JPH01143784A - Dissimilar axis multi-focal point type laser beam converging device - Google Patents

Dissimilar axis multi-focal point type laser beam converging device

Info

Publication number
JPH01143784A
JPH01143784A JP62300198A JP30019887A JPH01143784A JP H01143784 A JPH01143784 A JP H01143784A JP 62300198 A JP62300198 A JP 62300198A JP 30019887 A JP30019887 A JP 30019887A JP H01143784 A JPH01143784 A JP H01143784A
Authority
JP
Japan
Prior art keywords
lens
flat
focal point
laser
projecting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62300198A
Other languages
Japanese (ja)
Other versions
JP2615093B2 (en
Inventor
Sukeaki Hamanaka
亮明 浜中
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Heavy Industries Ltd
Original Assignee
Mitsubishi Heavy Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Heavy Industries Ltd filed Critical Mitsubishi Heavy Industries Ltd
Priority to JP62300198A priority Critical patent/JP2615093B2/en
Publication of JPH01143784A publication Critical patent/JPH01143784A/en
Application granted granted Critical
Publication of JP2615093B2 publication Critical patent/JP2615093B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/073Shaping the laser spot
    • B23K26/0738Shaping the laser spot into a linear shape
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/0604Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams
    • B23K26/0608Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams in the same heat affected zone [HAZ]
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/067Dividing the beam into multiple beams, e.g. multifocusing

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)
  • Microscoopes, Condenser (AREA)

Abstract

PURPOSE:To simultaneously form focal points for preheating and main melting and forming a separate stage in one process by converging an output beam by the projecting part and flat part of a 1st lens and receiving each beam by the flat part and projecting part of a 2nd lens. CONSTITUTION:The projecting part bc of the lens 6B of one part and the flat fg of the lens 6A of the other part of two flat convex lenses 6A, 6B are arranged by respectively corresponding to the projecting parts ef, gh of the other part of lens 6A and the flat parts ab, cd of one part of lens 6B. The least one part of an output beam 4 is converged by the projecting part of the lens 6B, the flat part of the lens 6B is linearly propagated and the focal point 8A for preheating is connected. The majority of the output beam 4 is passed through the flat part of the lens 6B, condensed by the projecting part of the lens 6A and a main welding focal point 8B is connected. The preheating and main welding can thus be executed by a single process.

Description

【発明の詳細な説明】 〈産業上の利用分針〉 本発明は、レーザ加工装置による表面改質、溶接、溶断
などに適用されるビーム集光装置に関する。
DETAILED DESCRIPTION OF THE INVENTION <Industrial Application Minute Hand> The present invention relates to a beam condensing device applied to surface modification, welding, fusing, etc. using a laser processing device.

〈従来の技術〉 レーザ加工装置は第9図に示すような構成で、レーザ発
振器1、全反射鏡2、出力鏡3、全反射鏡5、集光レン
ズ6、ワーク7よりなす、伝送ビーム4は集光系である
集光レンズ6によりワーク7上の焦点8に集光される。
<Prior art> A laser processing device has a configuration as shown in FIG. is condensed to a focal point 8 on the workpiece 7 by a condensing lens 6 which is a condensing system.

第10図は、ワーク7の材料温度とレーザ光の吸収率を
示しており、溶融点上及びそれ以上の温度にて吸収が甚
だしい。すなわち、レーザ加工に当ってレーザ吸収率を
考慮しないと溶断などの加工ができないことが判明する
FIG. 10 shows the material temperature of the workpiece 7 and the absorption rate of laser light, and the absorption is severe at temperatures above the melting point and above. That is, it turns out that processing such as fusing cannot be performed unless the laser absorption rate is taken into consideration during laser processing.

〈発明が解決しようとする問題点〉 このように第9図に示すレーザ加工装置があり、第10
図に示すように加工に当ってレーザ吸収があることが判
明しているが、次の問題点がある。
<Problems to be solved by the invention> As described above, there is a laser processing apparatus shown in FIG.
As shown in the figure, it has been found that laser absorption occurs during processing, but there are the following problems.

