JPH01147271U - - Google Patents

Info

Publication number
JPH01147271U
JPH01147271U JP1988042830U JP4283088U JPH01147271U JP H01147271 U JPH01147271 U JP H01147271U JP 1988042830 U JP1988042830 U JP 1988042830U JP 4283088 U JP4283088 U JP 4283088U JP H01147271 U JPH01147271 U JP H01147271U
Authority
JP
Japan
Prior art keywords
evaporation source
growth chamber
opening
shutter
shaft
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1988042830U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0527501Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988042830U priority Critical patent/JPH0527501Y2/ja
Priority to DE68926577T priority patent/DE68926577T2/de
Priority to EP89105248A priority patent/EP0335267B1/en
Priority to EP92117113A priority patent/EP0529687B1/en
Priority to DE68916457T priority patent/DE68916457T2/de
Priority to TW080105276A priority patent/TW202485B/zh
Priority to US07/329,313 priority patent/US4944246A/en
Priority to CA000594977A priority patent/CA1333038C/en
Priority to KR1019890004152A priority patent/KR930010750B1/ko
Publication of JPH01147271U publication Critical patent/JPH01147271U/ja
Priority to CA000616594A priority patent/CA1333039C/en
Priority to KR1019930013044A priority patent/KR930010751B1/ko
Application granted granted Critical
Publication of JPH0527501Y2 publication Critical patent/JPH0527501Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP1988042830U 1988-03-30 1988-03-30 Expired - Lifetime JPH0527501Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (11)

Application Number Priority Date Filing Date Title
JP1988042830U JPH0527501Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-03-30 1988-03-30
DE68926577T DE68926577T2 (de) 1988-03-30 1989-03-23 Einrichtung zur Molekularstrahlepitaxie
EP89105248A EP0335267B1 (en) 1988-03-30 1989-03-23 Molecular beam epitaxy apparatus
EP92117113A EP0529687B1 (en) 1988-03-30 1989-03-23 Molecular beam epitaxy apparatus
DE68916457T DE68916457T2 (de) 1988-03-30 1989-03-23 Einrichtung zur Molekularstrahlepitaxie.
TW080105276A TW202485B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-03-30 1989-03-24
US07/329,313 US4944246A (en) 1988-03-30 1989-03-27 Molecular beam epitaxy apparatus
CA000594977A CA1333038C (en) 1988-03-30 1989-03-29 Molecular beam epitaxy apparatus
KR1019890004152A KR930010750B1 (ko) 1988-03-30 1989-03-30 분자선 에피택시 장치
CA000616594A CA1333039C (en) 1988-03-30 1993-03-30 Molecular beam epitaxy apparatus
KR1019930013044A KR930010751B1 (ko) 1988-03-30 1993-07-09 분자선 에피택시 장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988042830U JPH0527501Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-03-30 1988-03-30

Publications (2)

Publication Number Publication Date
JPH01147271U true JPH01147271U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1989-10-11
JPH0527501Y2 JPH0527501Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-07-13

Family

ID=31269234

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988042830U Expired - Lifetime JPH0527501Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1988-03-30 1988-03-30

Country Status (1)

Country Link
JP (1) JPH0527501Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61210615A (ja) * 1985-03-15 1986-09-18 Komatsu Ltd 薄膜形成装置
JPS62141716A (ja) * 1985-12-17 1987-06-25 Agency Of Ind Science & Technol 分子線エピタキシヤル成長装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61210615A (ja) * 1985-03-15 1986-09-18 Komatsu Ltd 薄膜形成装置
JPS62141716A (ja) * 1985-12-17 1987-06-25 Agency Of Ind Science & Technol 分子線エピタキシヤル成長装置

Also Published As

Publication number Publication date
JPH0527501Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-07-13

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