JPH01144603A - Magnetic film - Google Patents
Magnetic filmInfo
- Publication number
- JPH01144603A JPH01144603A JP30291687A JP30291687A JPH01144603A JP H01144603 A JPH01144603 A JP H01144603A JP 30291687 A JP30291687 A JP 30291687A JP 30291687 A JP30291687 A JP 30291687A JP H01144603 A JPH01144603 A JP H01144603A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- film
- transition metal
- alloy film
- corrosion resistance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910052723 transition metal Inorganic materials 0.000 claims abstract description 17
- 229910052727 yttrium Inorganic materials 0.000 claims abstract description 7
- 229910001092 metal group alloy Inorganic materials 0.000 claims abstract description 5
- 229910052782 aluminium Inorganic materials 0.000 claims abstract description 4
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 4
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 3
- 229910052802 copper Inorganic materials 0.000 claims abstract 2
- 229910052737 gold Inorganic materials 0.000 claims abstract 2
- 229910052709 silver Inorganic materials 0.000 claims abstract 2
- 229910052742 iron Inorganic materials 0.000 claims description 2
- 229910000640 Fe alloy Inorganic materials 0.000 abstract description 21
- 238000005260 corrosion Methods 0.000 abstract description 19
- 230000007797 corrosion Effects 0.000 abstract description 19
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 abstract description 18
- 230000004907 flux Effects 0.000 abstract description 9
- 239000010408 film Substances 0.000 description 52
- 230000007423 decrease Effects 0.000 description 7
- 239000000463 material Substances 0.000 description 5
- 239000000758 substrate Substances 0.000 description 5
- 229910005347 FeSi Inorganic materials 0.000 description 4
- UQSXHKLRYXJYBZ-UHFFFAOYSA-N Iron oxide Chemical compound [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- 230000004083 survival effect Effects 0.000 description 4
- 238000002474 experimental method Methods 0.000 description 3
- 230000003647 oxidation Effects 0.000 description 3
- 238000007254 oxidation reaction Methods 0.000 description 3
- KDLHZDBZIXYQEI-UHFFFAOYSA-N palladium Substances [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 3
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 3
- 239000002356 single layer Substances 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000001659 ion-beam spectroscopy Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 239000010948 rhodium Substances 0.000 description 2
- 229910052715 tantalum Inorganic materials 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 241000208152 Geranium Species 0.000 description 1
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 1
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 1
- 230000002730 additional effect Effects 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000010410 layer Substances 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 229910052703 rhodium Inorganic materials 0.000 description 1
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 description 1
- 229910052707 ruthenium Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 241000894007 species Species 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- 239000013077 target material Substances 0.000 description 1
- 150000003624 transition metals Chemical class 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
- VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Landscapes
- Magnetic Record Carriers (AREA)
- Thin Magnetic Films (AREA)
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は、磁気テープ、磁気ディスク等の磁気記録媒体
、あるいは高密度記録用の磁気ヘッド等に用いて好適な
磁性体膜に関し、特にその耐蝕性の改善技術に関するも
のである。DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to a magnetic film suitable for use in magnetic recording media such as magnetic tapes and magnetic disks, or magnetic heads for high-density recording, and particularly relates to its corrosion resistance. This is related to improvement technology.
