JPH01149469U - - Google Patents
Info
- Publication number
- JPH01149469U JPH01149469U JP4632788U JP4632788U JPH01149469U JP H01149469 U JPH01149469 U JP H01149469U JP 4632788 U JP4632788 U JP 4632788U JP 4632788 U JP4632788 U JP 4632788U JP H01149469 U JPH01149469 U JP H01149469U
- Authority
- JP
- Japan
- Prior art keywords
- quartz boat
- compound semiconductor
- single crystal
- manufacturing apparatus
- reinforcing material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010453 quartz Substances 0.000 claims description 8
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 8
- 150000001875 compounds Chemical class 0.000 claims description 6
- 239000004065 semiconductor Substances 0.000 claims description 6
- 239000013078 crystal Substances 0.000 claims description 5
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 239000000463 material Substances 0.000 claims description 2
- 239000012779 reinforcing material Substances 0.000 claims 3
- 239000000470 constituent Substances 0.000 claims 2
- 239000000155 melt Substances 0.000 claims 2
- 238000010438 heat treatment Methods 0.000 claims 1
- 239000000178 monomer Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 230000002787 reinforcement Effects 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4632788U JPH01149469U (de) | 1988-04-06 | 1988-04-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4632788U JPH01149469U (de) | 1988-04-06 | 1988-04-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01149469U true JPH01149469U (de) | 1989-10-17 |
Family
ID=31272598
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4632788U Pending JPH01149469U (de) | 1988-04-06 | 1988-04-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01149469U (de) |
-
1988
- 1988-04-06 JP JP4632788U patent/JPH01149469U/ja active Pending
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