■ 例えば第9図に示す1焦点レーザ光による深情は込
み溶接手段として、第10図の特公昭56−49195
号で示すごとく、波長10.6/jlのCO2レーザ光
のアルミニウムに対する吸収率の特性結果から、アルミ
ニウムが溶融すると吸収率が大幅に向上する特性を利用
して、予めTIG溶接で先行溶融させた領域にレーザ光
を後行照射させるというTIGとレーザ光の併用溶接法
の有効性を提案している。しかしこの方法では、2つの
加熱手段が不可欠となるものである。
■For example, as shown in Fig. 9, as a deep welding means using a single focus laser beam,
As shown in this issue, based on the characteristic results of the absorption rate of CO2 laser light with a wavelength of 10.6/jl for aluminum, the absorption rate increases significantly when aluminum is melted. We are proposing the effectiveness of a welding method using a combination of TIG and laser light, in which the region is irradiated with laser light in a backward direction. However, this method requires two heating means.

■ −点に集光させる焦点方式であるため、焼入れ、パ
ウダー肉盛などの表面処理への適用が困難である。
- Since it is a focusing method that focuses light on a point, it is difficult to apply it to surface treatments such as hardening and powder overlay.

そこで、本発明は、TIGとレーザとの併用溶接を用い
ず、しかも1点集光でない異軸多焦点式レーザビーム集
光装置を提供する。
Therefore, the present invention provides a different axis multifocal laser beam focusing device that does not use combined welding of TIG and laser and does not focus light on one point.

く問題点を解決するための手段〉 上述の目的を達成する本発明は、レーザ発振器及びビー
ム伝送系を経たビームを集光させるビーム集光装置にお
いて、 部分的に凸部で残りを平坦部としたレンズを嫂数個光軸
を一致させて配電したレンズ群であって、一方のレンズ
の凸部を他方のレンズの平坦部に対応させ、上記凸部の
中心どおしを異軸に形成したことを特徴とする。
Means for Solving the Problems> The present invention achieves the above-mentioned objects by providing a beam concentrating device that condenses a beam that has passed through a laser oscillator and a beam transmission system. A group of lenses in which power is distributed by several lenses with their optical axes aligned, the convex part of one lens corresponds to the flat part of the other lens, and the centers of the convex parts are formed on different axes. It is characterized by what it did.

く作   用〉 伝送ビームの一部と残部が加工方向に所定距離おいて形
成でき、また凸部を蒲鉾型に形成すればフォーカスライ
ンを加工方向に所定距離おいてできる。
Function: A part of the transmission beam and the remainder can be formed at a predetermined distance in the processing direction, and if the convex portion is formed in a semicircular shape, the focus line can be placed at a predetermined distance in the processing direction.

く爽 施 例〉 ここで、第1図ないし第8図を参照して本発明の詳細な
説明する。第1図ないし第3図、及び第7図は一実施例
で、第4図ないし第6図、及び第8図は他の実施例であ
る。第1図ないし第3図において、これは異軸多焦点集
光装置に係る。第1図において、2枚の平凸レンズ6A
、6Bがあり、一方のレンズ6Bの凸部bCと他方のレ
ンズ6Aの平坦部f、とが対応し、他方のレンズ6Aの
凸部ef。
EXAMPLES Here, the present invention will be described in detail with reference to FIGS. 1 to 8. 1 to 3 and 7 are one embodiment, and FIGS. 4 to 6 and 8 are other embodiments. In FIGS. 1 to 3, this relates to a different axis multifocal focusing device. In FIG. 1, two plano-convex lenses 6A
, 6B, the convex portion bC of one lens 6B corresponds to the flat portion f of the other lens 6A, and the convex portion ef of the other lens 6A.

ghと一方のレンズ6Bの平坦部ab、cdとが対応し
ている。そして、この2枚の平凸レンズの光軸は合致さ
せであるが、それぞれの凸部be、fgの各中心は異軸
になっている。すなわち、第2図、第3図において、凸
部6B−Aと平坦部6A−Bとが対応し、平坦部6B−
Bと凸部6A−Aとが対応している。
gh corresponds to flat portions ab and cd of one lens 6B. The optical axes of these two plano-convex lenses are aligned, but the centers of their respective convex portions be and fg are on different axes. That is, in FIGS. 2 and 3, the convex portion 6B-A and the flat portion 6A-B correspond to each other, and the flat portion 6B-
B corresponds to the convex portion 6A-A.

出力ビーム4の極く一部をレンズ6Bの凸部6B−Aで
集光させ、レンズ6Aの平坦部6A−Bで直進させ、予
熱用焦点8Aを結ぶ。
A very small portion of the output beam 4 is condensed by the convex portion 6B-A of the lens 6B, and is made to travel straight through the flat portion 6A-B of the lens 6A to form a preheating focal point 8A.

