JPH01151905A - Sterilizing method for liquid permeation membrane - Google Patents

Sterilizing method for liquid permeation membrane

Info

Publication number
JPH01151905A
JPH01151905A JP30921487A JP30921487A JPH01151905A JP H01151905 A JPH01151905 A JP H01151905A JP 30921487 A JP30921487 A JP 30921487A JP 30921487 A JP30921487 A JP 30921487A JP H01151905 A JPH01151905 A JP H01151905A
Authority
JP
Japan
Prior art keywords
membrane
hydrogen peroxide
liquid
sterilizing
membranes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP30921487A
Other languages
Japanese (ja)
Other versions
JPH084727B2 (en
Inventor
Kazuhisa Kumami
和久 熊見
Tatsuo Azuma
東 辰夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Daicel Corp
Original Assignee
Daicel Chemical Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daicel Chemical Industries Ltd filed Critical Daicel Chemical Industries Ltd
Priority to JP30921487A priority Critical patent/JPH084727B2/en
Publication of JPH01151905A publication Critical patent/JPH01151905A/en
Publication of JPH084727B2 publication Critical patent/JPH084727B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D65/00Accessories or auxiliary operations, in general, for separation processes or apparatus using semi-permeable membranes
    • B01D65/02Membrane cleaning or sterilisation ; Membrane regeneration
    • B01D65/022Membrane sterilisation
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01DSEPARATION
    • B01D2321/00Details relating to membrane cleaning, regeneration, sterilization or to the prevention of fouling
    • B01D2321/16Use of chemical agents
    • B01D2321/168Use of other chemical agents

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)

Abstract

PURPOSE:To prevent deterioration of a membrane due to oxidizing action of hydrogen peroxide in an extremely simple process and to prolong service life of the membrane by immersing the liquid permeation membrane in acidic liquid maintaining 3pH or below and washing it before subjecting it to sterilization treatment by hydrogen peroxide. CONSTITUTION:In the case of sterilizing a hollow yarn-shaped or lamellate liquid permeation membrane made of polysulfone-base resin by hydrogen peroxide, it is immersed in acid liquid (hydrochloric acid aq., soln. etc.,) having <=3pH and washed before sterilization treatment. So far metallic ions such as platinum, iron and copper contained in water to be used are accumulated on the surface or to the inside of the membrane and deterioration of the membrane has been caused by oxidizing action of hydrogen peroxide generated by catalytic action thereof. Therefor, when treating the membrane with acidic liquid like this invention, metallic impurities or metallic deposit existing on the permeation membrane can be dissolved into acidic liquid and thereby deterioration of the membrane is not caused even in sterilization by hydrogen peroxide.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は過酸化水素による液体透過膜の殺菌方法に関し
、さらに詳細には過酸化水素による膜の劣化を防止する
ために改良された液体透過膜の殺菌方法に関する。
[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a method for sterilizing liquid permeable membranes using hydrogen peroxide, and more particularly to a method for sterilizing liquid permeable membranes using hydrogen peroxide. This invention relates to a method for sterilizing membranes.

〔従来の技術〕[Conventional technology]

近年、液体透過膜の開発は著しく、種々の透過特性を有
する限外濾過膜や精密濾過膜などが開発されている。こ
れらの膜は、用途により細菌、たんばく質などで汚染さ
れる場合があり、薬剤等による殺菌が必要となる。殺菌
に使用される薬剤としては、殺菌力が強く比較的クリー
ンな薬剤である過酸化水素水が一般に用いられている。
In recent years, the development of liquid permeable membranes has been remarkable, and ultrafiltration membranes, precision filtration membranes, and the like having various permeation characteristics have been developed. Depending on the use, these membranes may become contaminated with bacteria, proteins, etc., and must be sterilized with chemicals or the like. Hydrogen peroxide solution, which has strong sterilizing power and is relatively clean, is generally used for sterilization.

