JPH0115206B2 - - Google Patents
Info
- Publication number
- JPH0115206B2 JPH0115206B2 JP11444682A JP11444682A JPH0115206B2 JP H0115206 B2 JPH0115206 B2 JP H0115206B2 JP 11444682 A JP11444682 A JP 11444682A JP 11444682 A JP11444682 A JP 11444682A JP H0115206 B2 JPH0115206 B2 JP H0115206B2
- Authority
- JP
- Japan
- Prior art keywords
- zinc oxide
- thin film
- oxide thin
- vibrator
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical class [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 claims description 74
- 239000010409 thin film Substances 0.000 claims description 38
- 239000011787 zinc oxide Substances 0.000 claims description 37
- 239000000758 substrate Substances 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 230000010355 oscillation Effects 0.000 description 5
- 238000000034 method Methods 0.000 description 4
- 238000004544 sputter deposition Methods 0.000 description 3
- 238000005452 bending Methods 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- 230000001747 exhibiting effect Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 230000002123 temporal effect Effects 0.000 description 2
- 230000036962 time dependent Effects 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005566 electron beam evaporation Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 238000007733 ion plating Methods 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000010897 surface acoustic wave method Methods 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/02—Details
- H03H9/125—Driving means, e.g. electrodes, coils
- H03H9/13—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials
- H03H9/131—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials consisting of a multilayered structure
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11444682A JPS595721A (ja) | 1982-06-30 | 1982-06-30 | 酸化亜鉛薄膜の電極構造 |
| US06/509,028 US4445066A (en) | 1982-06-30 | 1983-06-29 | Electrode structure for a zinc oxide thin film transducer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11444682A JPS595721A (ja) | 1982-06-30 | 1982-06-30 | 酸化亜鉛薄膜の電極構造 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS595721A JPS595721A (ja) | 1984-01-12 |
| JPH0115206B2 true JPH0115206B2 (enrdf_load_stackoverflow) | 1989-03-16 |
Family
ID=14637932
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11444682A Granted JPS595721A (ja) | 1982-06-30 | 1982-06-30 | 酸化亜鉛薄膜の電極構造 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS595721A (enrdf_load_stackoverflow) |
-
1982
- 1982-06-30 JP JP11444682A patent/JPS595721A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS595721A (ja) | 1984-01-12 |