出力ビーム4の大部分をレンズ6Bの平坦部6B−Bで
直進させ、レンズ6Aの凸部6A−Aで集光させ、主溶
接焦点8Bを結ぶ。第7図にも示すごとく、焦点8Aに
より、微小な先行溶融池10を形成することにより、固
体金属よりも液体金属の方がレーザ吸収率が向上する効
果で先行溶融池10に照射された焦点8Bのビームエネ
ルギーの吸収が高められ深漬は込みが可能となる。なお
本例に於て、第2図のレンズ6Bの平坦部ab間に更に
凸部を設け、これと対応する第3図のef間に平坦部を
゛設けて、更に他の焦点を結ぶことにより、後熱もしく
は、後行溶融池を形成することも可能である。この効果
は、割れ感受性の高い金属の割れ防止や、再溶融時の気
孔浮上により気孔を除去することができる。
Most of the output beam 4 is caused to travel straight through the flat portion 6B-B of the lens 6B, and is focused by the convex portion 6A-A of the lens 6A to form a main welding focal point 8B. As shown in FIG. 7, by forming a minute pre-molten pool 10 by the focal point 8A, the laser absorption rate of liquid metal is higher than that of solid metal, and the focus irradiates the pre-molten pool 10. Absorption of 8B beam energy is enhanced and deep immersion becomes possible. In this example, a convex portion is further provided between the flat portions ab of the lens 6B in FIG. 2, and a flat portion is provided between the corresponding flat portions ef in FIG. 3 to form another focal point. It is also possible to form a trailing heat or a trailing molten pool. This effect can prevent cracking of metals with high crack susceptibility and remove pores by floating them during remelting.

第4図ないし第6図において、これは熱処理・肉盛用異
軸多フォーカスライン集合系に係る。第4図において、
2枚のレンズ6A。
In FIGS. 4 to 6, this relates to a different axis multi-focus line collection system for heat treatment and overlay. In Figure 4,
Two lenses 6A.

6Bがあり、一方のレンズ6Bには平坦部bCと蒲鉾型
(半円柱)部ab、cdがあり、他方のレンズ6Aには
平坦部と半円柱部ejとが存在する。そして、レンズ6
Aの平坦部とレンズ6Bの半円柱部ab、cdとが対応
し、レンズ6への半円柱部ofとレンズ6Bの平坦部b
Cとが対応する。すなわち、第5図。
6B, one lens 6B has a flat portion bC and semicylindrical portions ab and cd, and the other lens 6A has a flat portion and a semicylindrical portion ej. And lens 6
The flat part of A corresponds to the semi-cylindrical parts ab and cd of the lens 6B, and the semi-cylindrical part of to the lens 6 corresponds to the flat part b of the lens 6B.
C corresponds. That is, FIG.

第6図において、半円柱部am’ bb’ 、 cc’
 dd’と第6図の平坦部が対応し、半円柱部ae’f
f’と平坦部bb’cc’とが対応している。この結果
、9A、9B、9Cに焦点が形成されて!。
In FIG. 6, semi-cylindrical portions am'bb' and cc'
dd' corresponds to the flat part in Fig. 6, and the semi-cylindrical part ae'f
f' corresponds to the flat portion bb'cc'. As a result, focal points are formed at 9A, 9B, and 9C! .

n、mのフォーカスラインが形成されるg出力ビーム4
の一部をレンズ6Bの2つの半円柱部(aa’ b’ 
b、 cc’ d’ d)で集光させ、レンズ6Aの平
坦部を直進させて、予熱もしくは先行溶融用フォーカス
ライン9A及び後熱もしくは後行溶融用フォーカスライ
ン9Cを結ぶ。また、出力ビーム4の残部をレンズ6B
の平坦部bb’ c’ cを直進させ、レンズ6Aの半
円柱部ee’ f’ fで集光させて、主溶融用フォー
カスライン9Bを結ぶ。この9A。
g output beam 4 in which focus lines of n and m are formed.
A part of the two semi-cylindrical parts (aa'b'
b, cc'd' d), and the flat part of the lens 6A is moved straight to connect the focus line 9A for preheating or preceding melting and the focus line 9C for postheating or trailing melting. In addition, the remainder of the output beam 4 is transferred to the lens 6B.
The flat part bb'c' c of the lens 6A is caused to advance straight, and the semi-cylindrical part ee'f' f of the lens 6A focuses the light to connect the main melting focus line 9B. This 9A.