特に電子工業における超純水製造装置やファイナルフィ
ルターの殺菌には頻繁に使用されており、通常1〜5%
過酸化水素水を殺菌しようとする装置全体または液体透
過膜モジュールのみに充填し、室温で数時間放置して殺
菌している。このような殺菌は、週単位または少なくと
も月単位で実施されていることが多い。
It is frequently used to sterilize ultrapure water production equipment and final filters in the electronics industry, and usually contains 1 to 5%.
Hydrogen peroxide solution is filled into the entire device or only the liquid permeable membrane module to be sterilized and left at room temperature for several hours to sterilize. Such sterilization is often performed on a weekly or at least monthly basis.

ところで、過酸化水素は殺菌剤であると同時に強力な酸
化剤であるため、周囲に酸化作用を及ぼし易い。
By the way, since hydrogen peroxide is both a disinfectant and a strong oxidizing agent, it tends to exert an oxidizing effect on the surrounding area.

液体透過膜を備える装置の配管等は、通常、ステンレス
、PVC、PP、 PVDF、 PTFAなどで構成さ
れており、1〜5%の過酸化水素水では、酸化作用によ
る影響は実用上殆どない。一方、液体透過膜のうち、ポ
リスルホン、ポリエーテルスルホン、PMMASPAN
 SPPまたはPEよりなる膜についても、一般に室温
程度の1〜5%の過酸化水素水では、酸化作用による影
響が殆どないとされている。
The piping of devices equipped with liquid permeable membranes is usually made of stainless steel, PVC, PP, PVDF, PTFA, etc., and with 1 to 5% hydrogen peroxide, there is practically no effect from oxidation. On the other hand, among liquid permeable membranes, polysulfone, polyethersulfone, PMMASPAN
It is generally said that membranes made of SPP or PE are hardly affected by oxidation in 1 to 5% hydrogen peroxide solution at room temperature.

〔発明が解決しようとする問題点〕[Problem that the invention seeks to solve]

しかしながら、過酸化水素は例えば、白金、鉄、銅、ニ
ッケル等の金属の存在下、非常に強い酸化作用を示すた
め、水中に溶解している金属、コロイド状の金属イオン
水酸化物や粒子状の金属あるいは金属酸化物等が膜表面
あるいは内部に付着したり膜に捕捉されることで膜に強
い酸化作用を及ぼす。特に、膜のスキン層は非常に薄く
表面構造も微細であるため、酸化作用による膜の僅かな
構造的変化等が発生すると、膜固有の透過特性に重大な
影響を与えるという問題があった。さらに過酸化水素水
による殺菌が繰り返し行われると、上記のような原因で
膜の透過特性が大きく変化し、膜の寿命を著しくを縮め
るという問題があった。
However, hydrogen peroxide exhibits a very strong oxidizing effect in the presence of metals such as platinum, iron, copper, and nickel, so hydrogen peroxide can be used to remove metals dissolved in water, colloidal metal ion hydroxides, and particulate metals. When metals, metal oxides, etc. adhere to or are captured on the surface or inside of the film, they exert a strong oxidizing effect on the film. In particular, since the skin layer of the membrane is very thin and has a fine surface structure, there is a problem in that if a slight structural change in the membrane due to oxidation occurs, it will seriously affect the membrane's inherent permeability characteristics. Furthermore, when sterilization with hydrogen peroxide solution is repeated, the permeation characteristics of the membrane change significantly due to the reasons mentioned above, resulting in a problem in that the life of the membrane is significantly shortened.

このように膜の透過特性が変化すると、膜を使用した製
品に不良を生ずることになる。また液体透過膜モジュー
ルは、非常に高価であるため、膜の寿命の短縮はコスト
的にもかなり不利である。
Such changes in the permeability properties of the membrane will result in defects in products using the membrane. Further, since liquid permeable membrane modules are very expensive, shortening the life of the membrane is quite disadvantageous in terms of cost.

そこで本発明は、液体透過膜の殺菌において、過酸化水
素により膜を劣化させない改良された殺菌方法を提供す
ることを目的とする。
SUMMARY OF THE INVENTION An object of the present invention is to provide an improved sterilization method for liquid permeable membranes in which the membranes are not deteriorated by hydrogen peroxide.

