JPH01152348U JP H01152348 U JPH01152348 U JP H01152348U JP 4425988 U JP4425988 U JP 4425988U JP 4425988 U JP4425988 U JP 4425988U JP H01152348 U JPH01152348 U JP H01152348U
Authority
JP
Japan
Prior art keywords
light
unit
light source
inspection device
pattern recognition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4425988U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4425988U priority Critical patent/JPH01152348U/ja
Publication of JPH01152348U publication Critical patent/JPH01152348U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP4425988U 1988-03-31 1988-03-31 Pending JPH01152348U (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4425988U JPH01152348U (enExample) 1988-03-31 1988-03-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4425988U JPH01152348U (enExample) 1988-03-31 1988-03-31

Publications (1)

Publication Number Publication Date
JPH01152348U true JPH01152348U (enExample) 1989-10-20

Family

ID=31270627

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4425988U Pending JPH01152348U (enExample) 1988-03-31 1988-03-31

Country Status (1)

Country Link
JP (1) JPH01152348U (enExample)

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