9B、9Cのフォーカスラインを第8図に示す如く、母
材13上に、塗布もしくは溶射により付着させた肉盛用
パウダ14に照射させろ。ここで、フォーカスライン9
Aで肉盛パウダ14の脱ガス(水分、バインダーなど)
を行い、フォーカスライン9Bで肉盛パウダを溶融させ
、フォーカスライン9Cで肉盛層の上部を再溶融するこ
とにより、残存気孔の除去を行うと共に、再加熱による
徐冷効果により割れ感受性の高い肉盛材の割れ発生を防
止した肉盛部15を得る。なお、本例に於て、2つのレ
ンズ間距離gを可変構造とするととによゆ、例えば第1
と第3を肉盛面上でデフォーカスとし、肉盛進行方向に
照射域を拡大してエネルギーの集中化を避けることも可
能である。又本発明の集光レンズ群6A、6Bと全反射
鏡間にビーム導波路(図示省略)を設け、伝送ビームそ
−ドの強度分布を台形状とすることにより、フォーカス
ライン方向のビーム強度分布を均一にすることもある。
As shown in FIG. 8, the focus lines 9B and 9C are irradiated onto the overlay powder 14 that has been deposited on the base material 13 by coating or thermal spraying. Here, focus line 9
Degassing the overlay powder 14 (moisture, binder, etc.) at A
By melting the build-up powder at focus line 9B and remelting the upper part of the build-up layer at focus line 9C, remaining pores are removed, and the slow cooling effect of reheating removes the meat that is highly susceptible to cracking. A built-up part 15 is obtained in which cracking of the built-up material is prevented. In this example, if the distance g between the two lenses is made variable, for example, the first
It is also possible to avoid concentration of energy by defocusing and third on the build-up surface and expanding the irradiation area in the build-up progressing direction. Furthermore, by providing a beam waveguide (not shown) between the converging lens groups 6A, 6B and the total reflection mirror of the present invention, and making the intensity distribution of the transmitted beam beam trapezoidal, the beam intensity distribution in the focus line direction can be improved. may be made uniform.

上記実施例では、便宜上、レンズ群を2枚構成としたが
、3枚以上とし、焦点数、フォーカスライン数を更に増
しても良い。
In the above embodiment, the lens group is composed of two lenses for convenience, but it may be three or more lenses, and the number of focal points and the number of focus lines may be further increased.

〈発明の効果〉 上記構成とすることにより次の効果がある。<Effect of the invention> The above configuration has the following effects.

■ 異軸多焦点レーザビーム集光とすることにより、T
IGとレーザとの併用をすることなく予熱効果や先行溶
融池のレーザ吸収効果が高まり、別々の加熱手段は不要
となる。
■ By focusing different axis multifocal laser beams, T
The preheating effect and the laser absorption effect of the preceding molten pool are enhanced without using IG and laser in combination, and separate heating means are not required.

■ 異軸多フォーカスライン式レーザビーム集光装置に
より、予熱、主溶融、再溶融(又は後熱)を1プロセス
でレーザ肉盛施工が可能である。
■ Laser metal deposition can be performed in one process including preheating, main melting, and remelting (or postheating) using a different axis multi-focus line type laser beam condenser.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図ないし第3図は本発明の一実施例で、第1図は構
成図、第2図は第1図のイーイ矢視図、第3図は第1図
のローロ矢視図、第4図ないし第6図は他の実施例で、
第4図は構成図、第、5図は第4図のハーバ矢視図、第
6図は第4図の二−二矢視図、第7図は一実施例の溶接
状態図、第8図は他の実施例のレーザ肉盛状態図、第9
図は従来例の構成図、第10図はレーザ吸収率と温度特
性線図である。 図     中、 6A、6Bはレンズ、 8A、8Bは焦点、 9A、9B、9Cはフォーカスライン(焦点)である。 第1図 伝送ビーム4 第2図    第3囚 1jA−巳 第4図 第5図    第6図 (ハーバ矢視)              (二−二
矢視)第7図 第8図
1 to 3 show one embodiment of the present invention, in which FIG. 1 is a configuration diagram, FIG. 2 is a view in the direction of the arrow E in FIG. 1, and FIG. 4 to 6 are other embodiments,
4 is a configuration diagram, FIGS. 5 and 5 are views in the direction of the harbor arrow in FIG. 4, FIG. The figure is a laser welding state diagram of another embodiment, No. 9
The figure is a configuration diagram of a conventional example, and FIG. 10 is a diagram of laser absorption rate and temperature characteristics. In the figure, 6A and 6B are lenses, 8A and 8B are focal points, and 9A, 9B, and 9C are focus lines (focal points). Fig. 1 Transmission beam 4 Fig. 2 Fig. 3 Prisoner 1jA-Snake Fig. 4 Fig. 5 Fig. 6 (View from Harbor arrow) (View from arrow 2-2) Fig. 7 Fig. 8