〔問題点を解決するための手段〕[Means for solving problems]

本発明者らは上記問題点を鋭意検討・研究した結果、過
酸化水素による殺菌方法において特定の前処理を施すこ
とにより、膜を劣化させずに殺菌できる方法を見出した
As a result of intensive study and research into the above-mentioned problems, the present inventors have discovered a method that allows sterilization without deteriorating the membrane by applying a specific pretreatment to the sterilization method using hydrogen peroxide.

即ち、本発明は、過酸化水素による液体透過膜の殺菌方
法において、液体透過膜を過酸化水素で殺菌処理する前
に、pH3以下の酸性液に浸漬し、洗浄することを特徴
とする液体透過膜の殺菌方法を提供するものである。
That is, the present invention provides a method for sterilizing a liquid permeable membrane using hydrogen peroxide, which is characterized in that, before the liquid permeable membrane is sterilized with hydrogen peroxide, the liquid permeable membrane is immersed in an acidic solution having a pH of 3 or less for cleaning. A method for sterilizing membranes is provided.

本発明の方法により殺菌可能な膜の材料は、耐酸性を有
する材料ならば特に限定されず、例えば、ポリスルホン
系樹脂、ポリエーテルスルホン系樹脂、ポリアクリロニ
トリル系樹脂、ポリイミド系樹脂、ポリメチルメタクリ
ル系樹脂、ポリオレフィン系樹脂、シリコン系ゴム等が
あげられる。本発明においては、特に耐酸性が大きい樹
脂であること、また過酸化水素による殺菌回数が多い電
子工業用フィルター材料としてよく用いられるという理
由から、ポリスルホン系樹脂、ポリエーテルスルホン系
樹脂が好ましい。
The material of the membrane that can be sterilized by the method of the present invention is not particularly limited as long as it has acid resistance, and examples include polysulfone resins, polyethersulfone resins, polyacrylonitrile resins, polyimide resins, and polymethyl methacrylic resins. Examples include resin, polyolefin resin, silicone rubber, etc. In the present invention, polysulfone-based resins and polyethersulfone-based resins are preferred because they have particularly high acid resistance and are often used as filter materials for the electronic industry, which require frequent sterilization with hydrogen peroxide.

また、液体透過膜の種類は、どのようなものでもよい。Furthermore, the liquid permeable membrane may be of any type.

例えば、透過する粒子または分子の大きさにより限外濾
過膜、精密濾過膜、逆浸透膜などに分類されるが、いず
れの膜も使用できる。また、膜の形状により中空糸膜、
平膜等があるが、いずれも使用することができる。
For example, membranes are classified into ultrafiltration membranes, microfiltration membranes, reverse osmosis membranes, etc. depending on the size of particles or molecules that permeate, and any of these membranes can be used. In addition, depending on the shape of the membrane, hollow fiber membranes,
There are flat membranes, etc., and any of them can be used.

本発明に使用する酸性液は、特に限定されず、塩酸、硫
酸、酢酸等の無機酸、有機スルホン酸等の有機酸が使用
でき、それらの水溶液およびそれらを含む混合液でもか
まわない。本発明においては水溶液にした場合、酸の解
離度が大きいこと、無機酸であるため膜に溶媒的な作用
を与えないこと、また一般的で取り扱いやすいとの理由
から塩酸が好ましい。
The acidic liquid used in the present invention is not particularly limited, and inorganic acids such as hydrochloric acid, sulfuric acid, and acetic acid, and organic acids such as organic sulfonic acid can be used, and aqueous solutions thereof and mixtures containing them may also be used. In the present invention, hydrochloric acid is preferred because when it is made into an aqueous solution, it has a high degree of acid dissociation, it is an inorganic acid and therefore does not act like a solvent on the membrane, and it is common and easy to handle.

上記酸性液のpiは3以下であることが好ましい。酸性
液のpHが3を超えると金属、金属酸化物あるいは金属
水酸化物などを溶解するのに長い時間を要し、実用的で
ないことから好ましくない。
It is preferable that the pi of the acidic liquid is 3 or less. If the pH of the acidic liquid exceeds 3, it takes a long time to dissolve metals, metal oxides, metal hydroxides, etc., which is not preferred because it is not practical.

