JPH01148852U - - Google Patents

Info

Publication number
JPH01148852U
JPH01148852U JP4579188U JP4579188U JPH01148852U JP H01148852 U JPH01148852 U JP H01148852U JP 4579188 U JP4579188 U JP 4579188U JP 4579188 U JP4579188 U JP 4579188U JP H01148852 U JPH01148852 U JP H01148852U
Authority
JP
Japan
Prior art keywords
light source
visual inspection
inspection device
darkness
brightness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4579188U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4579188U priority Critical patent/JPH01148852U/ja
Publication of JPH01148852U publication Critical patent/JPH01148852U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP4579188U 1988-04-05 1988-04-05 Pending JPH01148852U (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4579188U JPH01148852U (fr) 1988-04-05 1988-04-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4579188U JPH01148852U (fr) 1988-04-05 1988-04-05

Publications (1)

Publication Number Publication Date
JPH01148852U true JPH01148852U (fr) 1989-10-16

Family

ID=31272088

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4579188U Pending JPH01148852U (fr) 1988-04-05 1988-04-05

Country Status (1)

Country Link
JP (1) JPH01148852U (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009080064A (ja) * 2007-09-27 2009-04-16 Nuflare Technology Inc パターン検査装置及びパターン検査方法
JP2014206547A (ja) * 2008-01-16 2014-10-30 オルボテック リミテッド 複数のカメラを使用した基板検査
WO2021240025A1 (fr) * 2020-05-26 2021-12-02 Cin Advanced Systems Group S.L. Dispositif d'inspection de défauts superficiels, ligne d'inspection de défauts superficiels de carrosseries de véhicules et procédé d'inspection de défauts superficiels

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009080064A (ja) * 2007-09-27 2009-04-16 Nuflare Technology Inc パターン検査装置及びパターン検査方法
JP2014206547A (ja) * 2008-01-16 2014-10-30 オルボテック リミテッド 複数のカメラを使用した基板検査
US11113803B2 (en) 2008-01-16 2021-09-07 Orbotech Ltd. Inspection of a substrate using multiple cameras
WO2021240025A1 (fr) * 2020-05-26 2021-12-02 Cin Advanced Systems Group S.L. Dispositif d'inspection de défauts superficiels, ligne d'inspection de défauts superficiels de carrosseries de véhicules et procédé d'inspection de défauts superficiels

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