Claims (1)

【特許請求の範囲】  レーザ発振器及びビーム伝送系を経たビームを集光さ
せるビーム集光装置において、 部分的に凸部で残りを平坦部としたレンズを複数個光軸
を一致させて配電したレンズ群であって、一方のレンズ
の凸部を他方のレンズの平坦部に対応させ、上記凸部の
中心どおしを異軸に形成したことを特徴とする異軸多焦
点式レーザビーム集光装置。
[Scope of Claims] A beam concentrator that condenses a beam that has passed through a laser oscillator and a beam transmission system, comprising a plurality of lenses each having a convex portion and a flat portion and distributing power by aligning their optical axes with each other. A different-axis multifocal laser beam condenser, characterized in that the convex part of one lens corresponds to the flat part of the other lens, and the centers of the convex parts are formed on different axes. Device.
JP62300198A 1987-11-30 1987-11-30 Off-axis multifocal laser beam focusing device Expired - Fee Related JP2615093B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62300198A JP2615093B2 (en) 1987-11-30 1987-11-30 Off-axis multifocal laser beam focusing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62300198A JP2615093B2 (en) 1987-11-30 1987-11-30 Off-axis multifocal laser beam focusing device

Publications (2)

Publication Number Publication Date
JPH01143784A true JPH01143784A (en) 1989-06-06
JP2615093B2 JP2615093B2 (en) 1997-05-28

Family

ID=17881914

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62300198A Expired - Fee Related JP2615093B2 (en) 1987-11-30 1987-11-30 Off-axis multifocal laser beam focusing device

Country Status (1)

Country Link
JP (1) JP2615093B2 (en)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04344882A (en) * 1991-05-22 1992-12-01 Matsushita Electric Works Ltd Method for cutting with laser beam
US5728993A (en) * 1995-08-05 1998-03-17 The Boc Group Plc Laser cutting of materials with plural beams
US5841097A (en) * 1995-12-27 1998-11-24 Toyota Jidosha Kabushiki Kaisha Process and apparatus for welding workpieces with two or more laser beams whose spots are oscillated across welding direction
JP2000301376A (en) * 1999-04-05 2000-10-31 General Electric Co <Ge> Heat treatment of weld bead
JP2001179473A (en) * 1999-12-24 2001-07-03 Semiconductor Energy Lab Co Ltd Laser beam device, method of cutting substrate by using laser beam, and method of manufacturing semiconductor device
US6489588B1 (en) 1999-11-24 2002-12-03 Applied Photonics, Inc. Method and apparatus for separating non-metallic materials
EP2186594A1 (en) * 2008-11-12 2010-05-19 Siemens Aktiengesellschaft Method of and device for pre-heating during welding using a second laser beam
CN106695113A (en) * 2016-12-08 2017-05-24 华中科技大学 Axial bifocus lens
JP2018171623A (en) * 2017-03-31 2018-11-08 古河電気工業株式会社 Welding device and welding method

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04344882A (en) * 1991-05-22 1992-12-01 Matsushita Electric Works Ltd Method for cutting with laser beam
US5728993A (en) * 1995-08-05 1998-03-17 The Boc Group Plc Laser cutting of materials with plural beams
US5841097A (en) * 1995-12-27 1998-11-24 Toyota Jidosha Kabushiki Kaisha Process and apparatus for welding workpieces with two or more laser beams whose spots are oscillated across welding direction
JP2000301376A (en) * 1999-04-05 2000-10-31 General Electric Co <Ge> Heat treatment of weld bead
US6489588B1 (en) 1999-11-24 2002-12-03 Applied Photonics, Inc. Method and apparatus for separating non-metallic materials
US6660963B2 (en) 1999-11-24 2003-12-09 Applied Photonics, Inc. Method and apparatus for separating non-metallic materials
JP2001179473A (en) * 1999-12-24 2001-07-03 Semiconductor Energy Lab Co Ltd Laser beam device, method of cutting substrate by using laser beam, and method of manufacturing semiconductor device
EP2186594A1 (en) * 2008-11-12 2010-05-19 Siemens Aktiengesellschaft Method of and device for pre-heating during welding using a second laser beam
CN106695113A (en) * 2016-12-08 2017-05-24 华中科技大学 Axial bifocus lens
JP2018171623A (en) * 2017-03-31 2018-11-08 古河電気工業株式会社 Welding device and welding method

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