本発明の殺菌方法に従えば、上記の酸性液に浸漬した後
、洗浄する。この洗浄は、水中に含まれる金属等の再付
着を防止するために、超純水を使用することが好ましい
According to the sterilization method of the present invention, the material is immersed in the above acidic solution and then washed. It is preferable to use ultrapure water for this cleaning in order to prevent metals and the like contained in the water from re-depositing.

本発明において、過酸化水素による殺菌は通常行〜ねれ
る過酸化水素による殺菌方法と同様な方法でよい。
In the present invention, sterilization using hydrogen peroxide may be carried out by a method similar to a commonly used sterilization method using hydrogen peroxide.

〔作 用〕[For production]

過酸化水素は殺菌に用いられる酸化剤であるが、ある種
の金属たとえば、白金、鉄、銅、ニッケルなどが存在す
るとその触媒作用により、酸化作用が増大することが知
られている。これらの金属は、通常使用する水中に含ま
れており、このうちコロイド状の上記金属イオンの水酸
化物や固体の金属あるいは金属酸化物は液体透過膜モジ
ュールの膜を透過せずに蓄積されたり膜表面あるいは内
部に付着することがある。このような状態で過酸化水素
による殺菌を行うと、過酸化水素は殺菌作用のみならず
膜に強い酸化作用を及ぼし、膜を劣化させる。
Hydrogen peroxide is an oxidizing agent used for sterilization, but it is known that the presence of certain metals, such as platinum, iron, copper, nickel, etc., increases its oxidizing effect due to its catalytic action. These metals are contained in the water that is normally used, and colloidal hydroxides of the metal ions and solid metals or metal oxides may accumulate without passing through the membrane of the liquid permeable membrane module. It may adhere to the membrane surface or inside. If sterilization with hydrogen peroxide is performed in such a state, hydrogen peroxide not only has a sterilizing effect but also has a strong oxidizing effect on the membrane, causing it to deteriorate.

また液体透過膜の製造工程においても上記の金属不純物
が混入することが十分に考えられ、このような場合にお
いても上記のように膜に付着した金属不純物が触媒とし
て働き、膜を劣化させ膜の性能を低下させることになる
In addition, it is highly likely that the metal impurities mentioned above are mixed in during the manufacturing process of liquid permeable membranes, and even in such cases, the metal impurities attached to the membrane act as a catalyst, deteriorating the membrane and causing damage to the membrane. This will reduce performance.

従って、過酸化水素により殺菌処理する前に液体透過膜
に付着している金属不純物を有効にとり除くことが要求
され、本発明はこのような要求から完成されたものであ
る。
Therefore, it is required to effectively remove metal impurities adhering to a liquid permeable membrane before sterilizing it with hydrogen peroxide, and the present invention was completed in response to this requirement.

本発明に従い酸性液で処理することより、半透膜上にあ
る金属性不純物あるいは金属性付着物を酸性液中に溶解
させることができ、過酸化水素による殺菌によっても膜
を劣化させることはない。
By treating with an acidic solution according to the present invention, metallic impurities or metallic deposits on the semipermeable membrane can be dissolved in the acidic solution, and the membrane will not deteriorate even when sterilized with hydrogen peroxide. .

〔実 施 例〕〔Example〕

以下、実施例により本発明の詳細な説明するが本発明は
これらに同等限定されない。
Hereinafter, the present invention will be explained in detail with reference to examples, but the present invention is not limited to these examples.

以下の実施例および比較例で使用する液体透過膜を次の
ようにして製造した。
Liquid permeable membranes used in the following Examples and Comparative Examples were manufactured as follows.