従来の技術およびその問題点
磁気テープ、磁気ディスク等の磁気記録媒体、あるいは
磁気記録再生用の磁気ヘッドの磁極等を構成する磁性材
として、飽和磁束密度大きい、保磁力が小さい等の磁気
特性が優れていることから、従来よりＦｅ（純鉄）を母
材としてＡＩやＳｉなとの第２の元素を添加したＦｅ金
属合金膜が多く用いられて来ている。この場合、Ｆｅ単
体であると、磁気特性的には不十分であり、単体では到
底実用に供し得ない。したがって、現状ではＦｅを母材
とし、この母材Ｆｅに」二連したような第２元素を添加
している。このＦｅ合金の単層膜は、磁気特性的にもそ
れほど問題はなく、高周波電流の通電に伴う渦電流損も
少なく、それらの点では実用上それほど問題のない磁性
体膜である。しかし、このＦｅ合金単層膜は、後にも述
へるように、経時変化による耐蝕性の低下の点で問題が
あり、例えば高温、高湿下で放置しておくと、高々１０
０時間［Ｈｒ］を越えた程度で酸化か著しく進行してし
まう。したがって、Ｆｅ合金単層膜のみでは、高密度記
録用デバイスの磁性体膜として実用に供することはでき
ず、耐蝕性の改善が強く要望されていた。゛
この発明は、以上の点に績み提案されたものであって、
耐蝕性に優れた記−録デバイス用の磁性体膜を提供する
ことを目的とするものである。Conventional technology and its problems Magnetic materials constituting magnetic recording media such as magnetic tapes and magnetic disks, or magnetic poles of magnetic heads for magnetic recording and reproduction, have magnetic properties such as high saturation magnetic flux density and low coercive force. Due to its superior properties, Fe metal alloy films made of Fe (pure iron) as a base material and a second element such as AI or Si have been widely used. In this case, Fe alone has insufficient magnetic properties and cannot be put to practical use at all. Therefore, at present, Fe is used as a base material, and a second element like "double" is added to this base material Fe. This single-layer film of Fe alloy has no problems in terms of magnetic properties, and has little eddy current loss due to high-frequency current flow, so it is a magnetic film that does not pose much of a problem in practice in these respects. However, as will be discussed later, this Fe alloy single-layer film has a problem in that its corrosion resistance deteriorates over time.
If the time exceeds 0 hours [Hr], oxidation will proceed significantly. Therefore, a Fe alloy single-layer film alone cannot be put to practical use as a magnetic film for high-density recording devices, and there has been a strong demand for improved corrosion resistance.゛This invention was proposed based on the above points,
The object of the present invention is to provide a magnetic film for a recording device that has excellent corrosion resistance.
問題点を解決するための手段
本発明は、Ｆｅを主成分とし、Ｓ ｔ、Ｃ，Ｉ Ａｅｓ
ＹまたはＧｅのいずれか少なくとも１つの元素を添加し
たＦｅ金属合金膜中に、Ｃｕｓ Ａｇｔ Ａｕを除く遷
移金属元素を少なくとも一種含有させた磁性体膜を要旨
とする。Means for Solving the Problems The present invention uses Fe as the main component, S t, C, I Aes
The gist of the present invention is a magnetic film in which at least one transition metal element other than Cus, Agt, and Au is contained in a Fe metal alloy film to which at least one element of Y or Ge is added.
作用
母材ＦｅにＳｉ、Ｃ１Ａｌ、ＹまたはＧｅのいずれか少
なくとも１つの元素を添加したＦｅ金属合金膜中にＣｕ
Ｎ Ａ ｇ １Ａ ｕを除く遷移金属元素を少なくと
も１種微少量含有させると、耐蝕性が格段に改善向上さ
れた磁性体膜が得られる。Cu is added to the Fe metal alloy film in which at least one element of Si, C1Al, Y, or Ge is added to the working base material Fe.
When at least one transition metal element other than N A g 1A u is contained in a small amount, a magnetic film with significantly improved corrosion resistance can be obtained.
実施例
以下、本発明の実施例について図面を参照して説明する
。Embodiments Hereinafter, embodiments of the present invention will be described with reference to the drawings.
第１図は本発明に係る磁性体膜の基本構成を示してい□
る。この磁性体膜１０は、基本的にはＦｅを主成分とし
、、ＡＩ（アルミニウム）、Ｓｉ （シリコン）、Ｃ（
カーボン）、Ｙ、（イツトリウム）あるいはＧｅ（ゲル
アニウム）の中からいずれか少なくとも１つの元素を選
択し、第２元素として微少量含有させたＦｅ合金膜の中
に、さらにＣｕｌＡｇ１Ａｕを除く遷移金属元素、すな
わちＰ町（白金）、Ｔａ（タンタル）、Ｚｒ（ジルコニ
ウム）、Ｎｉ にッケル）、ＣＯ（：Ｉバルト）、Ｐｄ
（パラジウム） 、Ｒｕ （ルテニウム）、Ｗ（タング
ステン）、Ｒｈ（ロジウム）などの元素を少なくとも１
種、微少量添加した膜組成を持つ。この磁性体膜１０は
、第１図に示すように、スパッタ法等により、ガラス、
セラミック等の非磁性基板１１上に成膜される。Figure 1 shows the basic structure of the magnetic film according to the present invention.
