JPH01147271U - - Google Patents

Info

Publication number
JPH01147271U
JPH01147271U JP1988042830U JP4283088U JPH01147271U JP H01147271 U JPH01147271 U JP H01147271U JP 1988042830 U JP1988042830 U JP 1988042830U JP 4283088 U JP4283088 U JP 4283088U JP H01147271 U JPH01147271 U JP H01147271U
Authority
JP
Japan
Prior art keywords
evaporation source
growth chamber
opening
shutter
shaft
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1988042830U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0527501Y2 (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988042830U priority Critical patent/JPH0527501Y2/ja
Priority to EP89105248A priority patent/EP0335267B1/en
Priority to DE68916457T priority patent/DE68916457T2/de
Priority to EP92117113A priority patent/EP0529687B1/en
Priority to DE68926577T priority patent/DE68926577T2/de
Priority to TW080105276A priority patent/TW202485B/zh
Priority to US07/329,313 priority patent/US4944246A/en
Priority to CA000594977A priority patent/CA1333038C/en
Priority to KR1019890004152A priority patent/KR930010750B1/ko
Publication of JPH01147271U publication Critical patent/JPH01147271U/ja
Priority to CA000616594A priority patent/CA1333039C/en
Priority to KR1019930013044A priority patent/KR930010751B1/ko
Application granted granted Critical
Publication of JPH0527501Y2 publication Critical patent/JPH0527501Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP1988042830U 1988-03-30 1988-03-30 Expired - Lifetime JPH0527501Y2 (cs)

Priority Applications (11)

Application Number Priority Date Filing Date Title
JP1988042830U JPH0527501Y2 (cs) 1988-03-30 1988-03-30
EP89105248A EP0335267B1 (en) 1988-03-30 1989-03-23 Molecular beam epitaxy apparatus
DE68916457T DE68916457T2 (de) 1988-03-30 1989-03-23 Einrichtung zur Molekularstrahlepitaxie.
EP92117113A EP0529687B1 (en) 1988-03-30 1989-03-23 Molecular beam epitaxy apparatus
DE68926577T DE68926577T2 (de) 1988-03-30 1989-03-23 Einrichtung zur Molekularstrahlepitaxie
TW080105276A TW202485B (cs) 1988-03-30 1989-03-24
US07/329,313 US4944246A (en) 1988-03-30 1989-03-27 Molecular beam epitaxy apparatus
CA000594977A CA1333038C (en) 1988-03-30 1989-03-29 Molecular beam epitaxy apparatus
KR1019890004152A KR930010750B1 (ko) 1988-03-30 1989-03-30 분자선 에피택시 장치
CA000616594A CA1333039C (en) 1988-03-30 1993-03-30 Molecular beam epitaxy apparatus
KR1019930013044A KR930010751B1 (ko) 1988-03-30 1993-07-09 분자선 에피택시 장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988042830U JPH0527501Y2 (cs) 1988-03-30 1988-03-30

Publications (2)

Publication Number Publication Date
JPH01147271U true JPH01147271U (cs) 1989-10-11
JPH0527501Y2 JPH0527501Y2 (cs) 1993-07-13

Family

ID=31269234

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988042830U Expired - Lifetime JPH0527501Y2 (cs) 1988-03-30 1988-03-30

Country Status (1)

Country Link
JP (1) JPH0527501Y2 (cs)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61210615A (ja) * 1985-03-15 1986-09-18 Komatsu Ltd 薄膜形成装置
JPS62141716A (ja) * 1985-12-17 1987-06-25 Agency Of Ind Science & Technol 分子線エピタキシヤル成長装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61210615A (ja) * 1985-03-15 1986-09-18 Komatsu Ltd 薄膜形成装置
JPS62141716A (ja) * 1985-12-17 1987-06-25 Agency Of Ind Science & Technol 分子線エピタキシヤル成長装置

Also Published As

Publication number Publication date
JPH0527501Y2 (cs) 1993-07-13

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