パの& ポリエーテルスルホン(IC1社製300Pパウダー)
20重量%、ポリエチレングリコール(平均分子量20
0) 20重量%、ジメチルスルホキシド(以下DMS
Oと略す)60重量%の組成の紡糸原液を、内部凝固液
としてDNS050重量%および水50重量%の混合液
を用いて二重環状ノズルより水中に押し出した。この際
、原液及び内部凝固液の温度を25゛Cに、外部凝固液
の温度を40°Cにそれぞれ調整した。こうして得られ
た中空糸は内径500μm、外径800t1mであり、
純水に浸漬しておいた。
Pano & Polyether Sulfone (300P powder manufactured by IC1)
20% by weight, polyethylene glycol (average molecular weight 20
0) 20% by weight, dimethyl sulfoxide (hereinafter referred to as DMS)
A spinning stock solution having a composition of 60% by weight (abbreviated as O) was extruded into water through a double annular nozzle using a mixed solution of 50% by weight of DNS0 and 50% by weight of water as an internal coagulation liquid. At this time, the temperature of the stock solution and the internal coagulating liquid was adjusted to 25°C, and the temperature of the external coagulating liquid was adjusted to 40°C. The hollow fiber thus obtained has an inner diameter of 500 μm and an outer diameter of 800 t1m,
It was immersed in pure water.

実施例1 上記製造例で得られた中空糸膜で1001/rdの市水
を濾過した後、0.6Nの塩酸水溶液に室温で1時間浸
漬した。その後、超純水で十分に洗浄して塩酸を除去し
た後、5%HtOt水溶液に140時間浸漬した。こう
して殺菌された中空糸膜の10本につき破断強度を測定
した。結果を第1表に示す。
Example 1 After filtering 1001/rd city water using the hollow fiber membrane obtained in the above production example, it was immersed in a 0.6N hydrochloric acid aqueous solution at room temperature for 1 hour. Thereafter, after thoroughly washing with ultrapure water to remove hydrochloric acid, it was immersed in a 5% HtOt aqueous solution for 140 hours. The breaking strength of 10 hollow fiber membranes sterilized in this way was measured. The results are shown in Table 1.

実施例2 上記製造例で得られた中空糸膜で1001/rdの市水
を濾過した後、Q、OINの塩酸水溶液に室温で2時間
浸漬した。その後、超純水で十分に洗浄して塩酸を除去
した後、5%HtOt水溶液に140時間浸漬した。こ
うして殺菌された中空糸膜の10本につき破断強度を測
定した。結果を第1表に示す。
Example 2 After filtering 1001/rd city water using the hollow fiber membrane obtained in the above production example, it was immersed in an aqueous hydrochloric acid solution of Q and OIN at room temperature for 2 hours. Thereafter, after thoroughly washing with ultrapure water to remove hydrochloric acid, it was immersed in a 5% HtOt aqueous solution for 140 hours. The breaking strength of 10 hollow fiber membranes sterilized in this way was measured. The results are shown in Table 1.

実施例3 上記製造例で得られた中空糸膜に100 f/nfの超
純水を濾過した後、0.6Nの塩酸水溶液に室温で1時
間浸漬した。その後、超純水で十分に洗浄して塩酸を除
去した後、5%H80□水溶液に140時間浸漬した。
Example 3 After filtering ultrapure water at 100 f/nf through the hollow fiber membrane obtained in the above production example, it was immersed in a 0.6N hydrochloric acid aqueous solution at room temperature for 1 hour. Thereafter, after thoroughly washing with ultrapure water to remove hydrochloric acid, it was immersed in a 5% H80□ aqueous solution for 140 hours.

こうして殺菌された中空糸膜の10本につき破断強度を
測定した。結果を第1表に示す。
The breaking strength of 10 hollow fiber membranes sterilized in this way was measured. The results are shown in Table 1.

比較例1 塩酸水溶液に浸漬しなかった以外は、実施例1と同様に
して殺菌し、破断強度を測定した。
Comparative Example 1 The sample was sterilized in the same manner as in Example 1, except that it was not immersed in an aqueous hydrochloric acid solution, and its breaking strength was measured.

結果を第1表に示す。The results are shown in Table 1.

実施例2および3と比較すると、本比較例では酸性液に
よる処理を行わなかったため、過酸化水素の酸化作用を
受けて膜強度が低下していることが明らかである。
When compared with Examples 2 and 3, it is clear that in this comparative example, the film strength was reduced due to the oxidizing action of hydrogen peroxide, since no treatment with an acidic solution was performed.