Ru. This magnetic film 10 basically has Fe as its main component, AI (aluminum), Si (silicon), C(
At least one element selected from carbon), Y, (yttrium) or Ge (geranium) is added to the Fe alloy film containing a very small amount as a second element, and a transition metal element other than CulAg1Au, Namely, P town (platinum), Ta (tantalum), Zr (zirconium), Ni nickel), CO (:I baltic), Pd
(palladium), Ru (ruthenium), W (tungsten), Rh (rhodium), etc.
It has a film composition with a small amount of seeds added. As shown in FIG. 1, this magnetic film 10 is made of glass,
A film is formed on a nonmagnetic substrate 11 made of ceramic or the like.
Ｆｅ合金膜中に添加される遷移金属は、１種又は２種以
上の数種を組合わせて用いられる。The transition metals added to the Fe alloy film may be used alone or in combination of two or more.
Ｆｅ合金膜としては、保磁力Ｈｅが５０ｅ以下のＦｅＡ
ｌ、Ｆ ｅ Ｓ ｔ １Ｆ ｅ Ｃ１Ｆ ｅ Ｙｚある
いはＦｅＧｅの５種が適用される。その中から耐熱性の
面で最も良い結果が得られるものを選択して用いられば
良い。このＦｅ合金膜中に添加する遷移金属元素の量は
、１〜１０ａｔ、％の範囲に選定される。実験結果によ
ると、遷移金属元素の添加量が１０ａｔ、％を越えると
高い飽和磁束密度Ｂｓ＝４πＭｓ（ＫＧ：キロガウス）
が得られない。一方、１ａｔ、％未満の場合は、後述す
る耐蝕性の向上が認められない。したがって、ＦｅＡ１
等のＦｅ合金膜中に添加する遷移金属元素の量は、上記
のように１〜１０ａｔ、％の範囲にあることが必要であ
る。As the Fe alloy film, FeA with a coercive force He of 50e or less is used.
1, F e S t 1 F e C1 F e Yz or FeGe are applicable. Among them, the one that provides the best results in terms of heat resistance may be selected and used. The amount of transition metal element added to this Fe alloy film is selected in the range of 1 to 10 at.%. According to experimental results, when the amount of transition metal elements added exceeds 10at.%, the saturation magnetic flux density becomes high, Bs = 4πMs (KG: kilogauss).
is not obtained. On the other hand, if it is less than 1 at.%, no improvement in corrosion resistance, which will be described later, will be observed. Therefore, FeA1
The amount of the transition metal element added to the Fe alloy film must be in the range of 1 to 10 at.% as described above.
以上のような磁性体膜１０は、イオンビームスパッタ法
、ＲＦマグネトロンスパッタ法、真空蒸着法等の薄膜形
成技術によって非磁性基板１１上に成膜される。The magnetic film 10 as described above is formed on the nonmagnetic substrate 11 by a thin film forming technique such as ion beam sputtering, RF magnetron sputtering, or vacuum evaporation.
例えば、使用アルゴンガス圧ｌＸ１０−＋Ｔｏｒｒの真
空槽内において、イオンビームスパッタ法により、ガラ
スまたはセラミック等の非磁性基板１１上に磁性体膜１
０を所定膜厚で成膜される。For example, a magnetic film 1 is deposited on a non-magnetic substrate 11 made of glass or ceramic by ion beam sputtering in a vacuum chamber with an argon gas pressure of 1X10-+ Torr.
0 to a predetermined thickness.
その場合に用いられるターゲット物質は、上述した５種
の中のいずれか少なくとも１つのＦｅ合金膜中に、やは
り上述した少なくとも１つの遷移金属元素又はその数種
を組合わせて微少量混合させた組成を持つ。The target material used in this case has a composition in which at least one of the above-mentioned transition metal elements or a combination of several thereof is mixed in a minute amount in at least one Fe alloy film of the above-mentioned five types. have.
