JPH01146063U - - Google Patents

Info

Publication number
JPH01146063U
JPH01146063U JP4184388U JP4184388U JPH01146063U JP H01146063 U JPH01146063 U JP H01146063U JP 4184388 U JP4184388 U JP 4184388U JP 4184388 U JP4184388 U JP 4184388U JP H01146063 U JPH01146063 U JP H01146063U
Authority
JP
Japan
Prior art keywords
seal
seal structure
seal members
vacuum flange
sealed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4184388U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4184388U priority Critical patent/JPH01146063U/ja
Publication of JPH01146063U publication Critical patent/JPH01146063U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Gasket Seals (AREA)
  • Sealing Devices (AREA)
  • Pressure Vessels And Lids Thereof (AREA)
JP4184388U 1988-03-31 1988-03-31 Pending JPH01146063U (US06168655-20010102-C00055.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4184388U JPH01146063U (US06168655-20010102-C00055.png) 1988-03-31 1988-03-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4184388U JPH01146063U (US06168655-20010102-C00055.png) 1988-03-31 1988-03-31

Publications (1)

Publication Number Publication Date
JPH01146063U true JPH01146063U (US06168655-20010102-C00055.png) 1989-10-06

Family

ID=31268270

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4184388U Pending JPH01146063U (US06168655-20010102-C00055.png) 1988-03-31 1988-03-31

Country Status (1)

Country Link
JP (1) JPH01146063U (US06168655-20010102-C00055.png)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0534357U (ja) * 1991-09-03 1993-05-07 石川島播磨重工業株式会社 容器等におけるフランジ部のシール構造
JP2001289400A (ja) * 2000-04-10 2001-10-19 Ulvac Japan Ltd 水素処理装置
WO2004072517A1 (ja) * 2003-02-12 2004-08-26 Koganei Corporation 真空供給継手
JP2005325973A (ja) * 2004-05-17 2005-11-24 Sigma Meltec Ltd 処理チャンバ装置のシール構造
JP2010253919A (ja) * 2009-04-03 2010-11-11 Nissan Motor Co Ltd 金型シール構造及び金型シール方法
JP2014114849A (ja) * 2012-12-07 2014-06-26 Ihi Corp ２重シール部のシール機構

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0534357U (ja) * 1991-09-03 1993-05-07 石川島播磨重工業株式会社 容器等におけるフランジ部のシール構造
JP2001289400A (ja) * 2000-04-10 2001-10-19 Ulvac Japan Ltd 水素処理装置
JP4674776B2 (ja) * 2000-04-10 2011-04-20 株式会社アルバック 水素処理方法
WO2004072517A1 (ja) * 2003-02-12 2004-08-26 Koganei Corporation 真空供給継手
JP2005325973A (ja) * 2004-05-17 2005-11-24 Sigma Meltec Ltd 処理チャンバ装置のシール構造
JP2010253919A (ja) * 2009-04-03 2010-11-11 Nissan Motor Co Ltd 金型シール構造及び金型シール方法
JP2014114849A (ja) * 2012-12-07 2014-06-26 Ihi Corp ２重シール部のシール機構

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