比較例2 塩酸水溶液に浸漬しなかった以外は、実施例3と同様に
して殺菌し、破断強度を測定した。
Comparative Example 2 It was sterilized in the same manner as in Example 3, except that it was not immersed in an aqueous hydrochloric acid solution, and its breaking strength was measured.

結果を第1表に示す。The results are shown in Table 1.

本比較例では酸性液による処理を行わなかったため、実
施例3と比較して、過酸化水素の酸化作用を受けて膜強
度が低下していることが明らかである。なお、比較例1
に比べて膜強度が高いのは、比較例1では市水の使用に
よる金属性付着物が増加するためであると考えられる。
In this comparative example, since no treatment with an acidic solution was performed, it is clear that the film strength was lowered due to the oxidizing action of hydrogen peroxide compared to Example 3. In addition, comparative example 1
The reason why the film strength is higher than that in Comparative Example 1 is thought to be that metallic deposits increase due to the use of city water.

第1表 〔発明の効果〕 以上説明してきたように、本発明の殺菌方法によれば、
酸性液に浸漬させるという極めて簡単な工程を採用する
だけで過酸化水素の酸化作用による膜の劣化を防止する
ことができる。従って、液体透過膜の寿命を延長するこ
とができ、経済的にも有利である。
Table 1 [Effects of the invention] As explained above, according to the sterilization method of the present invention,
Deterioration of the membrane due to the oxidizing action of hydrogen peroxide can be prevented by simply adopting an extremely simple process of immersing it in an acidic solution. Therefore, the life of the liquid permeable membrane can be extended, which is also economically advantageous.

Claims (3)

【特許請求の範囲】[Claims] (1)過酸化水素による液体透過膜の殺菌方法において
、 液体透過膜を過酸化水素で殺菌処理する前 に、pH3以下の酸性液に浸漬し洗浄することを特徴と
する液体透過膜の殺菌方法。
(1) A method for sterilizing a liquid-permeable membrane using hydrogen peroxide, which comprises washing the liquid-permeable membrane by immersing it in an acidic solution with a pH of 3 or less before sterilizing the liquid-permeable membrane with hydrogen peroxide. .
(2)上記液体透過膜が、ポリエーテルスルホン系樹脂
またはポリスルホン系樹脂よりなる膜である特許請求範
囲第1項記載の液体透過膜の殺菌方法。
(2) The method for sterilizing a liquid permeable membrane according to claim 1, wherein the liquid permeable membrane is a membrane made of polyethersulfone resin or polysulfone resin.
(3)上記酸性液が、塩酸水溶液である特許請求範囲第
1項又は第2項記載の液体透過膜の殺菌方法。
(3) The method for sterilizing a liquid permeable membrane according to claim 1 or 2, wherein the acidic liquid is an aqueous hydrochloric acid solution.
JP30921487A 1987-12-07 1987-12-07 Liquid permeable membrane sterilization method Expired - Lifetime JPH084727B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP30921487A JPH084727B2 (en) 1987-12-07 1987-12-07 Liquid permeable membrane sterilization method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP30921487A JPH084727B2 (en) 1987-12-07 1987-12-07 Liquid permeable membrane sterilization method

Publications (2)

Publication Number Publication Date
JPH01151905A true JPH01151905A (en) 1989-06-14
JPH084727B2 JPH084727B2 (en) 1996-01-24

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
JP30921487A Expired - Lifetime JPH084727B2 (en) 1987-12-07 1987-12-07 Liquid permeable membrane sterilization method

Country Status (1)

Country Link
JP (1) JPH084727B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002361052A (en) * 2001-06-05 2002-12-17 Kurita Water Ind Ltd Ultrafilter membrane for manufacturing ultrapure water and its preliminary washing method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002361052A (en) * 2001-06-05 2002-12-17 Kurita Water Ind Ltd Ultrafilter membrane for manufacturing ultrapure water and its preliminary washing method

Also Published As

Publication number Publication date
JPH084727B2 (en) 1996-01-24

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