非磁性基板１１上に形成される磁性体膜１０の膜厚は、
適用される記録デバイスへの用途にもよるが、例えば０
．０５μｍ〜１００μｍ程度と薄膜である。The thickness of the magnetic film 10 formed on the non-magnetic substrate 11 is
Depending on the application to the applicable recording device, for example 0
．． It is a thin film, about 0.05 μm to 100 μm.
以上のように成膜された磁性体膜１０は、それのみで十
分な特性が得られるのであるが、さらに必要であれば、
５００℃〜８００℃、到達真空度１×１０〜１０ Ｔ
ｏｒｒの真空加熱中において、７０００ｅ （エルステ
ッド）程度の回転磁場を与えながら熱処理が行われる。The magnetic film 10 formed as described above can provide sufficient characteristics by itself, but if additional properties are required,
500℃~800℃, ultimate vacuum 1x10~10T
During the vacuum heating of orr, heat treatment is performed while applying a rotating magnetic field of about 7000e (Oersted).
これで、磁気特性、耐蝕性ともにさらに改善される。This further improves both magnetic properties and corrosion resistance.
次に、第２図、第３図は、本発明の磁性体膜１０につい
て耐蝕性の面から見た実験結果を示す特性図である。こ
の実験では、温度６０″Ｃ１相対湿度９０％の雰囲気中
に磁性体膜１０を放置したときの酸化に伴う飽和磁束密
度Ｂｓの低下の度合いを測定している。第２図、第３図
で横軸は放置時間［Ｈｒ］、縦軸は飽和磁束密度の残存
率、すなわち、放置時間ｔのときの飽和磁束密度Ｂ ｓ
（ｔ）＝４πＭ ｓ （ｔ）と時間零のときの飽和磁
束密度Ｂｓ （ｏ） ＝ ４ πＭ ｓ （ｏ）の比を
表している。第２図、第３図において、実線で示すグラ
フは本発明に係る磁性体膜の特性を表し、破線で示すグ
ラフはＦｅ合金単体膜およびＦｅ単体膜の特性を表して
いる。この実験では、Ｆｅ合金単体膜として上述したＦ
ｅ５ｉｓ ＦｅＧｅｔ ＦｅＣ１ＦｅＡｌ、ＦｅＹの５
種、また、本発明に係る磁性体膜の代表例として旧掲し
た５種のＦｅ合全全体膜遷移金属元素の１つｐｔを１〜
１０ａｔ、％の範囲て微少量（所定量）含有させたもの
が用いられている。Next, FIGS. 2 and 3 are characteristic diagrams showing experimental results regarding the magnetic film 10 of the present invention from the viewpoint of corrosion resistance. In this experiment, the degree of decrease in the saturation magnetic flux density Bs due to oxidation was measured when the magnetic film 10 was left in an atmosphere with a temperature of 60'' C1 and a relative humidity of 90%. The horizontal axis is the standing time [Hr], and the vertical axis is the residual rate of the saturation magnetic flux density, that is, the saturation magnetic flux density B s at the standing time t.
(t) = 4πM s (t) and the saturation magnetic flux density Bs (o) = 4πM s (o) at time zero. In FIGS. 2 and 3, the graphs shown by solid lines represent the characteristics of the magnetic film according to the present invention, and the graphs shown by broken lines represent the characteristics of the Fe alloy film and the Fe film. In this experiment, the above-mentioned F
e5is FeGet FeC1FeAl, 5 of FeY
Species, and one of the five types of transition metal elements previously listed as representative examples of the magnetic film according to the present invention for the entire film of Fe, from 1 to 1 pt.
A very small amount (predetermined amount) of 10at% is used.
この比較例より明らかなように、本発明に係る磁性体膜
１０は、Ｐｔを微少量含有させたことにより、Ｆｅ
Ｐ ｔ−Ｃ１Ｆｅ−Ｐ ｔ Ｇｅｓ Ｆｅ−Ｐｔ−
Ｙ、Ｆｅ−Ｐｔ−Ａｌの４種は５００時間以」二の長時
間にわたって高温高湿下で放置しても初期ｆＭ１．０に
対して略〜定を保ち、極めて良好な特性を示すことが判
る。但し、Ｆ ｅ Ｐ ｔ−８ｉは、母材ＦｅＳｉの
性質上、２５０時間以上の放置時間で残存率が多少緩や
かに低下する傾向を示すが、それでも、ＦｅＳｉ単体膜
に比へると、耐蝕性が格段に高く改善され、実用上良好
な特性が得られていることがよく判る。As is clear from this comparative example, the magnetic film 10 according to the present invention contains Fe in a small amount by containing a small amount of Pt.
