JPH01145128U - - Google Patents

Info

Publication number
JPH01145128U
JPH01145128U JP4179088U JP4179088U JPH01145128U JP H01145128 U JPH01145128 U JP H01145128U JP 4179088 U JP4179088 U JP 4179088U JP 4179088 U JP4179088 U JP 4179088U JP H01145128 U JPH01145128 U JP H01145128U
Authority
JP
Japan
Prior art keywords
semiconductor wafer
base
semiconductor
optical sensor
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4179088U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4179088U priority Critical patent/JPH01145128U/ja
Publication of JPH01145128U publication Critical patent/JPH01145128U/ja
Pending legal-status Critical Current

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Landscapes

  • Processing Of Stones Or Stones Resemblance Materials (AREA)
JP4179088U 1988-03-28 1988-03-28 Pending JPH01145128U (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4179088U JPH01145128U (cs) 1988-03-28 1988-03-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4179088U JPH01145128U (cs) 1988-03-28 1988-03-28

Publications (1)

Publication Number Publication Date
JPH01145128U true JPH01145128U (cs) 1989-10-05

Family

ID=31268221

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4179088U Pending JPH01145128U (cs) 1988-03-28 1988-03-28

Country Status (1)

Country Link
JP (1) JPH01145128U (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103662694A (zh) * 2012-09-25 2014-03-26 东丽工程株式会社 基板浮起装置以及基板浮起量测量方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS605117B2 (ja) * 1977-08-25 1985-02-08 松下電器産業株式会社 カラービデオ信号の記録再生方式
JPS61158138A (ja) * 1984-12-28 1986-07-17 Nec Kansai Ltd ウエハ表面の突起物除去装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS605117B2 (ja) * 1977-08-25 1985-02-08 松下電器産業株式会社 カラービデオ信号の記録再生方式
JPS61158138A (ja) * 1984-12-28 1986-07-17 Nec Kansai Ltd ウエハ表面の突起物除去装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103662694A (zh) * 2012-09-25 2014-03-26 东丽工程株式会社 基板浮起装置以及基板浮起量测量方法
JP2014067765A (ja) * 2012-09-25 2014-04-17 Toray Eng Co Ltd 基板浮上装置および基板浮上量測定方法

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