P t-C1Fe-P t Ges Fe-Pt-
The four types of Y, Fe-Pt-Al maintain approximately to constant initial fM1.0 even after being left under high temperature and high humidity for a long time of 500 hours or more, and exhibit extremely good characteristics. I understand. However, due to the nature of the base material FeSi, F e P t-8i shows a tendency for the survival rate to decrease somewhat gradually after being left for more than 250 hours, but it still has poor corrosion resistance when compared to a single FeSi film. It is clearly seen that the properties are significantly improved and that practically good characteristics are obtained.
一方、第２図の破線で示すグラフのように、ＦｅｃｌＦ
ｅＧｅｓ Ｆｅｓ ｊの８種のＦｅ合金単体膜グループ
は、放置開始当初より急激に残存率が低下し、１５０時
間程度の放置時間で酸化鉄と路間−の値０．２以下のレ
ベルまで低減する。したかって、この３種のＦｅ合金単
体膜Ｆ ｅ ＣＮ Ｆ ｅＧｅｌＦｅＳｉは、それのみ
では耐蝕性の点で実用上全く使用不可である。また、第
３図の破線で示すグラフのように、ＦｅＡ１、ＦｅＹの
２種のＦｅ合金単体膜のグループは、８０時時間開まで
は初期値１．０を保つが、それを越えるとかなりの比率
で残存率が低下して行き、５００時間を越えると本発明
のＦｅ−Ｐｔ−Ａｌ、Ｆｅ−Ｐｔ−Ｙに一比べて大幅に
低減し、酸化に伴い耐蝕性か劣化し、それほど特性が良
くないことかよく判る。On the other hand, as shown in the graph indicated by the broken line in Fig. 2, FeclF
For the 8 types of Fe alloy single film group of eGes Fes j, the survival rate decreases rapidly from the beginning of leaving it, and after about 150 hours of leaving it, it decreases to a level of 0.2 or less between iron oxide and road gap. . Therefore, these three types of Fe alloy single films F e CN Fe Gel FeSi cannot be used practically at all in terms of corrosion resistance alone. In addition, as shown in the graph shown by the broken line in Figure 3, the group of two types of Fe alloy single films, FeA1 and FeY, maintains an initial value of 1.0 until opening at 80 o'clock, but after that, the The survival rate decreases depending on the ratio, and after 500 hours, it decreases significantly compared to the Fe-Pt-Al and Fe-Pt-Y of the present invention, and the corrosion resistance deteriorates due to oxidation, and the characteristics are not as good. I can clearly see that this is not a good thing.
この２種のＦｅ合金単体膜ＦｅＡ１、ＦｅＹは第３図の
破線で示す３種のＦｅ合金単体膜ＦｅＳｉ、ＦｅＧｅ１
ＦｅＣに比べ、ある程度良好な特性を示すが、本発明の
磁性体膜に比べると耐蝕性がかなり低く、実用上問題で
あり使用不適である。また、Ｆｅ単体膜は放置開始当初
より急速に残存率が低下して行き、５００時間を越える
と酸化鉄化し、Ｆ ｅ単体では実用に供し得ないことが
判る。These two types of Fe alloy single films FeA1 and FeY are different from the three types of Fe alloy single films FeSi and FeGe1 shown by broken lines in FIG.
Although it exhibits better characteristics to some extent than FeC, it has considerably lower corrosion resistance than the magnetic film of the present invention, which is a practical problem and unsuitable for use. In addition, the survival rate of the single Fe film rapidly decreases from the time it is left to stand, and after 500 hours it turns into iron oxide, indicating that Fe alone cannot be put to practical use.
以上のように、本発明に係る磁性体膜は、遷移金属元素
ｐｔの添加により、耐蝕性が格段に改善され、その改善
効果が著しいことが良（判った。As described above, it has been found that the corrosion resistance of the magnetic film according to the present invention is significantly improved by adding the transition metal element pt, and the improvement effect is remarkable.
これに対し、比較例として示した５種のＦｅ合金単体膜
は、磁気特性がどのように優れていようとも、耐蝕性の
点で実用上使用に耐えず、あるいは使用不可である。On the other hand, no matter how excellent the magnetic properties of the five types of Fe alloy single films shown as comparative examples are, they cannot withstand or be used practically in terms of corrosion resistance.
なお、上記実施例では、Ｆｅ合金膜中に添加する遷移金
属元素の代表例としてｐｔを例示したが、その他の遷移
金属元素Ｎｉ、Ｃｏ１Ｐｄ５ Ｒｈ１Ｒｕ ％ Ｔ ａ
Ｎ Ｚ ｒを添加した場合においても、」二連したの
と同様の優れた耐蝕性改善の効果が得られることが実験
によって確認されている。In the above example, pt was exemplified as a typical example of the transition metal element added to the Fe alloy film, but other transition metal elements such as Ni, Co1Pd5 Rh1Ru % Ta
It has been confirmed through experiments that even when NZr is added, the same excellent effect of improving corrosion resistance as in the case of adding two layers can be obtained.
発明の詳細
な説明したとおり、本発明によれば、Ｆｅ合金膜に微少
量の遷移金属元素を添加したことにより、磁気特性的に
優れたＦｅ合金膜の耐蝕性が格段に改善され、磁気特性
、耐蝕性共に優れた磁性体膜が得られる。As described in detail, according to the present invention, by adding a small amount of transition metal element to the Fe alloy film, the corrosion resistance of the Fe alloy film, which has excellent magnetic properties, is significantly improved, and the magnetic properties are improved. A magnetic film with excellent corrosion resistance can be obtained.
第１図は本発明に係る磁性体膜を示す断１Ｉｉｉ図、第
２図、第３図は本発明に係る磁性体膜の耐蝕性を飽和磁
束密度の残存率の面から見た特性図である。
１０・・・磁性体膜、
１１・会・非磁性基板、FIG. 1 is a cross-sectional view showing the magnetic film according to the present invention, and FIGS. 2 and 3 are characteristic diagrams showing the corrosion resistance of the magnetic film according to the present invention in terms of the residual rate of saturation magnetic flux density. be. 10...Magnetic film, 11.Nonmagnetic substrate,
Claims (2)
ｅのいずれか少なくとも１つの元素を添加したＦｅ金属
合金膜中に、Ｃｕ、Ａｇ、Ａｕを除く遷移金属元素を少
なくとも一種含有させたことを特徴とする磁性体膜。(1) Main component is Fe, Si, C, Al, Y or G
1. A magnetic film characterized in that at least one transition metal element other than Cu, Ag, and Au is contained in an Fe metal alloy film to which at least one element of e is added.
アトミック・パーセント）の範囲であることを特徴とす
る特許請求の範囲第（１）項記載の磁性体膜。(2) The content of the transition metal element is 1 to 10 at. %(
atomic percent).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP30291687A JPH01144603A (en) | 1987-11-30 | 1987-11-30 | Magnetic film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP30291687A JPH01144603A (en) | 1987-11-30 | 1987-11-30 | Magnetic film |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01144603A true JPH01144603A (en) | 1989-06-06 |
Family
ID=17914659
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP30291687A Pending JPH01144603A (en) | 1987-11-30 | 1987-11-30 | Magnetic film |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01144603A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5244627A (en) * | 1990-12-13 | 1993-09-14 | Matsushita Electric Industrial Co., Ltd. | Ferromagnetic thin film and method for its manufacture |
| EP0592922A2 (en) * | 1992-10-13 | 1994-04-20 | Konica Corporation | Magnetic recording medium |
-
1987
- 1987-11-30 JP JP30291687A patent/JPH01144603A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5244627A (en) * | 1990-12-13 | 1993-09-14 | Matsushita Electric Industrial Co., Ltd. | Ferromagnetic thin film and method for its manufacture |
| EP0592922A2 (en) * | 1992-10-13 | 1994-04-20 | Konica Corporation | Magnetic recording medium |
| EP0592922A3 (en) * | 1992-10-13 | 1994-06-15 | Konishiroku Photo Ind | Magnetic recording medium |
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